公开(公告)号：US20170276552A1

公开(公告)日：2017-09-28

申请号：US15510839

申请日：2015-09-18

申请人： ONERA (OFFICE NATIONAL D'ETUDES ET DE RECHERCHES AEROSPATIALES)

发明人： Cindy BELLANGER ,  Maxime DEPREZ ,  Laurent LOMBARD ,  Jerome PRIMOT

IPC分类号： G01J9/02 ,  G01J9/00

CPC分类号： G01J9/02 ,  G01J9/0215 ,  G01J2009/002

摘要： A wavefront analyser is modified to simply determine the differences in amplitude and tilt which can exist between the different regions of an initial wavefront (S0). To achieve this, interference between two waves only is produced from beams (F1, F2) which come from neighbouring regions on the initial wavefront. Such an analyser can be used to coherently combine laser radiation produced by different sources arranged in parallel. Another use is for the determination of the differences in height and inclination which exist between the neighbouring mirror segments of a Keck telescope.

公开(公告)号：US20170219458A1

公开(公告)日：2017-08-03

申请号：US15329377

申请日：2015-07-29

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Junji OKUMA ,  Yasunori IGASAKI

IPC分类号： G01M11/00 ,  G01J9/02

CPC分类号： G01M11/00 ,  G01J9/02 ,  G01J9/0215

摘要： A first reflection member, when light is incident, reflects a part of the light by a first reflection surface, reflects light transmitted through the first reflection surface by a second reflection surface, and emits reflected light components in an opposite direction. The second reflection member, when light emitted from the first reflection member is incident, reflects a part of the light by a first reflection surface, reflects light transmitted through the first reflection surface by a second reflection surface, and emits reflected light components. Interference fringes are formed on a screen by light reflected on the first reflection surface of the first reflection member and the second reflection surface of the second reflection member and light reflected on the second reflection surface of the first reflection member and the first reflection surface of the second reflection member.

公开(公告)号：US20170184455A1

公开(公告)日：2017-06-29

申请号：US14986560

申请日：2015-12-31

申请人： Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

发明人： Xiangzhao Wang ,  Feng Tang ,  Guoxian Zhang ,  Shifu Xu

IPC分类号： G01J9/02

CPC分类号： G01M11/0271 ,  G01J9/0215 ,  G01J2009/0223 ,  G01J2009/0226 ,  G01J2009/0265 ,  G03F7/706

摘要： A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.

公开(公告)号：US20160259158A1

公开(公告)日：2016-09-08

申请号：US15092220

申请日：2016-04-06

申请人： Ramot at Tel-Aviv University Ltd.

发明人： Pinhas GIRSHOVITZ ,  Natan Tzvi SHAKED

IPC分类号： G02B21/00 ,  G02B27/52

CPC分类号： G02B21/0056 ,  G01J9/0215 ,  G02B21/14 ,  G02B27/52

摘要： The present invention discloses an optical arrangement to be associated with an optical system and an external imaging system, a sample inspection imaging system and a method for generating a differential interference contrast (DIC) image. The optical arrangement comprises a beam-shearing interference module including at least two optical elements being at least partially reflective. A first optical element is configured and operable for receiving an image from the imaging system including an input beam and splitting the input beam into first and second light beams of the same amplitude and phase modulation. A second optical element is accommodated in first and second optical paths of the first and second light beams. At least one of the first and second optical elements is configured and operable for creating a shear between the first and second light beams. The second optical element is configured for reflecting the first and second light beams with a shear between them towards the detector to thereby generate a differential interference contrast (DIC) image.

摘要翻译： 本发明公开了一种与光学系统和外部成像系统相关联的光学装置，样本检查成像系统和用于产生微分干涉对比（DIC）图像的方法。 光学装置包括光束剪切干涉模块，其包括至少部分反射的至少两个光学元件。 第一光学元件被配置和操作用于从成像系统接收包括输入光束并且将输入光束分成具有相同幅度和相位调制的第一和第二光束的图像。 第二光学元件容纳在第一和第二光束的第一和第二光路中。 第一和第二光学元件中的至少一个被构造和操作用于在第一和第二光束之间产生剪切。 第二光学元件被配置为将第一和第二光束之间的剪切反射到检测器，从而产生差分干涉对比度（DIC）图像。

公开(公告)号：US20150300885A1

公开(公告)日：2015-10-22

申请号：US14587392

申请日：2014-12-31

申请人： RAM Photonics, LLC

发明人： Seung-Whan Bahk

IPC分类号： G01J9/02

CPC分类号： G01J9/0215 ,  G01B9/02 ,  G01J9/02 ,  G01J2009/002 ,  G03F7/706

摘要： A method of measuring characteristics of a wavefront of an incident beam includes obtaining an interferogram associated with the incident beam passing through a transmission mask and Fourier transforming the interferogram to provide a frequency domain interferogram. The method also includes selecting a subset of harmonics from the frequency domain interferogram, individually inverse Fourier transforming each of the subset of harmonics to provide a set of spatial domain harmonics, and extracting a phase profile from each of the set of spatial domain harmonics. The method further includes removing phase discontinuities in the phase profile, rotating the phase profile, and reconstructing a phase front of the wavefront of the incident beam.

摘要翻译： 测量入射光束的波前特性的方法包括获得与通过透射掩模的入射光束相关联的干涉图，并对干涉图进行傅里叶变换以提供频域干涉图。 该方法还包括从频域干涉图中选择一个谐波子集，单独逆傅里叶变换谐波子集中的每一个以提供一组空间域谐波，以及从该组空间域谐波中的每一个提取相位分布。 该方法还包括去除相位分布中的相位不连续性，旋转相位分布，以及重建入射光束的波前的相位前沿。

公开(公告)号：US20150253248A1

公开(公告)日：2015-09-10

申请号：US14642655

申请日：2015-03-09

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： H. Kumar Wickramasinghe

IPC分类号： G01N21/65 ,  G01J3/45 ,  G01J3/44

CPC分类号： G01N21/65 ,  G01J3/0224 ,  G01J3/44 ,  G01J3/45 ,  G01J3/453 ,  G01J9/0215 ,  G01J2009/0261 ,  G01N2021/655 ,  G01Q30/02

摘要： An apparatus and method for measuring amplitude and/or phase of a molecular vibration uses a polarization modulated pump beam and a stimulating Stokes beam on a probe of a scanning probe microscope to detect a Raman scattered Stokes beam from the sample. The detected Raman scattered Stokes beam is used to derive at least one of the amplitude and the phase of the molecular vibration.

摘要翻译： 用于测量分子振动的幅度和/或相位的装置和方法使用偏振调制泵浦光束和刺激斯托克斯光束在扫描探针显微镜的探针上以检测来自样品的拉曼散射斯托克斯光束。 检测到的拉曼散射斯托克斯光束用于推导分子振动的振幅和相位中的至少一个。

公开(公告)号：US20150146213A1

公开(公告)日：2015-05-28

申请号：US14318003

申请日：2014-06-27

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Hyug-Gyo RHEE ,  Young Sik GHIM ,  Ho Soon YANG ,  Yun Woo LEE

IPC分类号： G01J9/02

CPC分类号： G01J9/0215 ,  G01J2009/002

摘要： Provided is an operating method of a measuring apparatus measuring a wavefront of a target. The operating method includes measuring a measurement wavefront on the basis of the wavefront of the target, measuring reference slope information and first to third slope information respectively corresponding to a reference direction and first to third directions on the basis of the measurement wavefront, obtaining first to third rotation angles on the basis of the measured reference slope information and first to third slope information, and outputting a wavefront of which an error is corrected, which is generated by rotation errors on the basis of the obtained first to third rotation angles, wherein the first to third rotation angles are differences in angle between the reference direction and the first to third directions.

摘要翻译： 提供了测量目标的波前的测量装置的操作方法。 操作方法包括基于目标的波阵面测量测量波阵面，基于测量波阵面测量分别对应于参考方向和第一至第三方向的参考斜率信息和第一至第三斜率信息，首先获得 基于所测量的基准斜率信息和第一至第三斜率信息的第三旋转角度，并且基于获得的第一至第三旋转角度输出由旋转误差产生的误差校正的波阵面，其中， 第一至第三旋转角度是参考方向和第一至第三方向之间的角度差。

公开(公告)号：US20150077755A1

公开(公告)日：2015-03-19

申请号：US14256361

申请日：2014-04-18

申请人： THE GENERAL HOSPITAL CORPORATION

发明人： SEOK-HYUN YUN ,  BRETT EUGENE BOUMA ,  GUILLERMO J. TEARNEY ,  JOHANNES FITZGERALD DE BOER

IPC分类号： G01B9/02

CPC分类号： H01S5/5045 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/7257 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02043 ,  G01B9/02075 ,  G01B9/02081 ,  G01B9/02083 ,  G01B9/02084 ,  G01B9/0209 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0264 ,  G01J3/453 ,  G01J9/0215 ,  G01N21/4795 ,  G02B6/3604 ,  G02B26/12 ,  G02B27/48 ,  G02F1/093 ,  G02F1/11 ,  H01S3/0071 ,  H01S3/0078 ,  H01S3/08009 ,  H01S3/08063 ,  H01S3/105 ,  H01S3/1068 ,  H01S5/0071 ,  H01S5/0078 ,  H01S5/1025 ,  H01S5/14 ,  H01S5/141 ,  H01S5/146

摘要： An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency of the first and/or second radiations varies over time. An interference is detected between at least one third radiation associated with the first radiation and at least one fourth radiation associated with the second radiation. Alternatively, the first electro-magnetic radiation and/or second electro-magnetic radiation have a spectrum which changes over time. The spectrum may contain multiple frequencies at a particular time. In addition, it is possible to detect the interference signal between the third radiation and the fourth radiation in a first polarization state. Further, it may be preferable to detect a further interference signal between the third and fourth radiations in a second polarization state which is different from the first polarization state. The first and/or second electro-magnetic radiations may have a spectrum whose mean frequency changes substantially continuously over time at a tuning speed that is greater than 100 Tera Hertz per millisecond.

公开(公告)号：US08654348B2

公开(公告)日：2014-02-18

申请号：US12426994

申请日：2009-04-21

申请人： Jérôme Primot ,  Bruno Toulon ,  Nicolas Guérineau ,  Sabrina Velghe ,  Riad Haidar

发明人： Jérôme Primot ,  Bruno Toulon ,  Nicolas Guérineau ,  Sabrina Velghe ,  Riad Haidar

IPC分类号： G01B9/02

CPC分类号： G01J9/0215

摘要： The application relates to a method for analyzing the wave surface of a light beam from a source to the focus of a lens. The beam illuminates a sample on the analysis plane and having a defect. A diffraction grating of the plane is a conjugate of an analysis plane through a focal system. An image is formed in a plane at a distance from the grating plane and analyzed by processing means. The invention encodes this grating by a phase function resulting from the multiplication of two phase functions, a first exclusion function defining a meshing of useful zones transmitting the beam to be analyzed in the form of light pencil beams, and a second phase fundamental function which creates a phase opposition between two light pencil beams coming out of adjacent meshes of the exclusion grating.

摘要翻译： 本申请涉及一种用于分析从光源到透镜的焦点的光束的波面的方法。 光束照射分析平面上的样品并具有缺陷。 平面的衍射光栅是通过焦点系统的分析平面的共轭。 在与光栅平面一定距离的平面中形成图像，并通过处理装置进行分析。 本发明通过由两相功能的乘法产生的相位函数对该光栅进行编码，第一排除函数定义了以光笔形式的光束传输要分析的光束的有用区域的啮合，以及第二相位基函数，其形成 两个光束笔之间的相位相对离开了排除光栅的相邻网格。

公开(公告)号：US08384909B2

公开(公告)日：2013-02-26

申请号：US12795529

申请日：2010-06-07

申请人： Seok-Hyun Yun ,  Brett E. Bouma ,  Guillermo J. Tearney ,  Johannes Fitzgerald De Boer

发明人： Seok-Hyun Yun ,  Brett E. Bouma ,  Guillermo J. Tearney ,  Johannes Fitzgerald De Boer

IPC分类号： G01B11/02 ,  G01B9/02

CPC分类号： H01S5/5045 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/7257 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02043 ,  G01B9/02075 ,  G01B9/02081 ,  G01B9/02083 ,  G01B9/02084 ,  G01B9/0209 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0264 ,  G01J3/453 ,  G01J9/0215 ,  G01N21/4795 ,  G02B6/3604 ,  G02B26/12 ,  G02B27/48 ,  G02F1/093 ,  G02F1/11 ,  H01S3/0071 ,  H01S3/0078 ,  H01S3/08009 ,  H01S3/08063 ,  H01S3/105 ,  H01S3/1068 ,  H01S5/0071 ,  H01S5/0078 ,  H01S5/1025 ,  H01S5/14 ,  H01S5/141 ,  H01S5/146

摘要： An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency of the first and/or second radiations varies over time. An interference is detected between at least one third radiation associated with the first radiation and at least one fourth radiation associated with the second radiation. Alternatively, the first electro-magnetic radiation and/or second electro-magnetic radiation have a spectrum which changes over time. The spectrum may contain multiple frequencies at a particular time. In addition, it is possible to detect the interference signal between the third radiation and the fourth radiation in a first polarization state. Further, it may be preferable to detect a further interference signal between the third and fourth radiations in a second polarization state which is different from the first polarization state. The first and/or second electro-magnetic radiations may have a spectrum whose mean frequency changes substantially continuously over time at a tuning speed that is greater than 100 Tera Hertz per millisecond.

摘要翻译： 提供了一种装置和方法。 特别地，可以向样品提供至少一个第一电磁辐射，并且可以向非反射参考提供至少一个第二电磁辐射。 第一和/或第二辐射的频率随时间变化。 在与第一辐射相关联的至少一个第三辐射与与第二辐射相关联的至少一个第四辐射之间检测到干扰。 或者，第一电磁辐射和/或第二电磁辐射具有随时间变化的光谱。 频谱可以在特定时间包含多个频率。 此外，可以在第一偏振状态下检测第三辐射与第四辐射之间的干涉信号。 此外，可能优选在与第一偏振状态不同的第二偏振态中检测第三和第四辐射之间的另外的干扰信号。 第一和/或第二电磁辐射可以具有在每毫秒大于100Tera赫兹的调谐速度下，其平均频率随时间而基本连续变化的频谱。