公开(公告)号：US07595654B2

公开(公告)日：2009-09-29

申请号：US12041388

申请日：2008-03-03

申请人： Manjul Bhushan ,  Karen M. G. V. Gettings ,  Wilfried E. Haensch ,  Brian L. Ji ,  Mark B. Ketchen

发明人： Manjul Bhushan ,  Karen M. G. V. Gettings ,  Wilfried E. Haensch ,  Brian L. Ji ,  Mark B. Ketchen

IPC分类号： G01R31/26

CPC分类号： G01R31/2884 ,  H01L2924/0002 ,  H01L2924/00

摘要： An integrated circuit device is provided including at least one first array configuration of integrated circuit components comprising a m×n array of FETs, without specified internal connections between the integrated circuit components, wherein m is greater than two. The integrated circuit device further includes at least one second array configuration of integrated circuit components comprising an array of integrated circuit components nominally identical to those of the first array configuration, with specified internal connections between integrated circuit components. A variation coefficient is determined for the integrated circuit components based on a measured specified parameter of the first array configuration and the second array configuration.

摘要翻译： 提供一种集成电路器件，其包括至少一个集成电路部件的第一阵列结构，该集成电路部件包括一组FET，该集成电路阵列在集成电路部件之间没有规定的内部连接，其中m大于2。 集成电路装置还包括集成电路部件的至少一个第二阵列配置，其包括与第一阵列配置的名义上相同的集成电路组件的阵列，以及集成电路部件之间的指定的内部连接。 基于第一阵列配置和第二阵列配置的测量的指定参数来确定集成电路组件的变化系数。

公开(公告)号：US07342406B2

公开(公告)日：2008-03-11

申请号：US11297730

申请日：2005-12-08

申请人： Manjul Bhushan ,  Karen M. G. V. Gettings ,  Wilfried E. Haensch ,  Brian L. Ji ,  Mark B. Ketchen

发明人： Manjul Bhushan ,  Karen M. G. V. Gettings ,  Wilfried E. Haensch ,  Brian L. Ji ,  Mark B. Ketchen

IPC分类号： G01R31/26

CPC分类号： G01R31/2884 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of measuring variability of integrated circuit components is provided. A specified parameter of at least one first array configuration comprising a plurality of the integrated circuit components without specified internal connections between the integrated circuit components is measured. The specified parameter of at least one second array configuration comprising a plurality of the integrated circuit components nominally identical to those of the first array configuration with specified internal connections between the integrated circuit components is also measured. A variation coefficient is determined for the integrated circuit components based on the measured specified parameter of the at least one first array configuration and the at least one second array configuration.

摘要翻译： 提供了一种测量集成电路部件的可变性的方法。 测量包括集成电路部件之间没有规定内部连接的多个集成电路部件的至少一个第一阵列配置的指定参数。 还测量包括与集成电路部件之间具有规定的内部连接的第一阵列配置的名义上相同的多个集成电路部件的至少一个第二阵列配置的指定参数。 基于所测量的至少一个第一阵列配置和至少一个第二阵列配置的指定参数，为集成电路组件确定变化系数。