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公开(公告)号：US4878755A
公开(公告)日：1989-11-07
申请号：US881708
申请日：1986-07-03
CPC分类号： C23C14/54 , G01B11/0683 , G01N21/59 , G01N21/8422 , G01N2201/128
摘要： Process for measuring the optical properties of thin layers while they are being built up in vacuum coating installations. For this purpose, at least one test object is passed through a stationary measuring light beam and the transmission behavior of the test object is evaluated by measurement. A reference point for the measurements is fixed in each case by reference measurements at intervals of time. In addition, at least one opaque measurement zone and at least one measuring zone, which does not attenuate the measuring light beam, are disposed in path of motion of the test object. The ratio of the measured value of the test object, decreased by the measured value of the opaque measuring zone, to the measured value of the nonattenuating measuring zone, decreased by the measured value of the opaque measuring zone, is formed by an arithmetic logic unit.
摘要翻译： 在真空涂层装置中建立薄层的光学性能的测量方法。 为此，至少一个测试对象通过静止的测量光束，并通过测量来评估测试对象的传输行为。 在每种情况下，通过参考测量在时间间隔固定测量的参考点。 此外，至少一个不透明测量区域和至少一个不衰减测量光束的测量区域被设置在测试对象的运动路径中。 通过算术逻辑单元形成测试对象的测量值与不透明测量区域的测量值相比减小到不透明测量区域的测量值的比例， 。
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2.发明授权
公开(公告)号：US4469713A
公开(公告)日：1984-09-04
申请号：US411238
申请日：1982-08-25
申请人： Horst Schwiecker , Alfons Zoller
发明人： Horst Schwiecker , Alfons Zoller
CPC分类号： G01B11/0633
摘要： An arrangement for measuring and controlling the thickness of optically transparent coatings during their build-up on substrates in vacuum coating installations. The measurement is carried out by determining at least one reference value and at least one measured value for the transmission or reflection value of the coated object by using a measuring light beam, a monochromator, a photo-receiver, an amplifier and an analyzing circuit.
摘要翻译： 用于测量和控制光学透明涂层在真空涂层装置中在基板上堆积时的厚度的装置。 通过使用测量光束，单色仪，光接收器，放大器和分析电路确定涂覆物体的透射或反射值的至少一个参考值和至少一个测量值来进行测量。
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3.发明授权Arrangement and photometer for measuring and controlling the thickness of optically active thin layers 失效用于测量和控制光学活性薄层厚度的布置和光度计
公开(公告)号：US4207835A
公开(公告)日：1980-06-17
申请号：US807290
申请日：1977-06-16
申请人： Horst Schwiecker , Gernot Thorn , Hans-Peter Ehrl
发明人： Horst Schwiecker , Gernot Thorn , Hans-Peter Ehrl
CPC分类号： G01B11/0683 , C23C14/547 , G05D5/03
摘要： An arrangement and photometer for measuring and controlling the thickness of optically active thin layers wherein the axis of the measurement light beam coming from the measurement light source is directed to the measurement object and a referenced light receiver, independent of the optical properties of the measurement object, is associated with the measurement light beam. The output signal of the referenced light receiver is mixed with a trigger stage for a phase sensitive photometer amplifier and is fed to a compensation circuit for the equilization of brightness variations in the measurement light source.
摘要翻译： 用于测量和控制光学活性薄层厚度的布置和光度计，其中来自测量光源的测量光束的轴线指向测量对象和参考光接收器，与测量对象的光学特性无关 与测量光束相关联。 参考光接收器的输出信号与用于相敏光度计放大器的触发级混合，并被馈送到补偿电路，以用于测量光源中亮度变化的平衡。
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