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公开(公告)号:US20120153538A1
公开(公告)日:2012-06-21
申请号:US13402543
申请日:2012-02-22
申请人: Johan Frederick Dijksman , Sander Frederik Wuister , Yvonne Wendela Kruijt-Stegeman , Ivar SCHRAM , Jeroen Herman Lammers , Richard Joseph Marinus Schroeders
发明人: Johan Frederick Dijksman , Sander Frederik Wuister , Yvonne Wendela Kruijt-Stegeman , Ivar SCHRAM , Jeroen Herman Lammers , Richard Joseph Marinus Schroeders
IPC分类号: B28B11/08
CPC分类号: H01L21/683 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S269/903
摘要: A chuck apparatus for holding a substrate is the disclosed. The chuck apparatus includes a first surface portion on which the substrate is to be held and a second surface portion adjacent to the first surface portion and extending at least partially around an edge of the first surface portion and which, in use, is arranged to deflect gas over the first surface portion and thus the substrate that is to be held on the first surface portion.
摘要翻译: 所公开的用于保持基板的卡盘装置。 卡盘装置包括第一表面部分和第二表面部分,第二表面部分邻近第一表面部分并且至少部分地围绕第一表面部分的边缘延伸并且在使用中被设置成偏转 第一表面部分上的气体,从而被保持在第一表面部分上的基底。