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公开(公告)号:US20050253132A1
公开(公告)日:2005-11-17
申请号:US10520849
申请日:2003-07-03
申请人: Gillian Marshall , David Robbins , Weng Leong
发明人: Gillian Marshall , David Robbins , Weng Leong
IPC分类号: H01L27/14 , H01L27/146 , H01L29/06 , H01L31/02 , H01L31/10 , H01L31/107 , H01L31/18
CPC分类号: H01L31/02027 , H01L27/14609 , H01L27/1464 , H01L27/14643
摘要: A photodetector circuit incorporates an APD detector structure (10) comprising a p− silicon handle wafer (12) on which a SiO2 insulation layer (14) is deposited in known manner. During manufacture a circular opening (16) is formed through the insulation layer (14) by conventional photolithography and etching, and an annular p+ substrate contact ring (18) is implanted in the handle wafer (12) after opening of the window (16). The APD itself is formed by implantation of a p region (20) and an n+ region (22). After the various implantation steps a metallisation layer is applied, and annular metal contacts are formed by the application of suitable photolithography and etching steps, these contacts comprising an annular contact (26) constituting the negative terminal and connected to the p+ substrate contact ring (18), an annular metal contact (28) constituting the positive terminal and connected to the n+ region (22) of the APD, and source and drain contacts (30) and (32) (not shown in FIG. 1) connected to the source and drain of one or more CMOS MOSFET devices of the associated CMOS readout circuitry fabricated within a Si layer (34) formed on top of the insulation layer (14). Such an arrangement overcomes the problem of combining APDs with CMOS circuits in that APDs operate at relatively high reverse bias (15-30V) and CMOS circuits operate at low voltage (SV), and the arrangement must be such as to prevent the high bias voltage from affecting the operation of adjacent CMOS transistors.
摘要翻译: 光电检测器电路包括APD检测器结构(10),其包括以已知方式沉积有SiO 2绝缘层(14)的p-硅处理晶片(12)。 在制造期间,通过常规光刻和蚀刻通过绝缘层(14)形成圆形开口(16),并且在打开窗口(16)之后,将环形p +衬底接触环(18)注入到处理晶片(12)中, 。 APD本身通过注入p区(20)和n +区(22)而形成。 在各种植入步骤之后,施加金属化层,并通过施加合适的光刻和蚀刻步骤形成环形金属触点,这些触点包括构成负极端子并连接到p +衬底接触环(18)的环形触点(26) ),构成正极并连接到APD的n +区域(22)的环形金属触点(28)以及源极和漏极触点(30)和(32)(图中未示出) 连接到在形成在绝缘层(14)的顶部上的Si层(34)内制造的相关联的CMOS读出电路的一个或多个CMOS MOSFET器件的源极和漏极。 这样一种布置克服了APD与CMOS电路的组合问题,因为APD在相对高的反向偏压(15-30V)下工作,CMOS电路在低电压(SV)下工作,并且这种布置必须能够防止高偏置电压 影响相邻CMOS晶体管的工作。
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公开(公告)号:US20060146377A1
公开(公告)日:2006-07-06
申请号:US10547652
申请日:2004-02-27
申请人: Gillian Marshall , Philip Kent , Roger Appleby , David Barrett , Janet Hughes , John Gillham , Peter Coward , Gordon Sinclair , John Savage , Piers Thomas Hawkesley
发明人: Gillian Marshall , Philip Kent , Roger Appleby , David Barrett , Janet Hughes , John Gillham , Peter Coward , Gordon Sinclair , John Savage , Piers Thomas Hawkesley
IPC分类号: H04N1/04
CPC分类号: G06T3/4038
摘要: Apparatus for scanning a moving object includes a visible waveband sensor 12 oriented to collect a series of images of the object as it passes through a field of view 16. An image processor 14 uses the series of images to form a composite image. The image processor 14 stores image pixel data for a current image and a predecessor image in the series. It uses information in the current image and its predecessor to analyse images and derive likelihood measures indicating probabilities that current image pixels correspond to parts of the object. The image processor 14 estimates motion between the current image and its predecessor from likelihood weighted pixels. It generates the composite image from frames positioned according to respective estimates of object image motion. Image motion may alternatively be detected by a speed sensor such as a Doppler radar 200 sensing object motion directly and providing image timing signals.
摘要翻译: 用于扫描运动物体的装置包括可视波段传感器12,其可被定向成在物体通过视场16时收集物体的一系列图像。图像处理器14使用该系列图像来形成合成图像。 图像处理器14存储当前图像的图像像素数据和前序图像。 它使用当前图像及其前身中的信息来分析图像并导出表示当前图像像素对应于对象部分的概率的似然度量。 图像处理器14从似然加权像素估计当前图像与其前身之间的运动。 它根据对象图像运动的相应估计定位的帧生成合成图像。 图像运动可以替代地由诸如多普勒雷达200的速度传感器直接检测物体运动并提供图像定时信号来检测。
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