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公开(公告)号：US5141603A
公开(公告)日：1992-08-25
申请号：US595648
申请日：1990-10-11
申请人： John R. Dickey , Jimmy L. Davidson , Yonhua Tzeng
发明人： John R. Dickey , Jimmy L. Davidson , Yonhua Tzeng
摘要： Capacitor structure capable of achieving increased energy storage density is disclosed together with a fabrication sequence for the capacitor and its anodic oxide dielectric material. Soft porous aluminum oxide which has been formed in a first anodization step and has been densified or transformed to hard barrier oxide in a second anodization step is preferred for the capacitor dielectric material. The first anodization may be performed in a sulfuric acid electrolyte while the second anodization may be performed in a boric acid electrolyte. The boric acid may be diluted with ethylene glycol. The disclosed capacitor is fabricated on a silicon wafer substrate.
摘要翻译： 与电容器及其阳极氧化物介电材料的制造顺序一起公开能够实现增加的储能密度的电容器结构。 对于电容器电介质材料，优选在第一阳极氧化步骤中形成并在第二阳极氧化步骤中被致密化或转变成硬质阻挡氧化物的软质多孔氧化铝。 第一阳极氧化可以在硫酸电解质中进行，而第二阳极氧化可以在硼酸电解质中进行。 硼酸可用乙二醇稀释。 所公开的电容器制造在硅晶片衬底上。
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公开(公告)号：US4936957A
公开(公告)日：1990-06-26
申请号：US174063
申请日：1988-03-28
申请人： John R. Dickey , Jimmy L. Davidson , Yonhua Tzeng
发明人： John R. Dickey , Jimmy L. Davidson , Yonhua Tzeng
CPC分类号： H01G9/0029 , C25D11/12
摘要： A metallic oxide such as aluminum oxide of significantly improved electrical properties is disclosed. The method of oxide formation includes a combination of soft porous anodization followed by transformation to a hard barrier form of oxide using inter alia low temperature electrolytes, constant voltage anodizing, and timely rate of current change responsive termination of the anodizing process. Use of the resulting oxide in electrical insulation, optic and other environments is contemplated.
摘要翻译： 公开了一种金属氧化物，例如具有显着改善的电性能的氧化铝。 氧化物形成的方法包括软多孔阳极氧化，然后使用特别是低温电解质，恒定电压阳极氧化以及电流变化的响应终止阳极氧化过程的转变为硬阻挡形式的氧化物的组合。 预期在电绝缘，光学和其它环境中使用所得到的氧化物。
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