公开(公告)号：US4849730A

公开(公告)日：1989-07-18

申请号：US15370

申请日：1987-02-17

申请人： Kouji Izumi ,  Masanori Itagaki ,  Eiichi Ohta ,  Hiroyuki Okamoto ,  Masumitsu Ino ,  Hirotoshi Equchi

发明人： Kouji Izumi ,  Masanori Itagaki ,  Eiichi Ohta ,  Hiroyuki Okamoto ,  Masumitsu Ino ,  Hirotoshi Equchi

IPC分类号： G01L1/18 ,  G01L1/22 ,  G01L5/16

CPC分类号： G01L1/18 ,  G01L1/2293 ,  G01L5/162

摘要： A force detecting device includes an insulative strain element, strain sensors, and leads. The insulative strain element is electrically insulative at least at its surface. The strain sensors are formed of a piezoresistive thin film and deposited as a piezoresistive thin film pattern on the surface of the insulative strain element integrally therewith. The leads are formed of a highly conductive thin film and deposited as a highly conductive thin film pattern on the surface of the insulative strain element integrally therewith.

摘要翻译： 力检测装置包括绝缘应变元​​件，应变传感器和引线。 绝缘应变元​​件至少在其表面上是电绝缘的。 应变传感器由压阻薄膜形成并且作为压电薄膜图案沉积在与其一体的绝缘应变元​​件的表面上。 引线由高导电薄膜形成，并且作为高导电薄膜图案沉积在与其一体的绝缘应变元​​件的表面上。