公开(公告)号：US06582279B1

公开(公告)日：2003-06-24

申请号：US10093169

申请日：2002-03-07

申请人： Dennis L. Fox ,  James A. Hagan ,  John Patrick Hagen ,  Paul Henry Hanson ,  Theresa Marie Lewis ,  Janice Blue Ostrom ,  Douglas Howard Piltingsrud ,  Steven F. Starcke ,  R. Paul Thicke

发明人： Dennis L. Fox ,  James A. Hagan ,  John Patrick Hagen ,  Paul Henry Hanson ,  Theresa Marie Lewis ,  Janice Blue Ostrom ,  Douglas Howard Piltingsrud ,  Steven F. Starcke ,  R. Paul Thicke

IPC分类号： B24B100

CPC分类号： B24B37/08 ,  G11B5/8404 ,  H01L21/67276

摘要： An apparatus and method of reclaiming a disk substrate. The cost of reclaiming a disk substrate can be lower, and the quality higher, than making a new one from a blank. A layer of a data storage disk is stripped, e.g., by acid/oxidizing bath immersion. The stripped disk is polished in a carrier between polishing pads, with the relative velocity of the polishing pads as seen by the disk being precisely controlled so that an equal amount of stock is removed from each side. Preferably, several stripped disks are sorted into groups based on disk thickness, and disks from one of the groups are simultaneously polished in the carrier. Sorting improves stock removal uniformity from disk to disk. The polished disks are cleaned and, preferably, ordered in a cassette for stacking in a storage device based on disk thickness to more easily meet a mean center specification.

摘要翻译： 回收盘基片的装置和方法。 回收磁盘基板的成本可以更低，质量更高，而不是从空白中获得新的成本。 数据存储盘的层被剥离，例如通过酸/氧化浴浸渍。 剥离的盘在抛光垫之间的载体中抛光，由盘被观察到的抛光垫的相对速度被精确地控制，使得从每侧去除等量的原料。 优选地，基于盘厚度将几个剥离的盘分成组，并且在一个组中的盘同时在载体中抛光。 排序提高了从磁盘到磁盘的库存清除均匀性。 抛光的盘被清洁，并且优选地在盒中订购以便基于盘厚度堆叠在存储装置中，以更容易地满足平均中心规格。

公开(公告)号：US06767584B2

公开(公告)日：2004-07-27

申请号：US10144510

申请日：2002-05-13

申请人： James A. Hagan ,  Ullal Vasant Nayak ,  Janice Blue Ostrom ,  Douglas Howard Piltingsrud ,  Douglas A. Kuchta

发明人： James A. Hagan ,  Ullal Vasant Nayak ,  Janice Blue Ostrom ,  Douglas Howard Piltingsrud ,  Douglas A. Kuchta

IPC分类号： B05D500

CPC分类号： G11B5/7315 ,  C03C17/006 ,  C03C2204/08 ,  C03C2217/42 ,  C04B41/009 ,  C04B41/5353 ,  C04B41/91 ,  C04B2111/00362 ,  G11B5/8404 ,  C04B33/00

摘要： A method for texturing substrate surfaces and a substrate product, such as for computer disk drives. Microbump textured substrates are produced having a Rp value of about 20-200 Å and a ratio of Rmax:Rp of about 1.4 or less. In an exemplary embodiment, a microbump textured substrate is produced having colloidal particles on a surface thereof at a density of at least about 25 particles per 25 &mgr;m2, wherein the surface topography includes a Rp value of about 20-200 Å, a micro-roughness Rq of about 10 Å or less, and a ratio of Rmax:Rp of about 1.4 or less. An exemplary method includes first providing a substrate surface having a surface micro-roughness Rq of about 10 Å or less and depositing colloidal particles on the surface to provide a Rp value of about 20-200 Å and a ratio of Rmax:Rp of about 1.4 or less. In a further exemplary embodiment, the method increases the micro-roughness Rq, but to a value that is still less than about 10 Å with Rmax:Rp still of about 1.4 or less.

摘要翻译： 用于纹理化衬底表面和衬底产品的方法，例如用于计算机磁盘驱动器。 产生具有大约20-200的Rp值和约1.4或更小的Rmax:Rp的比率的微型块纹理衬底。 在一个示例性实施方案中，制备了在其表面上具有至少约25个颗粒/ 25mum 2的密度的胶体颗粒，其中表面形貌包括约20-200的Rp值， 微观粗糙度Rq为约10以下，Rmax:Rp为约1.4以下的比例。 一种示例性方法包括首先提供具有约10埃或更小的表面微粗糙度Rq的基底表面，并在表面上沉积胶体颗粒以提供约20-200的Rp值，并且Rmax:Rp的比例为约1.4 或更少。 在另一示例性实施方案中，该方法增加了微观粗糙度Rq，但是增加了仍然小于约10的值，Rmax：Rp仍为约1.4或更小。