公开(公告)号：US07871490B2

公开(公告)日：2011-01-18

申请号：US11338085

申请日：2006-01-24

申请人： Harqkyun Kim ,  Yunju Ra

发明人： Harqkyun Kim ,  Yunju Ra

IPC分类号： C23C16/00 ,  H01L21/306

CPC分类号： C23C16/507 ,  H01J37/321

摘要： An antenna adapted to apply uniform electromagnetic fields to a volume of gas and including radiating elements connected in parallel with evenly distributed input terminals for receiving electromagnetic energy into the antenna and output terminals for grounding. In the illustrative embodiment, the antenna has three radiating elements connected in parallel. Each radiating element is a conductor wound in a circular shape with the same diameter. Each radiating element is connected to the input terminal on one end and an output terminal on the other. The input terminal of the second element is 120° rotated counterclockwise from the first and the input terminal of the third is rotated by 120° counterclockwise from the second. The ground terminals of each radiating elements are located in the same manner as the input terminals. Each element is feed by a feeder coil. While the antenna elements are disposed around a chamber, the feeder coils are disposed above the chamber to improved the distribution of electromagnetic energy within the chamber.

摘要翻译： 一种天线适用于对一定体积的气体施加均匀的电磁场，并且包括与均匀分布的输入端子并联连接的辐射元件，用于将电磁能接收到天线中并输出接地端子。 在说明性实施例中，天线具有并联连接的三个辐射元件。 每个辐射元件是缠绕成具有相同直径的圆形形状的导体。 每个辐射元件在一端连接到输入端子，另一端连接到输出端子。 第二元件的输入端从第一元件逆时针旋转120度，第三元件的输入端从第二元件逆时针旋转120度。 每个辐射元件的接地端子以与输入端子相同的方式定位。 每个元件由馈线线圈馈送。 当天线元件设置在腔室周围时，馈电线圈设置在腔室上方，以改善腔室内电磁能的分布。

公开(公告)号：US20060124059A1

公开(公告)日：2006-06-15

申请号：US11338085

申请日：2006-01-24

申请人： Harqkyun Kim ,  Yunju Ra

发明人： Harqkyun Kim ,  Yunju Ra

IPC分类号： C23C16/00 ,  C23F1/00 ,  B44C1/22 ,  H05H1/24

CPC分类号： C23C16/507 ,  H01J37/321

摘要： An antenna adapted to apply uniform electromagnetic fields to a volume of gas and including radiating elements connected in parallel with evenly distributed input terminals for receiving electromagnetic energy into the antenna and output terminals for grounding. In the illustrative embodiment, the antenna has three radiating elements connected in parallel. Each radiating element is a conductor wound in a circular shape with the same diameter. Each radiating element is connected to the input terminal on one end and an output terminal on the other. The input terminal of the second element is 120° rotated counterclockwise from the first and the input terminal of the third is rotated by 120° counterclockwise from the second. The ground terminals of each radiating elements are located in the same manner as the input terminals. Each element is feed by a feeder coil. While the antenna elements are disposed around a chamber, the feeder coils are disposed above the chamber to improved the distribution of electromagnetic energy within the chamber.

摘要翻译： 一种天线适用于对一定体积的气体施加均匀的电磁场，并且包括与均匀分布的输入端子并联连接的辐射元件，用于将电磁能接收到天线中并输出接地端子。 在说明性实施例中，天线具有并联连接的三个辐射元件。 每个辐射元件是缠绕成具有相同直径的圆形形状的导体。 每个辐射元件在一端连接到输入端子，另一端连接到输出端子。 第二元件的输入端从第一元件逆时针旋转120度，第三元件的输入端从第二元件逆时针旋转120度。 每个辐射元件的接地端子以与输入端子相同的方式定位。 每个元件由馈线线圈馈送。 当天线元件设置在腔室周围时，馈电线圈设置在腔室上方，以改善腔室内电磁能的分布。