公开(公告)号：US06679672B1

公开(公告)日：2004-01-20

申请号：US10384858

申请日：2003-03-10

申请人： John F. Barrows

发明人： John F. Barrows

IPC分类号： B65G1133

CPC分类号： H01L21/67727 ,  H01L21/67017 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775

摘要： A transfer port facilitates transfer of a material between clean room modules, and/or between a clean room module and a clean box transporter that can travel through the contaminated ambient environment. A transfer port permits transfer of clean material between Class 1 clean rooms without degrading their cleanliness levels. The clean box transporter cars each comprise a small self-propelled clean room with laminar air flow and a HEPA filter. A door on the clean box mates against a similar door on one wall of the clean room module. A seal between a transporter car door and its opening, and a seal between a clean room door and its opening, a pair of seals disposed inside and outside a split line together define a limited contaminated volume. This volume is evacuated and/or flushed with clean gas to remove as much particulate matter as possible. The clean box transporter car has a slight overpressure with respect to the clean room module so when the transporter port is opened, any remaining particles will move away from the opening and into the clean room module, where they are entrained away in its laminar air flow and filtered out.

摘要翻译： 传输端口有助于在洁净室模块之间传输材料，和/或在洁净室模块和可以穿过受污染的环境环境的清洁箱运输器之间进行。 转运港口允许在1级洁净室之间转移清洁材料，而不会降低其清洁度。 清洁箱运输车各自包括具有层流气流的小型自推进洁净室和HEPA过滤器。 洁净室上的门与洁净室模块的一面墙上的类似门相配合。 运输车门与其开口之间的密封以及洁净室门与其开口之间的密封，一对设置在分隔线内部和外部的密封件一起限定受污染的体积。 将该体积用清洁气体排空和/或冲洗，以尽可能多地除去颗粒物质。 清洁箱运输车相对于洁净室模块具有轻微的超压，因此当运输车口打开时，任何剩余的颗粒将从开口移动到洁净室模块中，在那里它们被夹带在其层流空气流中 并过滤掉。