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1.发明申请公开(公告)号：US20050203409A1
公开(公告)日：2005-09-15
申请号：US10799973
申请日：2004-03-12
CPC分类号： B06B1/0292
摘要： Electrical interconnects are provided for CMUTs. For example, electrodes within the silicon substrate, such as the electrodes at the bottom of the void below membranes, are interconnected together within the substrate. The interconnected electrode may then be used as the grounding electrode. By providing interconnection within the substrate and below the membranes, space for vias and the associated connection between the electrodes on an exposed surface of the substrate is minimized. As another example, an electrical conductor is formed on the side of the silicon substrate rather than the top of the substrate. Conductors on the side may allow routing signals from a top surface to a bottom surface without large wire bonding pads. Alternatively, conductors on the edge provide additional space for wire bonding pads. As yet another example, polymer material used as a matching or protection layer is formed on the top surface of the CMUT with electrical traces routed within the polymer. By using multiple layers of polymer, multiple layers of electrical conductors may be routed without interference.
摘要翻译： 为CMUT提供电气互连。 例如，硅衬底内的电极，例如在膜下面的空隙底部的电极在衬底内互连在一起。 然后可以将互连的电极用作接地电极。 通过在衬底内和薄膜之下提供互连，通孔的空隙和衬底的暴露表面上的电极之间的相关连接最小化。 作为另一示例，电导体形成在硅衬底的侧面而不是衬底的顶部上。 侧面的导体可以允许从顶表面到底面的路由信号，而不需要大的引线接合焊盘。 或者，边缘上的导体为引线焊盘提供额外的空间。 作为另一个实例，用作匹配或保护层的聚合物材料形成在CMUT的顶表面上，其电导迹线在聚合物内布置。 通过使用多层聚合物，多层电导体可以无干扰地布线。
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公开(公告)号：US20070013264A1
公开(公告)日：2007-01-18
申请号：US11181520
申请日：2005-07-13
申请人： Walter Wilser , Sean Hansen , Grazyna Palczewska , Stephen Barnes
发明人： Walter Wilser , Sean Hansen , Grazyna Palczewska , Stephen Barnes
CPC分类号： B06B1/0292
摘要： CMUT elements are formed on a substrate. Electrical conductors are formed to interconnect between different portions of the substrate. The substrate is then separated into pieces while maintaining the electrical connections across the separation. Since the conductors are flexible, the separated substrate slabs may be positioned on a curved surface while maintaining the electrical interconnection between the slabs. Large curvatures may be provided, such as associated with forming a multidimensional transducer array for use in a catheter. The electrical interconnections between the different slabs and elements may allow for a walking aperture arrangement for three dimensional imaging.
摘要翻译： CMUT元件形成在基板上。 电导体形成为在衬底的不同部分之间互连。 然后将衬底分离成片，同时保持穿过分离的电连接。 由于导体是柔性的，所以分离的基板可以定位在弯曲表面上，同时保持板之间的电互连。 可以提供大的曲率，例如与形成用于导管的多维换能器阵列有关。 不同板坯和元件之间的电互连可以允许用于三维成像的步行孔布置。
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公开(公告)号：US20060173343A1
公开(公告)日：2006-08-03
申请号：US11015085
申请日：2004-12-17
IPC分类号： A61B8/14
CPC分类号： A61B8/00 , A61B8/14 , A61B8/4455 , A61B8/4483 , H05K1/0219
摘要： Electronic cross-talk is reduced in an ultrasound transducer. Ground traces are interleaved with signal traces on a flexible film. By providing ground traces between the signal traces, the electrical cross-talk between signal traces is reduced.
摘要翻译： 超声波换能器减少电子串扰。 接地迹线与柔性膜上的信号迹线交错。 通过在信号迹线之间提供接地迹线，信号迹线之间的电串扰减少。
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公开(公告)号：US06994674B2
公开(公告)日：2006-02-07
申请号：US10184785
申请日：2002-06-27
申请人： Todor Sheljaskow , Grazyna Palczewska , Stephen C. Englund , Thomas G. Houck , Gregg W. Frey , Ron Ho , Sevig Ayter , Xiaocong Guo
发明人： Todor Sheljaskow , Grazyna Palczewska , Stephen C. Englund , Thomas G. Houck , Gregg W. Frey , Ron Ho , Sevig Ayter , Xiaocong Guo
IPC分类号： A61B8/14
CPC分类号： G10K11/346 , A61B8/483 , B06B1/0622 , G01S7/003 , G01S7/5202 , G01S7/5208 , G01S15/8925 , G01S15/8961
摘要： A multi-dimensional transducer array has pitch along one dimension less than the pitch along a second dimension. The multi-dimensional transducer array with the same or different pitch is manufactured from a plurality of modules. Each of the modules are separately diced and then aligned and combined. Elements of a transducer array are used for isolating a transmit channel from a receive channel. Separate signal lines or traces are provided individually for each element on opposite sides of each element. A transmit channel may connect to one electrode on an element, and the receive channel may connect to an opposite electrode on the element. A multi-dimensional array is provided for time division multiplex processing. A probe houses the multi-dimensional array and a multiplexer.
摘要翻译： 多维换能器阵列具有沿着第二维度沿着一个尺寸小于间距的间距。 具有相同或不同间距的多维换能器阵列由多个模块制造。 每个模块分开切割，然后对齐并组合。 换能器阵列的元件用于隔离发射通道与接收通道。 为每个元件的相对侧上的每个元件分别提供单独的信号线或迹线。 传输通道可以连接到元件上的一个电极，并且接收通道可以连接到元件上的相对电极。 提供了用于时分复用处理的多维阵列。 探头容纳多维阵列和多路复用器。
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公开(公告)号：US20070261494A1
公开(公告)日：2007-11-15
申请号：US11696036
申请日：2007-04-03
申请人： William R. Fuller , Daniel N. Kelsch , Jan J. Lewandowski , Grazyna Palczewska , Alexander K. Smith
发明人： William R. Fuller , Daniel N. Kelsch , Jan J. Lewandowski , Grazyna Palczewska , Alexander K. Smith
IPC分类号： G01N29/04
摘要： Detection apparatus can include a positioning device with a wall including a substantially conical inner surface and a detection device configured to send and receive signals and move along the conical inner surface. Detection apparatus are also provided that comprise a positioning device and an end portion with an image port, a light device, and a detection device configured to send and receive signals. Ultrasonic transducer devices are also provided with a transducer material layer, a contact plating layer including a convex portion with an array of transducer elements, an acoustic matching layer, and a top plating layer.
摘要翻译： 检测装置可以包括具有包括基本上圆锥形内表面的壁的定位装置和被配置为发送和接收信号并沿着锥形内表面移动的检测装置。 还提供了检测装置，其包括定位装置和具有图像端口的端部，光装置和被配置为发送和接收信号的检测装置。 超声波换能器装置还设置有换能器材料层，接触镀层，包括具有换能器元件阵列的凸部，声匹配层和顶镀层。
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公开(公告)号：US20050225210A1
公开(公告)日：2005-10-13
申请号：US10815307
申请日：2004-04-01
申请人： Stephen Englund , Ellen Rowland , Grazyna Palczewska , Gregg Frey , Todor Sheljaskow , Lisa Fearn , Vaughn Marian , Nelson Oliver , Walter Wilser , Worth Walters
发明人： Stephen Englund , Ellen Rowland , Grazyna Palczewska , Gregg Frey , Todor Sheljaskow , Lisa Fearn , Vaughn Marian , Nelson Oliver , Walter Wilser , Worth Walters
CPC分类号： B06B1/0622
摘要： Electrical connection is provided in a transducer stack through a backing block. A flexible circuit is sandwiched between pieces of acoustic attenuating material. For example, 2 to 200 or more flexible circuits are stacked in alternating layers with pieces of acoustically attenuating material. The alternating layers are then connected together to form a backing block with Z-axis electrical connection. The top surface of the connected backing block includes a plurality of exposed electrical traces from the flex circuit. Since flex circuits are used, the electrical traces are precisely aligned along one dimension. Since pre-formed acoustic attenuating material pieces are used, precise alignment is provided along a second or orthogonal dimension. The substrate holding the electrical traces in the flexible circuits provides more stability and allows for easier connection to circuit boards as compared to individual strips of metal.
摘要翻译： 通过背衬块在换能器堆叠中提供电气连接。 柔性电路夹在声衰减材料片之间。 例如，2到200个或更多个柔性电路以交替的层与多个声衰减材料堆叠。 然后将交替层连接在一起以形成具有Z轴电连接的背衬块。 连接的背衬块的顶表面包括来自柔性电路的多个暴露的电迹线。 由于使用柔性电路，所以电迹线沿着一个维度精确对准。 由于使用了预先形成的声衰减材料片，所以沿着第二或正交的尺寸提供精确对准。 与单个金属条相比，在柔性电路中保持电迹线的基板提供更多的稳定性并且允许更容易地连接到电路板。
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7.发明申请Multidimensional transducer probe with different transmit and receive segments for medical ultrasound imaging 审中-公开具有不同发射和接收段的多维传感器探针用于医学超声成像公开(公告)号：US20050148877A1
公开(公告)日：2005-07-07
申请号：US10738685
申请日：2003-12-17
申请人： Xiaocong Guo , Todor Sheljaskow , Linxin Yao , Grazyna Palczewska
发明人： Xiaocong Guo , Todor Sheljaskow , Linxin Yao , Grazyna Palczewska
CPC分类号： A61B8/14 , B06B1/0629 , G10K11/346
摘要： Methods, systems, and probes are provided for medical ultrasound imaging. By using larger segments for transmit than receive or by using a sparse sampling of elements on transmit than used for receive, the number of transmit beamformer channels relative to receive beamformer channels is reduced. Where the transmit waveformed generators of the transmit beamformer channels are positioned within an ultrasound probe, the space and power requirements of the transmit beamformer channels are reduced based on the reduction in number of transmit segments. Different approaches may be used for reducing the number of transmit channels relative to receive segments. For example, a flexible circuit is connected to one side of a multi-dimensional array and defines transmit segments as groups of two or more elements. A different flexible circuit connects on an opposite side of the elements. The different flexible circuit defines receive segments as individual elements or a fewer number of elements than the transmit segments. Alternatively, switching is used to combine elements into single transmit segments. As another alternative, switching or configuring electrode circuits is used to define transmit segments as sparsely-spaced elements and the receive segments as a less sparsely spaced. In yet another approach, the transmit aperture covers a lesser area than the receive aperture, such as through sparse spacing or having smaller overall dimensions.
摘要翻译： 为医学超声成像提供了方法，系统和探针。 通过使用比接收更大的发送段，或通过使用传输上的元素的稀疏采样而不是用于接收，相对于接收波束形成器信道的发射波束形成器信道的数量减少。 在发射波束形成信道的发射波形发生器位于超声波探头内的情况下，基于发射段数量的减少，发射波束形成信道的空间和功率要求被减小。 可以使用不同的方法来减少相对于接收段的发送信道的数量。 例如，柔性电路连接到多维阵列的一侧，并将传输段定义为两个或多个元件的组。 不同的柔性电路在元件的相对侧连接。 不同的柔性电路将接收段定义为单独的元件或者比发射段更少的元件数量。 或者，切换用于将元件组合成单个发送段。 作为另一替代方案，使用切换或配置电极电路来将发射段定义为稀疏间隔的元件，并且接收段作为较少稀疏间隔。 在另一种方法中，传输孔径覆盖比接收孔径小的区域，例如通过稀疏间隔或具有较小的总体尺寸。
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公开(公告)号：US5920972A
公开(公告)日：1999-07-13
申请号：US883778
申请日：1997-06-27
申请人： Grazyna Palczewska , Inessa Persatieva , Ron Ho
发明人： Grazyna Palczewska , Inessa Persatieva , Ron Ho
摘要： A method of providing connections to an arrangement of multilayer transducer elements of an ultrasonic transducer array includes patterning an electrically conductive layer on a substrate to define a number of traces and a wide-area continuous region. At least a portion of the substrate is then removed to expose both of the upper and lower surfaces of the wide-area conductive region. The exposed upper and lower surfaces are captured between first and second piezoelectric layers such that the conductive layer electrically contacts both of the piezoelectric layers. The captured wide-area continuous region and at least one of the piezoelectric layers are diced to define the array of transducer elements. The traces that are formed during the patterning step are arranged such that there is a one-to-one correspondence between the traces and the electrodes that are defined by segmenting the wide-area continuous region during the dicing step.
摘要翻译： 提供到超声换能器阵列的多层换能器元件的布置的连接的方法包括对衬底上的导电层进行图案化以限定多个迹线和广域连续区域。 然后去除衬底的至少一部分以暴露广域导电区域的上表面和下表面。 暴露的上表面和下表面被捕获在第一和第二压电层之间，使得导电层电接触两个压电层。 捕获的广域连续区域和至少一个压电层被切割以限定换能器元件的阵列。 在图案化步骤期间形成的迹线被布置成使得在切割步骤期间通过分割广域连续区域来限定迹线和电极之间存在一一对应的关系。
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公开(公告)号：US5617865A
公开(公告)日：1997-04-08
申请号：US414980
申请日：1995-03-31
申请人： Grazyna Palczewska , Ron Ho
发明人： Grazyna Palczewska , Ron Ho
CPC分类号： B06B1/0622 , B06B1/0629 , Y10T29/42
摘要： An ultrasonic transducer array has a piezoelectric ceramic layer that is separated in a longitudinal direction into n transducer groups. Each group is separated in a transverse direction into m elements. A double-sided flex circuit has a flexible, non-conductive base layer, through which conductive vias extend and are in electrical contact with a respective element. A conductive layer on a bottom side of the flex circuit is divided into a plurality of electrodes, each of which is in electrical contact with a respective one of the elements. For each group, electrically conductive traces connect predetermined ones of the flex circuit electrodes with external driving circuitry, and are located on a top side of the flex circuit. Transducer groups with different numbers of elements are provided, some with 1.5-D operation (with element pairs stimulated via a common trace) and some with 2-D operation (with separate traces for each element). For embodiments with more than three elements per group, the flex circuit includes more than one base layer. The invention also makes it possible at most two traces located on the top side of the flex circuit for each group, measured in the longitudinal direction. In one implementation, each array group was no wider than 300 .mu.m, each trace was at least 50 .mu.m, and the separation between each via and the nearest trace which is not connected to it was at least 75 .mu.m.
摘要翻译： 超声波换能器阵列具有沿纵向分离成n个换能器组的压电陶瓷层。 每个组在横向上分离成m个元素。 双面柔性电路具有柔性的非导电基底层，导电通孔通过该底层延伸并与相应的元件电接触。 柔性电路的底侧上的导电层被分成多个电极，每个电极与相应的一个元件电接触。 对于每个组，导电迹线将预定的柔性电路电极与外部驱动电路连接，并且位于柔性电路的顶侧。 提供具有不同数量元件的传感器组，一些具有1.5-D操作（通过公共痕迹刺激的元件对）和一些具有2-D操作（每个元件具有单独的迹线）。 对于每组具有多于三个元件的实施例，柔性电路包括多于一个的基础层。 本发明还使得在纵向方向上测量的每个组的柔性电路的顶侧上的至多两个走线可能最多。 在一个实施方案中，每个阵列组不超过300μm，每个迹线至少为50μm，并且每个通孔与未连接的最接近的迹线之间的间隔为至少75μm。
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