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    Optical comparator and inspection apparatus
    1.
    发明授权
    Optical comparator and inspection apparatus 失效
    光学比较器和检测仪器

    公开(公告)号：US3888593A

    公开(公告)日：1975-06-10

    申请号：US19018771

    申请日：1971-10-18

    申请人： KEMPF PAUL S

    发明人： KEMPF PAUL S

    IPC分类号： G01B9/08 ,  G07C3/14

    CPC分类号： G07C3/14 ,  G01B9/08

    摘要： An optical comparator in which images of a master component and a sample component are inspected by comparison of the images that are projected in a moving, abutting, merging, mirror image, a limited area of the components being viewed in a scanning illumination at a controlled rate for full viewing coverage. The components are held in a sliding tray with means for rapidly changing the component to be inspected, while maintaining precise alignment. A closely directed light source and efficient cooling device permits prolonged operation of the apparatus, and instant access to mark defective portions of the component is provided, without interrupting viewing. The location of each defective portion is marked on a reference chart for use in a viewer which provides a composite image of the chart and component in proper registration for easy identification of the faults.

    摘要翻译： 通过比较在移动，邻接，合并，镜像中投影的图像，在被控制的扫描照明中观察的部件的有限区域，对主要部件和样本部件的图像进行检查来检查光学比较器 速率为全面覆盖。 这些部件被保持在具有用于快速改变要检查的部件的装置的滑动托盘中，同时保持精确的对准。 紧密引导的光源和高效的冷却装置允许设备的延长的操作，并且提供即时访问以标记组件的缺陷部分，而不中断观看。 每个缺陷部分的位置被标记在参考图表上以用于观看者，其提供图表和组件的合成图像以适当地注册以便于识别故障。