公开(公告)号：US06766285B1

公开(公告)日：2004-07-20

申请号：US09570305

申请日：2000-05-12

申请人： Sam H. Allen, Jr. ,  Michael R. Conboy ,  Jason Grover

发明人： Sam H. Allen, Jr. ,  Michael R. Conboy ,  Jason Grover

IPC分类号： G06F945

CPC分类号： G05B19/41865 ,  G05B2219/32194 ,  G05B2219/32343 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/26

摘要： Wafer processing cycle times are substantially reduced by predicting and correcting downstream processing location anomalies before a wafer lot is released to the next processing location on the processing line. In an example embodiment, a method of verifying downstream processing line readiness in a semiconductor processing facility having a material handling system includes presenting a wafer lot to a first application processing location. A signal is then sent to a second application processing location to verify readiness by simulating the second application processing on the wafer lot. The availability or operating status of the second processing location is then communicated to the material handling system, the material handling system communicating instructions to the first processing location on where to send the wafer lot after the processing simulation is complete. The readiness verification method is repeated until the wafer lot is completely processed.

摘要翻译： 通过在将晶片批次释放到处理线上的下一个处理位置之前预测和校正下游处理位置异常，可以大大减少晶片处理周期时间。 在一个示例性实施例中，一种在具有材料处理系统的半导体处理设备中验证下游处理线准备的方法包括将晶片批次呈现给第一应用处理位置。 然后将信号发送到第二应用处理位置，以通过模拟晶片批次上的第二应用处理来验证准备状态。 然后将第二处理位置的可用性或操作状态传送到材料处理系统，材料处理系统在处理模拟完成之后向第一处理位置传送指令发送晶片批次的指令。 重复准备验证方法，直到晶片批次完全处理。

公开(公告)号：US06711450B1

公开(公告)日：2004-03-23

申请号：US09496205

申请日：2000-02-02

申请人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Jason Grover

发明人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Jason Grover

IPC分类号： G06F1900

CPC分类号： H01L21/67276

摘要： A method and a system for managing the movement of material lots through a semiconductor fabrication facility. In an example embodiment of the method, the movement of the material lots is tracked and a business rules module is accessed that generates material movement directives as a function of event changes on the line and externally provided directives that change the material lot movement sequence. Material lots are then rearranged in the material handling system as a function of a carrier code and the directive indicating a change. The result is a fabrication process that is more responsive and flexible with respect to internal or external changing conditions.

摘要翻译： 一种用于通过半导体制造设备管理材料批次的移动的方法和系统。 在该方法的示例实施例中，跟踪材料批次的移动，并访问业务规则模块，该业务规则模块根据线上的事件变化和外部提供的改变材料批次移动顺序的指令生成材料移动指令。 然后，材料批次作为载体代码和指示改变的指令在材料处理系统中重新排列。 结果是对于内部或外部变化的条件，响应更灵活的制造过程。

公开(公告)号：US06662076B1

公开(公告)日：2003-12-09

申请号：US09247659

申请日：1999-02-10

申请人： Michael R. Conboy ,  Russel Shirley ,  Jason Grover

发明人： Michael R. Conboy ,  Russel Shirley ,  Jason Grover

IPC分类号： G06F700

CPC分类号： G05B19/4189 ,  G05B2219/31274 ,  G05B2219/31277 ,  G05B2219/31376 ,  Y02P90/28 ,  Y10S414/135 ,  Y10S414/14

摘要： Management of move requests from a factory system to an automated handling system (AMHS) is provided. In one embodiment, a method and system is provided which includes receiving a move request from the factory system and selectively passing the move request to the AMHS based on a comparison of the move request with one or more conditions of the AMHS. The move request may be selectively passed to the AMHS by, for example, passing the move request to the AMHS without modification, changing a destination tool identified in the move request and/or delaying the move request, or canceling the move request. By selectively passing the move request based on conditions of the AMHS, move requests can more efficiently be managed and the throughput of the automated material handling system can be increased.

摘要翻译： 提供了从工厂系统到自动化处理系统（AMHS）的移动请求的管理。 在一个实施例中，提供了一种方法和系统，其包括从工厂系统接收移动请求，并且基于移动请求与AMHS的一个或多个条件的比较来选择性地将移动请求传递给AMHS。 移动请求可以通过例如将移动请求传递到AMHS而不经修改地选择性地传递到AMHS，改变在移动请求中识别的目的地工具和/或延迟移动请求或取消移动请求。 通过基于AMHS的条件选择性地传递移动请求，可以更有效地管理移动请求，并且可以增加自动化材料处理系统的吞吐量。

公开(公告)号：US08310798B2

公开(公告)日：2012-11-13

申请号：US12564797

申请日：2009-09-22

申请人： Jason Grover

发明人： Jason Grover

IPC分类号： H02H3/22

CPC分类号： H03K17/166 ,  H02H3/20

摘要： An electrically noisy D.C. power source having high slew rate A.C. transient voltage, is cut off from a capacitive load by a switchable, constant slew rate voltage source, upon the detection of an A.C. transient voltage having a slew rate that would otherwise cause a current overload through the capacitive load or the voltage source, or the D.C. power source.

摘要翻译： 具有高压摆率AC瞬态电压的电噪声直流电源通过可切换的恒定压摆率电压源从电容性负载切断，在检测到具有否则将导致电流过载的转换速率的交流瞬态电压时 通过容性负载或电压源，或直流电源。

公开(公告)号：US20110068849A1

公开(公告)日：2011-03-24

申请号：US12564797

申请日：2009-09-22

申请人： Jason Grover

发明人： Jason Grover

IPC分类号： H03K17/16

CPC分类号： H03K17/166 ,  H02H3/20

摘要： An electrically noisy D.C. power source having high slew rate A.C. transient voltage, is cut off from a capacitive load by a switchable, constant slew rate voltage source, upon the detection of an A.C. transient voltage having a slew rate that would otherwise cause a current overload through the capacitive load or the voltage source, or the D.C. power source.

摘要翻译： 具有高压摆率AC瞬态电压的电噪声直流电源通过可切换的恒定压摆率电压源从电容性负载切断，在检测到具有否则将导致电流过载的转换速率的交流瞬态电压时 通过容性负载或电压源，或直流电源。

公开(公告)号：US06985794B1

公开(公告)日：2006-01-10

申请号：US10238573

申请日：2002-09-09

申请人： Michael R. Conboy ,  Russel Shirley ,  Jason Grover

发明人： Michael R. Conboy ,  Russel Shirley ,  Jason Grover

IPC分类号： G06F7/00

CPC分类号： G05B19/4189 ,  G05B2219/31274 ,  G05B2219/31277 ,  G05B2219/31376 ,  Y02P90/28 ,  Y10S414/135 ,  Y10S414/14

摘要： Management of move requests from a factory system to an automated handling system (AMHS) is provided. In one embodiment, a method and system is provided which includes receiving a move request from the factory system and selectively passing the move request to the AMHS based on a comparison of the move request with one or more conditions of the AMHS. The move request may be selectively passed to the AMHS by, for example, passing the move request to the AMHS without modification, changing a destination tool identified in the move request and/or delaying the move request, or canceling the move request. By selectively passing the move request based on conditions of the AMHS, move requests can more efficiently be managed and the throughput of the automated material handling system can be increased.