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公开(公告)号：US20140191826A1
公开(公告)日：2014-07-10
申请号：US14136363
申请日：2013-12-20
CPC分类号： H03H9/564 , H03H9/02086 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/582 , H03H9/6496
摘要： A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode located to sandwich the piezoelectric film; a load film formed from patterns in a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, wherein the patterns are formed so as to surround a center of the resonance region and intersect with a pathway extending from the center to an outer periphery of the resonance region.
摘要翻译： 压电薄膜谐振器包括：基板; 位于所述基板上的压电薄膜; 位于夹着压电膜的下电极和上电极; 由在下部电极和上部电极在压电膜上彼此面对的共振区域中的图案形成的负载膜，其中，图案形成为围绕谐振区域的中心并且与从该 中心到共振区域的外周。
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2.发明申请PIEZOELECTRIC THIN-FILM RESONATOR, COMMUNICATION MODULE AND COMMUNICATION DEVICE 有权压电薄膜谐振器，通信模块和通信设备公开(公告)号：US20120299444A1
公开(公告)日：2012-11-29
申请号：US13570422
申请日：2012-08-09
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode and an upper electrode that is located opposite the lower electrode across at least a part of the piezoelectric film. A mass load film is provided on the upper electrode. The mass load film includes a plurality of concave or convex patterns in at least a region that faces the lower electrode. The plurality of concave or convex patterns are densely arranged in a central portion of the region and are sparsely arranged in a peripheral portion of the region.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电膜和位于压电薄膜的至少一部分上的与下电极相对的上电极。 在上电极上设置质量负荷膜。 质量负载膜在至少面向下电极的区域中包括多个凹凸图案。 多个凹凸图案被密集地布置在该区域的中心部分中，并且稀疏地布置在该区域的周边部分中。
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公开(公告)号：US20120182092A1
公开(公告)日：2012-07-19
申请号：US13431669
申请日：2012-03-27
IPC分类号： H03H9/205
CPC分类号： H03H9/173 , H03H3/04 , H03H9/0095 , H03H9/02086 , H03H9/131 , H03H9/132 , H03H9/568 , H03H9/605 , H03H2003/0471
摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. A frequency control film is provided on an upper side of a resonance area in which the upper electrode and the lower electrode face each other in at least one of the main resonator and the sub resonator. The frequency control film has multiple convex patterns, and the convex patterns are arranged with a common pitch for spurious adjustment and with different areas in the main resonator and the sub resonator.
摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 频率控制膜设置在谐振区域的上侧，其中上电极和下电极在主谐振器和子谐振器中的至少一个中彼此面对。 频率控制膜具有多个凸形图案，并且凸形图案以公共间距布置以进行杂散调整，并且在主谐振器和子谐振器中具有不同的区域。
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公开(公告)号：US20110267155A1
公开(公告)日：2011-11-03
申请号：US13177797
申请日：2011-07-07
申请人： Motoaki HARA , Shinji TANIGUCHI , Takeshi SAKASHITA , Tsuyoshi YOKOYAMA , Masafumi IWAKI , Tokihiro NISHIHARA , Masanori UEDA
发明人： Motoaki HARA , Shinji TANIGUCHI , Takeshi SAKASHITA , Tsuyoshi YOKOYAMA , Masafumi IWAKI , Tokihiro NISHIHARA , Masanori UEDA
CPC分类号： H03H9/584 , H03H9/0095 , H03H9/542 , H03H9/60 , H03H9/706
摘要： A filter element includes a plurality of multilayer filters that are connected in cascade, each of the plurality of multilayer filters including a plurality of piezoelectric thin-film resonators stacked vertically, each of the piezoelectric thin-film resonators including a piezoelectric film and a pair of first electrodes between which the piezoelectric film is interposed, and a capacitor connected between an input terminal of one of the plurality of multilayer filters of a preceding stage and an input terminal of another one of the plurality of multilayer filters of a following stage, exciting directions of piezoelectric thin-film resonators to which the input terminals of the multilayer filters of the preceding and following stages are connected being opposite to each other.
摘要翻译： 滤波器元件包括串联连接的多个多层滤波器，多个多层滤波器中的每一个包括垂直堆叠的多个压电薄膜谐振器，每个压电薄膜谐振器包括压电薄膜和一对 插入压电膜的第一电极和连接在前级的多个多层滤波器中的一个的输入端子和后级的多个多层滤波器中的另一个的输入端子之间的电容器，激励方向 压电薄膜谐振器彼此相反地连接有前级和后级的多层滤波器的输入端。
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公开(公告)号：US20120306591A1
公开(公告)日：2012-12-06
申请号：US13485688
申请日：2012-05-31
IPC分类号： H03H9/70
摘要： An electronic circuit includes a plurality of duplexers that are coupled to an antenna terminal and have a pass band different from each other and a plurality of acoustic wave filters that are respectively coupled between the antenna terminal and the plurality of the duplexers, wherein filter characteristics of a first acoustic wave filter of the plurality of the acoustic wave filters are set so as to allow passage of a signal in both a pass band for transmitting and a pass band for receiving of a first duplexer of the plurality of the duplexers that is coupled to the first acoustic wave filter and suppress passage of a signal in both a pass band for transmitting and a pass band for receiving of a second duplexer of the plurality of the duplexers that is different from the first duplexer.
摘要翻译： 电子电路包括耦合到天线端子并具有彼此不同的通带的多个双工器，以及分别耦合在天线端子和多个双工器之间的多个声波滤波器，其中滤波器特性 多个声波滤波器的第一声波滤波器被设定为允许通过用于发送的通带中的信号和用于接收耦合到多个双工器的多个双工器的第一双工器的通带 第一声波滤波器，并且抑制用于发送的通带中的信号的通过和用于接收与第一双工器不同的多个双工器的第二双工器的通带。
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公开(公告)号：US20100148888A1
公开(公告)日：2010-06-17
申请号：US12712066
申请日：2010-02-24
申请人： Motoaki HARA , Tokihiro NISHIHARA , Shinji TANIGUCHI , Takeshi SAKASHITA , Tsuyoshi YOKOYAMA , Masafumi IWAKI , Masanori UEDA , Yasuyuki SAITOU
发明人： Motoaki HARA , Tokihiro NISHIHARA , Shinji TANIGUCHI , Takeshi SAKASHITA , Tsuyoshi YOKOYAMA , Masafumi IWAKI , Masanori UEDA , Yasuyuki SAITOU
CPC分类号： H03H9/132 , H03H9/174 , H03H9/588 , H03H9/605 , H03H2003/0428
摘要： The filter includes a series arm piezoelectric thin film resonator placed in the series arm and a parallel arm piezoelectric thin film resonator placed in the parallel arm. Each of the series arm piezoelectric thin film resonator and the parallel arm piezoelectric thin film resonator includes a substrate (21), a lower electrode (22) placed on the substrate (21), a piezoelectric film (23) placed on the lower electrode (22) and a upper electrode (24) placed on the piezoelectric film (23). The ratio of the major axis length A to the minor axis length B of the resonant portion (29) in the series arm piezoelectric thin film resonator is larger than that in the parallel arm piezoelectric thin film resonator.
摘要翻译： 滤波器包括放置在串联臂中的串联臂压电薄膜谐振器和放置在并联臂中的并联臂压电薄膜谐振器。 串联压电薄膜谐振器和并联臂压电薄膜谐振器中的每一个包括基板（21），放置在基板（21）上的下电极（22），放置在下电极上的压电薄膜（23） 22）和放置在压电膜（23）上的上电极（24）。 串联压电薄膜谐振器中的共振部分（29）的长轴长度A与短轴长度B的比值大于并联臂压电薄膜谐振器中的长轴长度A与短轴长度B之比。
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公开(公告)号：US20130038405A1
公开(公告)日：2013-02-14
申请号：US13556865
申请日：2012-07-24
CPC分类号： H03H9/02102 , H03H3/04 , H03H9/02118 , H03H9/02157 , H03H9/131 , H03H9/132 , H03H9/173 , H03H9/175 , H03H9/564 , H03H9/582 , H03H9/706 , H03H2003/021 , H03H2003/0407 , H03H2003/0442
摘要： An acoustic wave device includes: a substrate; a lower electrode formed on the substrate; at least two piezoelectric films formed on the lower electrode; an insulating film located between the at least two piezoelectric films; and an upper electrode formed on the at least two piezoelectric films, wherein an outer periphery of an uppermost piezoelectric film out of the at least two piezoelectric films in a region in which the lower electrode and the upper electrode face each other is positioned further in than an outer periphery of the upper electrode.
摘要翻译： 声波装置包括：基板; 形成在所述基板上的下电极; 形成在下电极上的至少两个压电膜; 位于所述至少两个压电膜之间的绝缘膜; 以及形成在所述至少两个压电膜上的上电极，其中所述至少两个压电膜中的最下压电膜的外周在所述下电极和所述上电极彼此面对的区域中进一步位于 上电极的外周。
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公开(公告)号：US20130033337A1
公开(公告)日：2013-02-07
申请号：US13556881
申请日：2012-07-24
CPC分类号： H03H9/0095 , H03H9/02102 , H03H9/131 , H03H9/173 , H03H9/175 , H03H9/542 , H03H9/583 , H03H9/585 , H03H9/605 , H03H9/706 , H03H2003/0471
摘要： An acoustic wave filter including piezoelectric thin film resonators, in which at least two of the piezoelectric thin film resonators including: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode located across at least a part of the piezoelectric film; a mass load film for a frequency control located in a resonance region where the lower electrode and the upper electrode face each other, and having a shape different from that of the resonance region; and a temperature compensation film having a temperature coefficient of an elastic constant opposite in sign to that of the piezoelectric film, at least a part of the temperature compensation film being located between the lower electrode and the upper electrode in the resonance region, and areas of mass load films of said at least two of the piezoelectric thin film resonators are different from each other.
摘要翻译： 一种包括压电薄膜谐振器的声波滤波器，其中至少两个压电薄膜谐振器包括：基板; 位于所述基板上的压电薄膜; 位于所述压电膜的至少一部分的下电极和上电极; 用于频率控制的质量负载膜，位于下电极和上电极彼此面对的共振区域中，具有与谐振区域不同的形状; 以及温度补偿膜，其具有与压电膜的弹性常数相反的弹性常数的温度系数，所述温度补偿膜的至少一部分位于所述共振区域中的下部电极和上部电极之间， 所述至少两个压电薄膜谐振器的质量负载薄膜彼此不同。
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公开(公告)号：US20120200199A1
公开(公告)日：2012-08-09
申请号：US13449072
申请日：2012-04-17
申请人： Shinji TANIGUCHI , Tokihiro NISHIHARA , Masafumi IWAKI , Masanori UEDA , Tsuyoshi YOKOYAMA , Takeshi SAKASHITA , Motoaki HARA
发明人： Shinji TANIGUCHI , Tokihiro NISHIHARA , Masafumi IWAKI , Masanori UEDA , Tsuyoshi YOKOYAMA , Takeshi SAKASHITA , Motoaki HARA
IPC分类号： H01L41/053
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the substrate and the lower electrode, an upper electrode provided on the piezoelectric film, and an additional pattern, a cavity being formed between the lower electrode and the substrate in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film, the additional pattern being provided in a position that is on the lower electrode and includes an interface between the resonance portion and a non-resonance portion.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在基板和下电极上的压电膜，设置在压电膜上的上电极和附加图案，空腔形成在该基板 所述下电极和所述基板在所述下电极和所述上电极通过所述压电膜彼此面对的共振部中，所述附加图案设置在所述下电极上并且包括所述共振部和所述共振部之间的界面的位置 非共振部分。
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公开(公告)号：US20120200195A1
公开(公告)日：2012-08-09
申请号：US13431642
申请日：2012-03-27
IPC分类号： H01L41/04
摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.
摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 副谐振器在上电极和上电极彼此面对的共振区域中的上电极上具有质量加成膜。 主谐振器和副谐振器中的至少一个在谐振区域的上侧设置有频率控制膜，频率控制膜的每单位面积的重量比单位面积的质量加成膜的重量小 。
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