Micro electro-mechanical system packaging and interconnect
    1.
    发明申请
    Micro electro-mechanical system packaging and interconnect 有权
    微机电系统封装和互连

    公开(公告)号:US20070128828A1

    公开(公告)日:2007-06-07

    申请号:US11192945

    申请日:2005-07-29

    IPC分类号: H01L21/30

    CPC分类号: B81C3/002

    摘要: A micro electro-mechanical system (MEMS) device includes an electrical wafer, a mechanical wafer, a plasma treated oxide seal bonding the electrical wafer to the mechanical wafer, and an electrical interconnect between the electrical wafer and the mechanical wafer.

    摘要翻译: 微电子机械系统(MEMS)装置包括电晶片,机械晶片,将电晶片结合到机械晶片的等离子体处理的氧化物密封,以及电晶片和机械晶片之间的电互连。

    Micro electro-mechanical system packaging and interconnect
    3.
    发明授权
    Micro electro-mechanical system packaging and interconnect 有权
    微机电系统封装和互连

    公开(公告)号:US08217473B2

    公开(公告)日:2012-07-10

    申请号:US11192945

    申请日:2005-07-29

    IPC分类号: H01L27/14

    CPC分类号: B81C3/002

    摘要: A micro electro-mechanical system (MEMS) device includes an electrical wafer, a mechanical wafer, a plasma treated oxide seal bonding the electrical wafer to the mechanical wafer, and an electrical interconnect between the electrical wafer and the mechanical wafer.

    摘要翻译: 微电子机械系统(MEMS)装置包括电晶片,机械晶片,将电晶片结合到机械晶片的等离子体处理的氧化物密封,以及电晶片和机械晶片之间的电互连。

    Electro-optical wobulator
    4.
    发明申请
    Electro-optical wobulator 审中-公开
    电光机

    公开(公告)号:US20070097323A1

    公开(公告)日:2007-05-03

    申请号:US11263191

    申请日:2005-10-31

    IPC分类号: G02F1/07 G03B21/00

    摘要: An electro-optical wobulator includes an electro- or magneto- optically active thin film, disposed in an image projection path, and means for selectively applying an electric or magnetic field to the thin film. The thin film has an index of refraction that changes in response to the electric or magnetic field, thereby selectively shifting the projection path of the image.

    摘要翻译: 电光波动器包括设置在图像投影路径中的电磁或磁光活性薄膜,以及用于选择性地向薄膜施加电场或磁场的装置。 薄膜具有响应于电场或磁场而变化的折射率,从而选择性地移动图像的投影路径。