公开(公告)号：US06864957B2

公开(公告)日：2005-03-08

申请号：US10424978

申请日：2003-04-29

申请人： Jan Van Elp ,  Peter Giesen ,  Jacob Jan Van der Velde

发明人： Jan Van Elp ,  Peter Giesen ,  Jacob Jan Van der Velde

IPC分类号： G03F7/20 ,  H01L21/027 ,  H01L21/683 ,  H02N13/00 ,  G03B27/42

CPC分类号： G03F7/70708 ,  G03F7/707 ,  G03F7/7095 ,  H01L21/6831

摘要： A lithographic projection apparatus with a chuck in which a dielectric element of the electrostatic chuck has a specific resistivity of at least 1016 Ωcm so that once the potential difference between electrodes of the chuck is removed the force on the article to be clamped reduces below a predetermined minimum level quickly. The dielectric element also has a coefficient of thermal expansion of less than 0.02×10−6K−1. A method of manufacturing a chuck includes joining a first glass ceramic element with a second glass element with an electrode therebetween in which a current is passed through the second glass element.

摘要翻译： 具有卡盘的光刻投影装置，其中静电卡盘的电介质元件的电阻率至少为10 16Ωgm，使得一旦卡盘的电极之间的电位差被去除，待夹紧物品上的力就减小 低于预定的最低水平。 电介质元件的热膨胀系数也小于0.02×10 -6 K -1。 制造卡盘的方法包括：将第一玻璃陶瓷元件与第二玻璃元件接合，其中电流通过第二玻璃元件。