公开(公告)号：US07307018B2

公开(公告)日：2007-12-11

申请号：US11236961

申请日：2005-09-27

Applicant: Jui-Pin Chang ,  Chien-Hung Liu ,  Ying-Tso Chen ,  Shou-Wei Huang

Inventor： Jui-Pin Chang ,  Chien-Hung Liu ,  Ying-Tso Chen ,  Shou-Wei Huang

IPC: H01L21/44 ,  H01L21/4763 ,  H01L21/336 ,  H01L21/8234

CPC classification number: H01L23/5283 ,  H01L21/76834 ,  H01L21/76838 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of forming a conductive line suitable for decreasing a sheet resistance of the conductive lines. The method comprises steps of providing a material layer having a conductive layer formed thereon and forming a patterned mask layer on the conductive layer. In addition, a portion of the conductive layer is removed by using the patterned mask layer as a mask and a spacer is formed on a sidewall of the patterned mask layer and the conductive layer. A portion of the conductive layer is removed until the material layer is exposed to form a conductive line, wherein the spacer and the patterned mask layer serve as a mask.

Abstract translation: 形成适于降低导线的薄层电阻的导线的方法。 该方法包括提供其上形成有导电层的材料层并在导电层上形成图案化掩模层的步骤。 此外，通过使用图案化掩模层作为掩模去除导电层的一部分，并且在图案化掩模层和导电层的侧壁上形成间隔物。 导电层的一部分被去除直到材料层暴露以形成导电线，其中间隔物和图案化掩模层用作掩模。

公开(公告)号：US20060286731A1

公开(公告)日：2006-12-21

申请号：US11236961

申请日：2005-09-27

Applicant: Jui-Pin Chang ,  Chien-Hung Liu ,  Ying-Tso Chen ,  Shou-Wei Huang

Inventor： Jui-Pin Chang ,  Chien-Hung Liu ,  Ying-Tso Chen ,  Shou-Wei Huang

IPC: H01L21/8234 ,  H01L21/44 ,  H01L23/52

CPC classification number: H01L23/5283 ,  H01L21/76834 ,  H01L21/76838 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of forming a conductive line suitable for decreasing a sheet resistance of the conductive lines. The method comprises steps of providing a material layer having a conductive layer formed thereon and forming a patterned mask layer on the conductive layer. In addition, a portion of the conductive layer is removed by using the patterned mask layer as a mask and a spacer is formed on a sidewall of the patterned mask layer and the conductive layer. A portion of the conductive layer is removed until the material layer is exposed to form a conductive line, wherein the spacer and the patterned mask layer serve as a mask.

Abstract translation: 形成适于降低导线的薄层电阻的导线的方法。 该方法包括提供其上形成有导电层的材料层并在导电层上形成图案化掩模层的步骤。 此外，通过使用图案化掩模层作为掩模去除导电层的一部分，并且在图案化掩模层和导电层的侧壁上形成间隔物。 导电层的一部分被去除直到材料层暴露以形成导电线，其中间隔物和图案化掩模层用作掩模。

公开(公告)号：US20080048346A1

公开(公告)日：2008-02-28

申请号：US11929391

申请日：2007-10-30

Applicant: JUI-PIN CHANG ,  CHIEN-HUNG LIU ,  YING-TSO CHEN ,  SHOU-WEI HUANG

Inventor： JUI-PIN CHANG ,  CHIEN-HUNG LIU ,  YING-TSO CHEN ,  SHOU-WEI HUANG

IPC: H01L23/52

CPC classification number: H01L23/5283 ,  H01L21/76834 ,  H01L21/76838 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of forming a conductive line suitable for decreasing a sheet resistance of the conductive lines. The method comprises steps of providing a material layer having a conductive layer formed thereon and forming a patterned mask layer on the conductive layer. In addition, a portion of the conductive layer is removed by using the patterned mask layer as a mask and a spacer is formed on a sidewall of the patterned mask layer and the conductive layer. A portion of the conductive layer is removed until the material layer is exposed to form a conductive line, wherein the spacer and the patterned mask layer serve as a mask.

Abstract translation: 形成适于降低导线的薄层电阻的导线的方法。 该方法包括提供其上形成有导电层的材料层并在导电层上形成图案化掩模层的步骤。 此外，通过使用图案化掩模层作为掩模去除导电层的一部分，并且在图案化掩模层和导电层的侧壁上形成间隔物。 导电层的一部分被去除直到材料层暴露以形成导电线，其中间隔物和图案化掩模层用作掩模。

公开(公告)号：US11137086B2

公开(公告)日：2021-10-05

申请号：US16694561

申请日：2019-11-25

Applicant: Jui-Pin Chang

Inventor： Jui-Pin Chang

IPC: F16K31/06 ,  H01F7/127 ,  H01F7/08 ,  H01F7/06

Abstract: A solenoid valve and a manufacturing method are disclosed. The solenoid valve includes a main body portion, a movable iron core, a valve portion, a lower cover and an upper cover. Wherein the main body portion includes a bobbin, a fixed iron core, a magnetic conductive portion, a coil and an outer case. The outer case covers the bobbin, the fixed iron core, the magnetic conductive portion, and the coil. The movable iron core is movable relative to the fixed iron core, and the lower cover is disposed in the valve portion. A left side surface of the upper cover is fixed at the valve portion and the lower cover, and a right side surface of the upper covers is fixed at the main body portion. The solenoid valve has stable size and stable operation, and can quickly cut off the air pressure, and the control effect is good.