公开(公告)号：US06459949B1

公开(公告)日：2002-10-01

申请号：US09176537

申请日：1998-10-21

Applicant: Hang T. Black ,  Arturo N. Morosoff ,  Joseph Lebowitz

Inventor： Hang T. Black ,  Arturo N. Morosoff ,  Joseph Lebowitz

IPC: G06F1900

CPC classification number: G05B19/41875 ,  G05B2219/31365 ,  G05B2219/32214 ,  Y02P90/12 ,  Y02P90/22 ,  Y10S707/99945 ,  Y10S707/99948 ,  Y10S707/99953

Abstract: A system and method for recording and addressing out of control (OOC) events in a semiconductor processing line. The method includes steps of (a) opening OOC entries in an OOC database, and (b) working the OOC entries. Opening an OOC entry is performed in response to one or more OOC events in wafer lots being processed in the semiconductor processing line. A lot record addresses an isolated occurrence pertaining to one wafer lot. An issue record addresses a trend of repeated defects or failures. Opening an OOC entry in the OOC database preferably includes assigning and recording an “owner” responsible for addressing the OOC entry. Working the OOC entries includes opening activity records for the OOC entries, receiving user input on corrective measures, and recording the measures in the activity records. The method preferably also includes steps of (c) closing OOC entries after working the OOC entries, and (d) reassigning OOC entries if ownership is transferred for the entries. The system includes (a) a plurality of computer systems, including a plurality of entry terminals, (b) an OOC database coupled to the plurality of computer systems, (c) an OOC interface executing on one or more of the entry terminals and coupled to the OOC database, and (d) an OOC tracking program executing on one or more of the computer systems and coupled to the OOC database and to the OOC interface.

Abstract translation: 一种用于在半导体处理线中记录和寻址失控（OOC）事件的系统和方法。 该方法包括以下步骤：（a）在OOC数据库中打开OOC条目，以及（b）处理OOC条目。 响应于在半导体处理线中处理的晶片批次中的一个或多个OOC事件来执行打开OOC条目。 许多记录解决了与一个晶圆批次有关的孤立事件。 问题记录解决了重复缺陷或失败的趋势。 在OOC数据库中打开OOC条目最好包括分配和记录负责处理OOC条目的“所有者”。 工作OOC条目包括打开OOC条目的活动记录，接收用户对纠正措施的输入，并将措施记录在活动记录中。 该方法优选还包括（c）在工作OOC条目之后关闭OOC条目的步骤，以及（d）如果所有权转移给条目，则重新分配OOC条目。 该系统包括（a）多个计算机系统，包括多个入口终端，（b）耦合到多个计算机系统的OOC数据库，（c）在一个或多个入口终端上执行的OOC接口， 到OOC数据库，以及（d）在一个或多个计算机系统上执行的OOC跟踪程序，并且耦合到OOC数据库和OOC接口。