公开(公告)号：US07083992B2

公开(公告)日：2006-08-01

申请号：US10944842

申请日：2004-09-21

申请人： Shinichi Ogawa ,  Yasuhide Inoue ,  Junichi Shimanuki ,  Hirotaro Mori

发明人： Shinichi Ogawa ,  Yasuhide Inoue ,  Junichi Shimanuki ,  Hirotaro Mori

IPC分类号： G01L21/66

CPC分类号： G01N23/04 ,  G01N2223/102 ,  H01J2237/2611 ,  H01J2237/262

摘要： A method for observing defects in an amorphous material by transmission electron microscopy. The method generates an incident electron beam into the amorphous material, eliminates a generated diffraction wave to form an image only by a transmission wave coming through the amorphous material, and observes the image under an under-focus condition.

摘要翻译： 通过透射电子显微镜观察无定形材料中的缺陷的方法。 该方法产生入非晶材料中的入射电子束，消除所产生的衍射波，仅通过非晶材料的透射波形成图像，并在未聚焦条件下观察图像。

公开(公告)号：US20050042781A1

公开(公告)日：2005-02-24

申请号：US10944842

申请日：2004-09-21

申请人： Shinichi Ogawa ,  Yasuhide Inoue ,  Junichi Shimanuki ,  Hirotaro Mori

发明人： Shinichi Ogawa ,  Yasuhide Inoue ,  Junichi Shimanuki ,  Hirotaro Mori

IPC分类号： H01L21/66 ,  G01N23/04 ,  H01J37/21 ,  H01J37/26 ,  H01L29/06 ,  H01L31/0328 ,  H01L31/0336

CPC分类号： G01N23/04 ,  G01N2223/102 ,  H01J2237/2611 ,  H01J2237/262

摘要： A method for observing defect in an amorphous material by transmission electron microscopy is disclosed. The method comprises the steps of: incident electron beam into the amorphous material; eliminating a generated diffraction wave to form an image only by a transmission wave coming through the amorphous material; and observing the image under an under-focus condition. A method for respectively observing an amorphous material and a crystalline material in a composite material containing both of the amorphous material and the crystalline material by transmission electron microscopy is also disclosed. when observing a defect in the amorphous material, electron beam is injected into the amorphous material, and a generated diffraction wave is eliminated, then an image is formed only by a transmission wave coming through the amorphous material to conduct observation thereof under an under-focus condition, while when observing the crystalline material, electron beam is injected into the crystalline material, and an image is formed by a generated diffraction wave and by a transmission wave coming through the crystalline material to conduct observation thereof.

摘要翻译： 公开了一种通过透射电子显微镜观察非晶材料缺陷的方法。 该方法包括以下步骤：入射电子束入非晶材料; 消除所产生的衍射波，仅通过通过非晶材料的透射波形成图像; 并在未对焦条件下观察图像。 还公开了通过透射电子显微镜观察含有非晶材料和结晶材料两者的复合材料中的无定形材料和结晶材料的方法。 当观察非晶材料中的缺陷时，将电子束注入到非晶材料中，并且消除所产生的衍射波，然后仅通过非晶材料的透射波形成图像，以在不对焦下进行观察 条件是，当观察结晶材料时，将电子束注入到结晶材料中，并且通过产生的衍射波和通过结晶材料的透射波形成图像以进行观察。