专利检索 ap:"Griffin A. P. Hovorka" 第 1 页

1.

发明授权
Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer system 有权

公开(公告)号：US10444140B1

公开(公告)日：2019-10-15

申请号：US16501699

申请日：2019-05-23

申请人： Griffin A. P. Hovorka , Martin M. Liphardt , Galen L Pfeiffer

发明人： Griffin A. P. Hovorka , Martin M. Liphardt , Galen L Pfeiffer

IPC分类号： G01J3/42 , G01N21/01 , G01N21/55 , G01N21/21 , G01N21/31

摘要： A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.