Resist processing apparatus and a resist processing method
    1.
    发明授权
    Resist processing apparatus and a resist processing method 失效
    抗蚀剂处理装置和抗蚀剂处理方法

    公开(公告)号:US5844662A

    公开(公告)日:1998-12-01

    申请号:US686707

    申请日:1996-07-25

    摘要: The resist processing apparatus comprises a loader/unloader section provided with a plurality of cassettes, a first convey mechanism provided in the loader/unloader section, and for taking out an unprocessed substrate from the cassette, and for putting a processed substrate into the cassette, a first processing section provided at one side of the loader/unloader section and having a resist coating section for coating a resist to the substrate, a second processing section provided at another side of the loader/unloader section to be apart from the first processing section, and having a development processing section for developing the resist coated to the substrate, a second convey mechanism for receiving an unprocessed substrate from the first convey mechanism, for conveying the unprocessed substrate to the first processing section, and for delivering the substrate coated with a resist by the resist coating section, to the first convey mechanism, and a third convey mechanism for receiving an unprocessed substrate from the first convey mechanism, for conveying the unprocessed substrate to the second processing section, and for delivering the substrate developed by the development processing section, to the first convey mechanism.

    摘要翻译: 抗蚀剂处理装置包括设置有多个盒的装载/卸载部分,设置在装载/卸载部分中的第一传送机构,并且用于从盒中取出未处理的基板,并将经处理的基板放入盒中, 第一处理部,设置在装载机/卸载部的一侧,并且具有用于将抗蚀剂涂布到基板的抗蚀剂涂布部;第二处理部,设置在装载机/卸载部的另一侧,与第一处理部分 并且具有用于显影涂布到基板上的抗蚀剂的显影处理部分,用于从第一输送机构接收未处理的基板的第二输送机构,用于将未处理的基板输送到第一处理部分,以及输送涂覆有基板的基板 抗蚀剂涂层部分抵抗第一传送机构和用于接收的第三传送机构 将来自第一传送机构的未处理的基板输送到第一传送机构,用于将未处理的基板传送到第二处理部分,以及将由显影处理部分开发的基板输送到第一输送机构。

    Having a pattern for improving voltage difference between different pixel electrodes in which semiconductive or signal line portion is larger for a more remote pixel
    4.
    发明授权
    Having a pattern for improving voltage difference between different pixel electrodes in which semiconductive or signal line portion is larger for a more remote pixel 失效
    具有用于改善不同像素电极之间的电压差的图案,其中半导体或信号线部分对于更远的像素较大

    公开(公告)号:US06249325B1

    公开(公告)日:2001-06-19

    申请号:US09113184

    申请日:1998-07-10

    IPC分类号: G02F11343

    CPC分类号: G02F1/136213 G02F1/1368

    摘要: A liquid crystal display device has gate signal lines extending in the x-direction and arranged in the y-direction, and drain signal lines extending in the y-direction and arranged in the x-direction on the surface of the liquid crystal side of the one transparent substrate between a pair of transparent substrates opposed to each other via liquid crystals. A thin-film transistor is fumed on by a scanning signal from a gate signal line, and a pixel electrode will be supplied with a video signal from the drain signal line via the thin-film transistor that is fumed on in each of the regions surrounded by the signal lines. The thin-film transistor is of the MIS type, and the capacity between the gate electrode and the source electrode thereof is small on the input terminal side of the gate signal line and increases in a direction toward the end of the gate signal line, thereby to suppress the occurrence of flickering.

    摘要翻译: 液晶显示装置具有沿x方向延伸并且沿y方向布置的栅极信号线,并且在y方向上延伸并且沿着x方向布置在x方向的液晶侧的表面上的漏极信号线 通过液晶彼此相对的一对透明基板之间的一个透明基板。 通过来自栅极信号线的扫描信号来对薄膜晶体管进行热像仪,并且通过经过薄膜晶体管从漏极信号线向像素电极提供视频信号,该薄膜晶体管被包围在每个区域内 通过信号线。 薄膜晶体管为MIS型,栅电极和源电极之间的电容在栅极信号线的输入端侧较小,并且朝向栅极信号线的端部的方向增加,从而 抑制闪烁的发生。