公开(公告)号：US20070013642A1

公开(公告)日：2007-01-18

申请号：US11486795

申请日：2006-07-13

申请人： Gi-Cheon Yoon ,  Hwan-Gerl Hwang ,  Yoo-Seok Kim ,  Jin-Gi Kim ,  In-Ho Lee ,  Hyung Lee ,  Sung-Il Jung

发明人： Gi-Cheon Yoon ,  Hwan-Gerl Hwang ,  Yoo-Seok Kim ,  Jin-Gi Kim ,  In-Ho Lee ,  Hyung Lee ,  Sung-Il Jung

IPC分类号： G09G3/36

CPC分类号： B65G35/06 ,  B65G2201/022 ,  H01L21/67709 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67766 ,  H01L21/67778

摘要： A system is provided for transferring a substrate of a flat panel display between the processing stations of a flat panel display manufacturing line. The system includes a transfer device that transfers a transfer container in which a substrate is loaded, a container loading and unloading device that loads and unloads the containers on and from the transfer device, and a substrate loading and unloading device that transfers the substrates between the container and processing equipment located at the respective stations. The transfer device includes a track mounted on a facility floor and a plurality of wheeled carriages that move programmably along the track by means of linear motors. The system enables substrate transfer time to be reduced substantially, yet provides robust protection of the substrates throughout the transfer process.

摘要翻译： 提供一种用于在平板显示器生产线的处理站之间传送平板显示器的基板的系统。 该系统包括：转移装置，其传送装载有基板的转印容器;将容器装载和卸载于转印装置上的容器装卸装置;以及基板装载和卸载装置， 集装箱和加工设备位于各自的车站。 传送装置包括安装在设施地板上的轨道和通过线性马达可沿着轨道可编程移动的多个轮式车厢。 该系统能够显着降低基底转印时间，同时在整个转印过程中提供对基材的强力保护。