摘要:
In order to produce differently thick dispersion layers on inner surfaces of hollow bodies, it is proposed according to the present invention to permit electrolyte to flow into the hollow body by way of a swirl-producing flow body, whereby the flow is split up into a laminar and a turbulent component. With turbulent flow, a high build-up rate of the solid particles is achieved than with laminar flow so that layes of different concentration can be realized in a single operation.
摘要:
The invention relates to a device, in particular for a laser-induced vacuum are discharge evaporator for depositing of multiple layers with a high level of purity and high deposition rates on large-area components. According to the invention, the material source for the coating material is in a source chamber which can be evacuated and can be separated in a vacuum-tight manner from the actual coating chamber in which the substrate to be coated is located. The evaporator can, in particular, be used for deposition of amorphous carbon layers which are hydrogen-free and superhard and/or which contain hydrogen, in conjunction with high-purity metal layers or for the reactive plasma-enhanced deposition of, for example, oxidic, carbide, nitride hard material layers of ceramic layers or a combination thereof. The corresponding plasma sources can be flange-mounted on any suitable coating chambers and, consequently, also combined with conventional coating processes, for example magnetron sputtering.