-
公开(公告)号：US10444140B1
公开(公告)日：2019-10-15
申请号：US16501699
申请日：2019-05-23
摘要： A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.
-
2.发明授权Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US08436994B2
公开(公告)日：2013-05-07
申请号：US12930762
申请日：2011-01-15
IPC分类号： G01J4/00
CPC分类号： G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。
-
公开(公告)号：US08130375B1
公开(公告)日：2012-03-06
申请号：US12462002
申请日：2009-07-28
IPC分类号： G01N1/10
CPC分类号： G01N21/211 , G01N21/0332 , G01N21/05 , G01N2021/0346 , G01N2021/054
摘要： A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
摘要翻译： 具有流体入口的小的内部体积电池和出口端口，其中在与流体出口连续的流体路径中存在至少一个气泡阱。 进一步存在用于进入和退出电磁辐射的输入/输出孔径，其被定位成允许电磁辐射的输入束在其使用期间在其上的位置处撞击在样品基板上; 以及用于引导从所述样品基板反射并朝向和离开所述输入/输出孔的电磁辐射的反射镜; 以及其使用方法。
-
4.发明授权System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters 有权用于控制椭偏仪和偏光计中电磁辐射束强度的系统和方法公开(公告)号：US07830512B2
公开(公告)日：2010-11-09
申请号：US12075956
申请日：2008-03-14
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0213 , G01J3/0224 , G01J4/00 , G02B27/281
摘要： An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
摘要翻译： 一种用于通过施加控制（P2）和光束（P）偏振器，可选地与中间和控制补偿器（C）组合来控制波长范围上的电磁束的强度的椭圆计或偏振计系统和方法。
-
公开(公告)号：US07633625B1
公开(公告)日：2009-12-15
申请号：US11901225
申请日：2007-09-17
申请人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
发明人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
CPC分类号： G01J3/02 , G01J3/0213 , G01J3/0224 , G01J3/10 , G01N21/211 , G01N21/274 , G01N2021/213
摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
-
公开(公告)号：US07616319B1
公开(公告)日：2009-11-10
申请号：US11890354
申请日：2007-08-05
申请人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
发明人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008 , G02B27/286
摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译： 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。
-
7.发明申请Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US20090103093A1
公开(公告)日：2009-04-23
申请号：US12313760
申请日：2008-11-25
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N21/01 , G01N21/21 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，应用于 映射椭偏仪等。
-
公开(公告)号：US09347768B1
公开(公告)日：2016-05-24
申请号：US13385761
申请日：2012-03-06
CPC分类号： G01B11/14 , G01J1/0242 , G01J3/0278 , G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N21/8901 , G01N2021/8609
摘要： A system for monitoring, in real time, relatively large samples as they are caused to pass by an ellipsometer or the like system, and method of its use.
摘要翻译： 一种用于通过椭偏仪或类似系统实时监测相对较大的样本的系统及其使用方法。
-
9.发明申请Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US20110109906A1
公开(公告)日：2011-05-12
申请号：US12930762
申请日：2011-01-15
IPC分类号： G01B11/00
CPC分类号： G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。
-
10.发明申请System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters 有权用于控制椭偏仪和偏光计中电磁辐射束强度的系统和方法公开(公告)号：US20090231700A1
公开(公告)日：2009-09-17
申请号：US12075956
申请日：2008-03-14
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0213 , G01J3/0224 , G01J4/00 , G02B27/281
摘要： An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
摘要翻译： 一种用于通过施加控制（P2）和光束（P）偏振器，可选地与中间和控制补偿器（C）组合来控制波长范围上的电磁束的强度的椭圆计或偏振计系统和方法。
-
-
-
-
-
-
-
-
-
搜索结果
115 条记录 (耗时 0.041 秒)
