公开(公告)号：US20130258323A1

公开(公告)日：2013-10-03

申请号：US13726154

申请日：2012-12-23

申请人： William P. Kuhn ,  John C. Stover ,  Robert S. LeCompte

发明人： William P. Kuhn ,  John C. Stover ,  Robert S. LeCompte

IPC分类号： G01B11/26

CPC分类号： G01B11/26 ,  G01J1/00 ,  G01J1/0214 ,  G01J1/0228 ,  G01J1/0266 ,  G01J1/0411 ,  G01J1/0437

摘要： A device and method for subaperture stray light detection and diagnosis in an optical system. A test light beam is generated with a width whose cross sectional area is less than the cross sectional area of a system aperture. Stray light is detected at a system detection surface. Based on the stray light and the location and direction angles of the light beam, potential paths that light may have taken to arrive at the detection surface are determined so as to identify physical features of the optical system that may have produced the stray light. A testing device comprises a test light beam source, preferably including a beam width magnifier, whereby the cross sectional area of the test light beam is made less than the cross sectional area of the system aperture. A relative lateral positioning stage and an angular beam directing stage launch the test light beam into the aperture at a selected position and selected directional angles. A detector and a data processing system produce a data set relating the stray light to the location and directional angles of the test light beam. A light trap and complementary test light beam delivery system are also provided.

摘要翻译： 一种用于光学系统中亚光谱杂散光检测和诊断的装置和方法。 产生具有横截面积小于系统孔径横截面面积的宽度的测试光束。 在系统检测表面检测到杂散光。 基于杂散光和光束的位置和方向角度，确定光可能到达检测表面的电势路径，以便识别可能产生杂散光的光学系统的物理特征。 测试装置包括测试光束源，优选地包括光束宽度放大镜，由此使测试光束的横截面积小于系统孔径的横截面面积。 相对的侧向定位台和角度光束定向台将测试光束在所选择的位置和选定的方向角度发射到孔中。 检测器和数据处理系统产生将杂散光与测试光束的位置和方向角相关联的数据集。 还提供了光阱和补充测试光束传送系统。

公开(公告)号：USD256724S

公开(公告)日：1980-09-02

申请号：US712762

申请日：1976-08-09

申请人： Alben C. Boggs ,  John C. Stover

设计人： Alben C. Boggs ,  John C. Stover

公开(公告)号：US09030657B2

公开(公告)日：2015-05-12

申请号：US13726154

申请日：2012-12-23

申请人： William P. Kuhn ,  John C. Stover ,  Robert S. LeCompte

发明人： William P. Kuhn ,  John C. Stover ,  Robert S. LeCompte

IPC分类号： G01N21/00 ,  G01B9/00 ,  G01B11/26 ,  G01J1/00

CPC分类号： G01B11/26 ,  G01J1/00 ,  G01J1/0214 ,  G01J1/0228 ,  G01J1/0266 ,  G01J1/0411 ,  G01J1/0437

摘要： A device and method for subaperture stray light detection and diagnosis. A test light beam is generated. Stray light is detected. Based on the detected stray light, potential paths that light may have taken to arrive at the detection surface are determined. A testing device comprises a test light beam source whereby the cross sectional area of the test light beam is made less than the cross sectional area of the system aperture. A relative lateral positioning stage and an angular beam directing stage launch the test light beam into the aperture. A detector and a data processing system produce a data set relating the stray light to the location and directional angles of the test light beam to identify the sources of stray light. A light trap and test light beam delivery system are provided.

摘要翻译： 一种用于亚光谱杂散光检测和诊断的装置和方法。 产生测试光束。 检测到杂散光。 基于检测到的杂散光，确定光可能到达检测表面的电势路径。 测试装置包括测试光束源，使得测试光束的横截面积小于系统孔径的横截面面积。 相对的横向定位台和角光束定向台将测试光束发射到孔中。 检测器和数据处理系统产生将杂散光与测试光束的位置和方向角相关联以识别杂散光源的数据集。 提供了光阱和测试光束传送系统。

公开(公告)号：US06760100B2

公开(公告)日：2004-07-06

申请号：US09804218

申请日：2001-03-12

申请人： Vladimir I. Ivakhnenko ,  John C. Stover

发明人： Vladimir I. Ivakhnenko ,  John C. Stover

IPC分类号： G01N2100

CPC分类号： G01N21/94 ,  G01N15/0211 ,  G01N21/9501 ,  G01N21/9506 ,  G01N2021/556

摘要： In an optical inspection system, defects such as particles, pits, subsurface voids, mounds, or other defects occurring at or near the smooth surface of a substrate are classified by type and size based on the magnitude S of a signal produced by collected light for each of a plurality N of different test configurations, yielding a plurality of signal magnitudes S1 through SN. A database is consulted, comprising a relationship of S versus defect size d for each test configuration and for each of a plurality of idealized defect types, so as to determine a defect size d corresponding to each measured signal magnitude S, and an average defect size is determined for each defect type. Signal magnitudes through that would be produced by a defect of the average size are determined for each defect type, and defect type is determined based on a smallest deviation between the measured magnitudes and the determined magnitudes.

摘要翻译： 在光学检查系统中，基于通过收集的光产生的信号的幅度S将类型和尺寸分类在基板的光滑表面处或附近出现的诸如颗粒，凹坑，地下空隙，墩或其他缺陷之类的缺陷， 多个N个不同测试配置中的每一个，产生多个信号幅度S1至SN。 参考数据库，其包括针对每个测试配置和多个理想化缺陷类型中的每一个的S与缺陷尺寸d的关系，以便确定对应于每个测量信号幅度S的缺陷尺寸d和平均缺陷尺寸 确定每种缺陷类型。 针对每种缺陷类型确定由平均尺寸的缺陷产生的信号幅度至，并且基于所测量的幅度与所确定的幅度之间的最小偏差来确定缺陷类型。

公开(公告)号：US06292259B1

公开(公告)日：2001-09-18

申请号：US09624502

申请日：2000-07-24

申请人： Michael E. Fossey ,  John C. Stover

发明人： Michael E. Fossey ,  John C. Stover

IPC分类号： G01N2100

CPC分类号： G01N21/9501 ,  G01N2021/945 ,  H01L22/12

摘要： A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.

公开(公告)号：USD263734S

公开(公告)日：1982-04-06

申请号：US132790

申请日：1980-03-24

申请人： Donald M. Cunningham ,  Richard W. Brent ,  John C. Stover

设计人： Donald M. Cunningham ,  Richard W. Brent ,  John C. Stover

公开(公告)号：US07007386B1

公开(公告)日：2006-03-07

申请号：US10326770

申请日：2002-12-20

申请人： John C. Stover

发明人： John C. Stover

IPC分类号： B21D53/10

CPC分类号： F16C27/04 ,  F16C19/06 ,  F16C33/586 ,  Y10T29/49696

摘要： A method for mounting a light duty bearing having a groove defined in an outer arcuate surface thereof for receiving a metallic tolerance ring placed therein which includes protruding waves extending radially outwardly from the groove while the main band of the bearing is positioned preferably completely within the groove such that the bearing can be placed into a workpiece aperture to be movably mounted therein in a frictionally resisted manner such as required in light-duty applications where slight restricted movement between the bearing and the mounting aperture of the workpiece is desirable. The bearing assembly can be mounted in the workpiece aperture by exerting axial force against the inner race member or the outer race member to achieve the frictionally resisted mounting therebetween. The groove defined in the outer portion of the bearing is designed to receive and retain the tolerance ring therein during mounting in the workpiece aperture for greatly facilitating mounting.

摘要翻译： 一种用于安装具有限定在其外弧形表面中的凹槽的轻型轴承的方法，用于接收放置在其中的金属公差环，其中包括从所述凹槽径向向外延伸的突出波，同时所述轴承的主带优选地完全位于所述凹槽内 使得轴承可以放置在工件孔中，以可摩擦方式安装在其中，例如在轴承和工件的安装孔之间需要稍微受限制的运动的轻型应用中所需要的。 轴承组件可以通过向内座圈构件或外座圈构件施加轴向力来安装在工件孔中，以实现它们之间的摩擦阻力。 限定在轴承外部的槽被设计成在安装在工件孔中时容纳并保持公差环，以便于安装。

公开(公告)号：US06486946B1

公开(公告)日：2002-11-26

申请号：US09594261

申请日：2000-06-15

申请人： John C. Stover ,  Yuri A. Eremin

发明人： John C. Stover ,  Yuri A. Eremin

IPC分类号： G01N2100

CPC分类号： G01N21/94 ,  G01N21/9501 ,  G01N2021/8427 ,  G01N2021/8461 ,  G01N2021/8848

摘要： P-polarized light or having a strong P-polarized component is directed onto a filmed substrate at two (or more) different incidence angles, one angle being relatively large and the other angle being relatively small as measured from a surface normal. Light that is scattered into a back region of the hemispherical space above the substrate surface is collected and the intensity of the collected light is measured for each of the two incident angles. A defect can be classified as either a hole in the film or a particle on the film based on the relative intensities of the collected light.

摘要翻译： 具有强P偏振分量的P偏振光以两个（或更多）不同的入射角被引导到成膜基片上，一个角度相对较大，另一个角度从表面法线测得的相对较小。 收集散布到衬底表面上方的半球形空间的后部区域的光，并且对于两个入射角度中的每一个测量所收集的光的强度。 基于收集的光的相对强度，缺陷可以分为膜中的孔或膜上的颗粒。

公开(公告)号：US06169601A

公开(公告)日：2001-01-02

申请号：US09338251

申请日：1999-06-22

申请人： Yuri A. Eremin ,  John C. Stover ,  Craig A. Scheer

发明人： Yuri A. Eremin ,  John C. Stover ,  Craig A. Scheer

IPC分类号： G01N2100

CPC分类号： G01N21/94

摘要： Particles are distinguished from pits, voids, scratches, and other subsurface defects in a surface of a substrate by impinging the defect with polarized light and integrating light scattered by the defect over a wide angular range to produce a total integrated response. Using a P-polarized incident light beam, particles are distinguished from subsurface defects by comparing the total integrated responses, which vary with changes in the incident angle. Alternatively, the defect is impinged with a P-polarized incident beam at a defined incident angle, and is then impinged with an S-polarized beam at the same incident angle. Total integrated responses are measured for both beams and a P-to-S ratio of the responses is calculated. Particles are distinguished from subsurface defects by comparing the P-to-S ratio to a predetermined threshold value which separates particles from subsurface defects.

摘要翻译： 颗粒通过用偏振光照射缺陷并且在宽角度范围内积分由缺陷散射的光而区分于衬底表面中的凹坑，空隙，划痕和其它次表面缺陷，以产生总的积分响应。 使用P偏振入射光束，通过比较随入射角的变化而变化的总积分响应，将颗粒与地下缺陷区分开。 或者，缺陷以限定的入射角与P偏振入射光束撞击，然后以相同的入射角与S偏振光束撞击。 测量两个光束的总积分响应，并计算响应的P对S比。 通过将P-S比与将颗粒与地下缺陷分离的预定阈值进行比较，将颗粒与地下缺陷区分开。

公开(公告)号：US6122047A

公开(公告)日：2000-09-19

申请号：US231685

申请日：1999-01-14

申请人： John C. Stover ,  Songping Gao ,  Michael E. Fossey ,  Lee Dante Clementi

发明人： John C. Stover ,  Songping Gao ,  Michael E. Fossey ,  Lee Dante Clementi

IPC分类号： G01N21/55 ,  G01N21/94 ,  G01N21/88

CPC分类号： G01N21/94 ,  G01N2021/556

摘要： The composition of a particle occurring on the surface of a smooth substrate is identified by impinging the surface with a light beam having a strong P-polarized component at an oblique angle of incidence to the surface, and collecting light scattered from the surface at forward, center, and back locations relative to the portion of the surface impinged by the incident beam. The intensities of the light collected at these locations are measured by detectors and converted into signals, and the magnitudes of the signals are compared to correlations of particle material as a function of the relative magnitudes of the forward-, center-, and back-scatter signals so as to identify the material whose correlation most nearly matches the measured detector signals. Preferably, a ratio of the back detector signal magnitude to forward detector signal magnitude is correlated with particle material and back detector signal magnitude. Alternatively or additionally, a ratio of back detector signal magnitude to center detector signal magnitude is correlated with particle material and back detector signal magnitude. Average particle diameter versus back detector signal magnitude is correlated with particle material.

摘要翻译： 发生在光滑基板表面上的颗粒的组成通过用具有与表面倾斜的入射角的强P偏振分量的光束照射表面来识别表面，并且收集从表面向前散射的光， 相对于被入射光束入射的表面的部分的中心和后部位置。 在这些位置处收集的光的强度由检测器测量并转换为信号，并且将信号的大小与作为前向，中心和后向散射的相对幅度的函数的粒子材料的相关性进行比较 信号，以便识别其相关性最接近于测量的检测器信号的材料。 优选地，反向检测器信号幅度与正向检测器信号幅度的比率与粒子材料和反向检测器信号幅度相关。 或者或另外，反向检测器信号幅度与中心检测器信号幅度的比率与颗粒材料和反向检测器信号幅度相关。 平均粒径对背景检测器信号幅度与粒子物质相关。