公开(公告)号：US6115126A

公开(公告)日：2000-09-05

申请号：US235874

申请日：1999-01-22

Applicant: Yi-Chun Chen ,  Shu-Sheng Lee ,  Chung-Min Lee ,  Ching-Wei Chen ,  Heui-Yung Chang ,  Gym-Bin Yeh ,  Chih-Kung Lee ,  Shih-Tsong Lin ,  Chi-Tang Hsieh ,  Wei-Liang Chen

Inventor： Yi-Chun Chen ,  Shu-Sheng Lee ,  Chung-Min Lee ,  Ching-Wei Chen ,  Heui-Yung Chang ,  Gym-Bin Yeh ,  Chih-Kung Lee ,  Shih-Tsong Lin ,  Chi-Tang Hsieh ,  Wei-Liang Chen

IPC: G01J9/02 ,  G01B9/02

CPC classification number: G01J9/0215

Abstract: An optical wavefront analyzer based on the phase-shearing interferometry technique for measuring a wavefront of a light beam is disclosed. The analyzer includes a single phase shifter, a driving device, a pattern receiving device, and a phase reconstructing device. A method of measuring a wavefront of a light beam is also provided for solving the problems of two-axial focusing and phase inconsistency encountered the prior art by employing phase-shearing and phase-shifting techniques to improve the method of optical wavefront mesurement. A non-iterative, path-independent unwrapping methodology is used to deal with a complicated wavefront.

Abstract translation: 公开了一种基于用于测量光束的波前的相位剪切干涉技术的光学波前分析器。 该分析器包括单个移相器，驱动装置，模式接收装置和相位重建装置。 还提供了一种测量光束的波前的方法，用于通过采用相位剪切和相移技术来改进光波前测量的方法来解决现有技术中遇到的双轴向聚焦和相位不一致的问题。 非迭代的路径独立展开方法用于处理复杂的波前。