公开(公告)号：US5843236A

公开(公告)日：1998-12-01

申请号：US529282

申请日：1995-09-15

申请人： Hiroyuki Yoshiki ,  Kazuki Kondo ,  Akira Ishii ,  Shigeki Amadatsu ,  Tatsuya Saijo ,  Koji Itadani ,  Takahiro Aoyama

发明人： Hiroyuki Yoshiki ,  Kazuki Kondo ,  Akira Ishii ,  Shigeki Amadatsu ,  Tatsuya Saijo ,  Koji Itadani ,  Takahiro Aoyama

IPC分类号： H01J37/32 ,  C23C16/00

CPC分类号： H01J37/32229 ,  H01J37/32192 ,  H01J37/32238 ,  H01J37/32256 ,  H01J37/3266 ,  H01J37/3277

摘要： In a plasma processing apparatus including a plasma chamber having a narrow window, and a rectangular waveguide for coupling with the plasma chamber, the rectangular waveguide has a long slot disposed in an E-plane thereof so as to oppose the narrow window of the plasma chamber and to extend along a waveguide-axis direction of the rectangular waveguide. There is further provided at least two long slots disposed in at least one rectangular waveguide, and the longitudinal length of each long slot is set to 1/2 or more of a free-space wavelength of the microwave. Further, the long slots are disposed so as to be parallel to each other such that adjacent long slots are shifted from each other by (2n-1)/4 of the free-space wavelength of the microwave in the waveguide-axis direction of the rectangular waveguide, where n is a natural number.

摘要翻译： 在包括具有窄窗口的等离子体室和与等离子体室耦合的矩形波导的等离子体处理装置中，矩形波导具有设置在其E平面中的长槽，以与等离子体室的窄窗口相对 并且沿着矩形波导的波导轴方向延伸。 还设置有至少两个长槽，设置在至少一个矩形波导中，并且每个长槽的纵向长度被设置为微波的自由空间波长的+ E，fra 1/2 + EE或更多。 此外，长槽被布置成彼此平行，使得相邻的长槽在微波的自由空间波长的波导轴方向上相互偏移（2n-1）/ 4 矩形波导，其中n是自然数。

公开(公告)号：US5440206A

公开(公告)日：1995-08-08

申请号：US81023

申请日：1993-06-22

申请人： Yoichi Kurono ,  Masami Kubota ,  Hiroyuki Yoshiki ,  Michio Taniguchi

发明人： Yoichi Kurono ,  Masami Kubota ,  Hiroyuki Yoshiki ,  Michio Taniguchi

IPC分类号： H01J37/32 ,  H01J7/24

CPC分类号： H01J37/32623 ,  H01J37/3266

摘要： In a plasma processing s including a processing chamber and plate-parallel electrodes, provided in the processing chamber, for generating a high-frequency electric field in response to a high-frequency voltage, a ring-shaped core is provided in the periphery of the processing chamber, and a toroidal coil includes a plurality of 2n split coils wound in all the periphery of the ring-shaped core so that each pair of split coils oppose to each other. An alternating-current power source for generating a plurality of n-phase alternating-current currents including a plurality of n currents having a phase difference of either .pi./n or 2.pi./n therebetween, is electrically connected with the plurality of split coils of the toroidal coil so that two magnetic fields generated by the each pair of split coils opposing to each other are directed in the same direction in parallel to each other in the processing chamber, and the plurality of currents are respectively flowed into the respective pairs of split coils opposing to each other, thereby generating a rotating magnetic field in parallel to surfaces of the plane-parallel electrodes.

摘要翻译： 在包括处理室和平板电极的等离子体处理中，设置在处理室中，用于响应于高频电压产生高频电场，环形芯设置在 处理室和环形线圈包括缠绕在环形芯的所有周边中的多个2n个分离线圈，使得每对分裂线圈彼此相对。 一种用于产生多个n相交流电流的交流电源，该多个n相交流电流包括多个n电流，其间具有π/ n或2π/ n之间的相位差，并与多个分离线圈 环形线圈使得由对置的每对分裂线圈产生的两个磁场在处理室中彼此平行地指向相同的方向，并且多个电流分别流入相应的分离对 线圈彼此相对，由此产生与平面平行电极的表面平行的旋转磁场。