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公开(公告)号:US06857433B2
公开(公告)日:2005-02-22
申请号:US10201354
申请日:2002-07-22
申请人: Philip Bruce Henderson , Mario Joseph Moniz , Andrew David Johnson , Eugene Joseph Karwacki, Jr. , Richard R. Bodette , Christopher Robert Cording , Herbert David Johnson
发明人: Philip Bruce Henderson , Mario Joseph Moniz , Andrew David Johnson , Eugene Joseph Karwacki, Jr. , Richard R. Bodette , Christopher Robert Cording , Herbert David Johnson
CPC分类号: C23C16/4405 , Y10S438/905
摘要: A process for cleaning a glass-coating reactor includes: (a) providing the reactor to be cleaned, wherein the reactor contains a glass substrate within a chamber and the chamber has an internal surface coated with at least one substance selected from the group consisting of Si3N4 or SiO2; (b) terminating a flow of a deposition gas to the reactor; (c) adding to the reactor at least one cleaning gas to react with the at least one substance to form at least one volatile product; and (d) removing from the reactor the at least one volatile product.
摘要翻译: 用于清洁玻璃包衣反应器的方法包括:(a)提供要清洁的反应器,其中反应器在室内包含玻璃基板,并且室具有涂覆有至少一种选自以下的物质的内表面: Si3N4或SiO2; (b)终止沉积气体流向反应器; (c)向所述反应器中加入至少一种清洁气体以与所述至少一种物质反应以形成至少一种挥发性产物; 和(d)从反应器中除去至少一种挥发性产物。