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公开(公告)号：US07945410B2
公开(公告)日：2011-05-17
申请号：US11836199
申请日：2007-08-09
申请人： Natsuyo Morioka , Seiji Ishikawa , Katsumi Ikegaya , Yasunori Yamaguchi , Kazuo Ito , Yuichi Hamamura
发明人： Natsuyo Morioka , Seiji Ishikawa , Katsumi Ikegaya , Yasunori Yamaguchi , Kazuo Ito , Yuichi Hamamura
摘要： An average fault ratio is calculated from product characteristics of a product as a target of yield prediction, in order to predict yield accurately in the course of manufacturing the prediction target product.With respect to a reference product, whose wiring pattern is different from the prediction target product but manufactured by the same manufacturing process, a monthly electric fault density is calculated from actually measured data. Respective average fault ratios are obtained from product characteristics of the prediction target product and the reference product. A monthly electric fault density of the prediction target product is obtained by multiplying the monthly electric fault density of the reference product by the ratio of the average fault ratios. The yield is calculated by using the monthly electric fault density of the month in which a yield prediction target lot of the prediction target product was processed.
摘要翻译： 从作为产量预测目标的产品的产品特性计算平均故障率，以便在制造预测目标产品的过程中准确地预测产量。 对于其参考产品，其布线图案与预测目标产品不同但通过相同的制造工艺制造，每月电故障密度由实际测量数据计算。 相应的平均故障率是从预测目标产品和参考产品的产品特性获得的。 通过将参考产品的每月电气故障密度乘以平均故障率的比率来获得预测目标乘积的每月电气故障密度。 通过使用处理预测目标产品的产量预测目标批次的月份的每月电气故障密度来计算产量。
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公开(公告)号：US20080140330A1
公开(公告)日：2008-06-12
申请号：US11836199
申请日：2007-08-09
申请人： Natsuyo Morioka , Seiji Ishikawa , Katsumi Ikegaya , Yasunori Yamaguchi , Kazuo Ito , Yuichi Hamamura
发明人： Natsuyo Morioka , Seiji Ishikawa , Katsumi Ikegaya , Yasunori Yamaguchi , Kazuo Ito , Yuichi Hamamura
摘要： An average fault ratio is calculated from product characteristics of a product as a target of yield prediction, in order to predict yield accurately in the course of manufacturing the prediction target product.With respect to a reference product, whose wiring pattern is different from the prediction target product but manufactured by the same manufacturing process, a monthly electric fault density is calculated from actually measured data. Respective average fault ratios are obtained from product characteristics of the prediction target product and the reference product. A monthly electric fault density of the prediction target product is obtained by multiplying the monthly electric fault density of the reference product by the ratio of the average fault ratios. The yield is calculated by using the monthly electric fault density of the month in which a yield prediction target lot of the prediction target product was processed.
摘要翻译： 从作为产量预测目标的产品的产品特性计算平均故障率，以便在制造预测目标产品的过程中准确地预测产量。 对于其参考产品，其布线图案与预测目标产品不同但通过相同的制造工艺制造，每月电故障密度由实际测量数据计算。 相应的平均故障率是从预测目标产品和参考产品的产品特性获得的。 通过将参考产品的每月电气故障密度乘以平均故障率的比率来获得预测目标乘积的每月电气故障密度。 通过使用处理预测目标产品的产量预测目标批次的月份的每月电气故障密度来计算产量。
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