公开(公告)号：US20140191826A1

公开(公告)日：2014-07-10

申请号：US14136363

申请日：2013-12-20

申请人： Kenya HASHIMOTO ,  Jiansong LIU ,  Masanori UEDA ,  Shinji TANIGUCHI ,  Tokihiro NISHIHARA

发明人： Kenya HASHIMOTO ,  Jiansong LIU ,  Masanori UEDA ,  Shinji TANIGUCHI ,  Tokihiro NISHIHARA

IPC分类号： H03H9/58 ,  H03H9/17

CPC分类号： H03H9/564 ,  H03H9/02086 ,  H03H9/173 ,  H03H9/174 ,  H03H9/175 ,  H03H9/582 ,  H03H9/6496

摘要： A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode located to sandwich the piezoelectric film; a load film formed from patterns in a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, wherein the patterns are formed so as to surround a center of the resonance region and intersect with a pathway extending from the center to an outer periphery of the resonance region.

摘要翻译： 压电薄膜谐振器包括：基板; 位于所述基板上的压电薄膜; 位于夹着压电膜的下电极和上电极; 由在下部电极和上部电极在压电膜上彼此面对的共振区域中的图案形成的负载膜，其中，图案形成为围绕谐振区域的中心并且与从该 中心到共振区域的外周。