公开(公告)号：US5058610A

公开(公告)日：1991-10-22

申请号：US662330

申请日：1991-02-25

申请人： Kazumi Kuriyama

发明人： Kazumi Kuriyama

IPC分类号： B05C5/00 ,  B05C11/08 ,  B08B9/02 ,  G03F7/16 ,  G03F7/30 ,  G11B7/26

CPC分类号： B08B9/023 ,  G03F7/162

摘要： A fluid supplying and processing device has a plurality of fluid guide pipes having distal ends opening above a workpiece such as a disc base. The open ends of the fluid guide pipes discharge respective different processing fluids supplied from respective fluid sources toward the workpiece for thereby processing the workpiece, such as to form a photoresist pattern on the surface of the disc base. At least one of the fluid guide pipes has at least a distal end portion inserted in another of the fluid guide pipes. The outer side surface of the distal end portion of said one fluid guide pipe is cleaned by a fluid flowing through the other surrounding fluid guide pipe.

摘要翻译： 流体供应和处理装置具有多个流体引导管，其具有在诸如盘基座的工件之上的顶端开口。 流体引导管的开口端将从各个流体源供给的各种不同的处理流体朝向工件排出，从而对工件进行加工，例如在盘形基座的表面上形成光刻胶图案。 至少一个流体导管具有至少一个插入另一个流体导管中的远端部分。 所述一个流体导管的远端部分的外侧表面被流过另一个周围的流体导管的流体清洁。

公开(公告)号：US4897932A

公开(公告)日：1990-02-06

申请号：US322941

申请日：1989-03-14

申请人： Kazumi Kuriyama

发明人： Kazumi Kuriyama

IPC分类号： F26B3/28

CPC分类号： F26B3/283

摘要： An apparatus for drying optical disks heats a disk from the underside, and optionally blows clean air between the heater and the disk being dried in order to prevent contaminants from landing on the disk. Heat control is provided such that a surface temperature of the disk during drying is maintained uniform, preventing brittleness. The apparatus preheats the heater, placing the disk in a standby position during warm-up. The apparatus then moves the disk over the heater, and monitors the temperature of the disk, removing the disk back to the standby position when the disk reaches a predetermined temperature. In order to provide uniform heating, a radiant heat controlling plate having a suitably-shaped opening portion may be provided. Additionally, temperature distribution throughout the disk may be achieved as desired, in accordance with the heat control performed, and/or in accordance with the shape of the opening portion of the radiant heat controlling plate.

摘要翻译： 用于干燥光盘的设备从底面加热盘，并且可选地在加热器和待干燥的盘之间吹扫清洁空气，以防止污染物落在盘上。 提供热控制，使得干燥期间盘的表面温度保持均匀，防止脆性。 该装置预热加热器，在预热期间将盘置于待机位置。 然后，设备将盘移动到加热器上，并监视盘的温度，当盘达到预定温度时，将盘移回备用位置。 为了提供均匀的加热，可以提供具有适当形状的开口部分的辐射热控制板。 此外，根据所执行的热控制和/或根据辐射热控制板的开口部分的形状，可以根据需要实现整个盘的温度分布。

公开(公告)号：US4365278A

公开(公告)日：1982-12-21

申请号：US182744

申请日：1980-08-29

申请人： Yoshiyuki Takizawa ,  Takashi Kashiwazaki ,  Koji Shimoda ,  Kazumi Kuriyama

发明人： Yoshiyuki Takizawa ,  Takashi Kashiwazaki ,  Koji Shimoda ,  Kazumi Kuriyama

IPC分类号： G11B15/02 ,  G11B15/087 ,  G11B27/10 ,  H03G3/20 ,  G11B15/18 ,  G11B17/00

CPC分类号： H03G3/3015 ,  G11B15/087

摘要： A device for detecting non-recorded portions on a magnetic tape including a circuit for preventing malfunctions in the detecting device. The output from a playback head of a tape recorder is amplified then passed through a malfunction preventing circuit which passes the signal if its amplitude is above a preset level for at least a predetermined period of time. The output signal from the malfunction preventing circuit is waveform shaped then rectified and passed through a charge/discharge circuit to a solenoid energizing circuit. The malfunction preventing circuit includes a variable impedance element such as a field effect transistor coupled between an output terminal of the circuit and ground with the impedance of the element varied in accordance with the magnitude of the input signal with a delay added. The waveform shaping circuit, the rectifying circuit and the charge/discharge circuit convert the output of the malfunction preventing circuit into a switching waveform used to control a solenoid which sets the tape speed of the tape recorder such that the tape is run fast when no signal is present on the tape.

摘要翻译： 一种用于检测包括用于防止检测装置中的故障的电路的磁带上的非记录部分的装置。 来自磁带录音机的重放头的输出被放大然后通过故障防止电路，如果其幅度高于预设电平至少预定的一段时间，则该故障防止电路通过该信号。 来自故障防止电路的输出信号是波形，然后整流并通过充电/放电电路到螺线管励磁电路。 故障防止电路包括可变阻抗元件，例如耦合在电路的输出端和接地之间的场效应晶体管，其中元件的阻抗根据输入信号的幅度而变化，并具有延迟。 波形整形电路，整流电路和充电/放电电路将故障防止电路的输出转换成用于控制螺线管的开关波形，其设定磁带记录器的磁带速度，使得当无信号时磁带快速运行 存在于磁带上。

公开(公告)号：US07336585B2

公开(公告)日：2008-02-26

申请号：US11652676

申请日：2007-01-12

申请人： Osamu Kumasaka ,  Masaki Kobayashi ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Kazumi Kuriyama

发明人： Osamu Kumasaka ,  Masaki Kobayashi ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Kazumi Kuriyama

IPC分类号： G11B7/26

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G11B7/261

摘要： An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation. The apparatus also includes a deflection controller supplying the EBES with instructions for deflection operations for deflecting the exposure beam in a manner that the spot is successively moved from a first exposure start position in either the opposite or the same direction to a moving direction of the RDS and then, at a point in time when the spot has moved up to an exposure stop position of the disk in predetermined rotation thereof, the spot is intermittently moved to a second exposure start position in the moving direction of the RDS, and wherein the spot is periodically returned to the first exposure start position.

摘要翻译： 用于记录轨道的信息记录装置包括：支撑并旋转具有抗蚀剂层的母盘的旋转驱动部分（RDS）; 曝光光束发射部分（EBES），其可偏转地将曝光光束施加到盘上以在其上形成点; 相对运动驱动部分（RMDS），其相对于盘的径向方向上的点平移RDS; 向EBES提供根据要记录的数据调制曝光光束的强度的指令的发射控制器; 以及运动控制器，为RMDS提供用于将每个盘旋转的旋转盘移动RDS的预定移动量的指令。 该设备还包括偏转控制器，为EBES提供用于偏转操作的指令，以使曝光光束以使得光点从与RDS的移动方向相反或相同方向上的第一曝光开始位置连续移动的方式 然后，在点已经以规定的旋转移动到盘的曝光停止位置的时间点，间隔地移动到RDS的移动方向上的第二曝光开始位置，并且其中点 定期地返回到第一曝光开始位置。

公开(公告)号：US4865445A

公开(公告)日：1989-09-12

申请号：US94777

申请日：1987-09-10

申请人： Kazumi Kuriyama ,  Shigeru Kono ,  Yutaka Takasu ,  Chiharu Koshio ,  Kazuhiko Nagata

发明人： Kazumi Kuriyama ,  Shigeru Kono ,  Yutaka Takasu ,  Chiharu Koshio ,  Kazuhiko Nagata

IPC分类号： G01B11/06 ,  G01B11/30 ,  G01N21/88 ,  G01N21/95 ,  G11B7/0037 ,  G11B7/26

CPC分类号： G11B7/00375 ,  G01B11/0633 ,  G01N21/88 ,  G11B7/261

摘要： An apparatus for detecting faults on the surface of a resist master disc and for measuring the thickness of the resist coating layer includes a single light source for generating a laser beam for inspection of the master disc, a first separator for separating the laser beam into a first laser beam which is used for the detection of faults, and a second laser beam which is used to measure the thickness of the resist coating layer. The second laser beam is further separated into two laser beams one of which is irradiated on the surface of the resist coated master disc at a given angle of incidence. The detection of faults on the surface of the master disc is performed by detecting a level change of the quantity of reflection light of the first laser beam from the resist master disc, and the measurement of the thickness of the resist layer is performed by using a ratio between quantities of two laser beams obtained from the second laser beam one of which is detected after being reflected by the surface of the resist master disc.

摘要翻译： 用于检测抗蚀剂母盘表面上的故障并用于测量抗蚀剂涂​​层的厚度的装置包括用于产生用于检查母盘的激光束的单个光源，用于将激光束分离成 用于检测故障的第一激光束和用于测量抗蚀剂涂​​层厚度的第二激光束。 第二激光束被进一步分成两个激光束，其中一个以给定的入射角照射在抗蚀剂涂覆的母盘的表面上。 通过检测来自抗蚀剂母盘的第一激光束的反射光量的电平变化来检测母盘表面上的故障，并且通过使用抗蚀剂母板来测量抗蚀剂层的厚度 从第二激光束获得的两个激光束的量之间的比率在被抗蚀剂母盘的表面反射之后被检测到。

公开(公告)号：US07203144B2

公开(公告)日：2007-04-10

申请号：US10165953

申请日：2002-06-11

申请人： Osamu Kumasaka ,  Masaki Kobayashi ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Kazumi Kuriyama

发明人： Osamu Kumasaka ,  Masaki Kobayashi ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Kazumi Kuriyama

IPC分类号： G11B7/26

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G11B7/261

摘要： An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation.

摘要翻译： 用于记录轨道的信息记录装置包括：支撑并旋转具有抗蚀剂层的母盘的旋转驱动部分（RDS）; 曝光光束发射部分（EBES），其可偏转地将曝光光束施加到盘上以在其上形成点; 相对运动驱动部分（RMDS），其相对于盘的径向方向上的点平移RDS; 向EBES提供根据要记录的数据调制曝光光束的强度的指令的发射控制器; 以及运动控制器，为RMDS提供用于将每个盘旋转的旋转盘移动RDS的预定移动量的指令。

公开(公告)号：US06686597B2

公开(公告)日：2004-02-03

申请号：US09942982

申请日：2001-08-31

申请人： Osamu Kumasaka ,  Kazumi Kuriyama ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Takeharu Iwata ,  Masaki Kobayashi

发明人： Osamu Kumasaka ,  Kazumi Kuriyama ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Takeharu Iwata ,  Masaki Kobayashi

IPC分类号： C23F100

CPC分类号： F16C32/06 ,  B23Q1/38 ,  B23Q7/02 ,  B82Y10/00 ,  B82Y40/00 ,  F16C2322/39 ,  G11B7/26 ,  G11B7/261 ,  H01J37/3174 ,  H01J2237/31735 ,  H01L21/67242 ,  H01L21/6831

摘要： A master disc manufacturing apparatus includes an electron-beam emitting portion for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.

摘要翻译： 母盘制造装置包括用于发射电子束的电子束发射部分，用于会聚电子束的电子束会聚部分，用于施加具有使电子减速大小的负电位的衬底的延迟电压施加部分 以及用于抽空室以在其中产生真空气氛的真空气氛产生部分。

公开(公告)号：US06650611B1

公开(公告)日：2003-11-18

申请号：US09950015

申请日：2001-09-12

申请人： Kenji Kamimura ,  Kazumi Kuriyama ,  Osamu Kumasaka ,  Hiroki Kaneda ,  Masami Sone ,  Takeharu Iwata ,  Masaki Kobayashi

发明人： Kenji Kamimura ,  Kazumi Kuriyama ,  Osamu Kumasaka ,  Hiroki Kaneda ,  Masami Sone ,  Takeharu Iwata ,  Masaki Kobayashi

IPC分类号： G11B700

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G11B7/26 ,  G11B7/261 ,  H01J37/304 ,  H01J2237/3045 ,  H01J2237/3175

摘要： An apparatus of manufacturing a master by irradiating an electron beam on a substrate mounted on a turntable includes a rotation drive section for rotating the turntable; first and second correction-signal generating sections for respectively detecting first and second asynchronous components of rotational fluctuation of the turntable in a predetermined direction and in a direction perpendicular to the predetermined direction to generate first and second correction signals; and a deflection control section for controlling the electron beam deflection on the basis of the first and second correction signals.

摘要翻译： 通过在安装在转台上的基板上照射电子束来制造主机的装置包括：用于旋转转盘的旋转驱动部; 第一和第二校正信号产生部分，用于分别在预定方向和垂直于预定方向的方向上检测转台的旋转波动的第一和第二异步分量，以产生第一和第二校正信号; 以及偏转控制部分，用于根据第一和第二校正信号控制电子束偏转。

公开(公告)号：US20070115788A1

公开(公告)日：2007-05-24

申请号：US11652676

申请日：2007-01-12

申请人： Osamu Kumasaka ,  Masaki Kobayashi ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Kazumi Kuriyama

发明人： Osamu Kumasaka ,  Masaki Kobayashi ,  Hiroki Kaneda ,  Masami Sone ,  Kenji Kamimura ,  Kazumi Kuriyama

IPC分类号： G11B7/00 ,  G11B19/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G11B7/261

摘要： An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation. The apparatus also includes a deflection controller supplying the EBES with instructions for deflection operations for deflecting the exposure beam in a manner that the spot is successively moved from a first exposure start position in either the opposite or the same direction to a moving direction of the RDS and then, at a point in time when the spot has moved up to an exposure stop position of the disk in predetermined rotation thereof, the spot is intermittently moved to a second exposure start position in the moving direction of the RDS, and wherein the spot is periodically returned to the first exposure start position.

摘要翻译： 用于记录轨道的信息记录装置包括：支撑并旋转具有抗蚀剂层的母盘的旋转驱动部分（RDS）; 曝光光束发射部分（EBES），其可偏转地将曝光光束施加到盘上以在其上形成点; 相对运动驱动部分（RMDS），其相对于盘的径向方向上的点平移RDS; 向EBES提供根据要记录的数据调制曝光光束的强度的指令的发射控制器; 以及运动控制器，为RMDS提供用于将每个盘旋转的旋转盘移动RDS的预定移动量的指令。 该设备还包括偏转控制器，为EBES提供用于偏转操作的指令，以使曝光光束以使得光点从与RDS的移动方向相反或相同方向上的第一曝光开始位置连续移动的方式 然后，在点已经以规定的旋转移动到盘的曝光停止位置的时间点，间隔地移动到RDS的移动方向上的第二曝光开始位置，并且其中点 定期地返回到第一曝光开始位置。

公开(公告)号：US4613202A

公开(公告)日：1986-09-23

申请号：US625966

申请日：1984-06-29

申请人： Kazumi Kuriyama

发明人： Kazumi Kuriyama

IPC分类号： G02B7/00 ,  G11B7/09 ,  G11B17/04 ,  G02B26/10

CPC分类号： G11B7/0932

摘要： A support structure for an electromechanical transducer assembly including an optical unit and drive means for driving the optical unit in at least two directions consisting of a first direction and a second direction perpendicular to the first direction, comprising stationary structure means, movable structure means movable in the two directions from and to a predetermined position with respect to the stationary structure means, the optical unit being movable with the movable structure means, and at least two spring elements each constituted by an endless band of an elastic or viscoelastic material, each of the spring elements being interposed between the stationary and movable structure means and having a center axis in a third direction perpendicular to both of the first and second directions, each of the spring elements being deformed under compression into a generally oval configuration between the stationary and movable structure means.

摘要翻译： 一种用于机电换能器组件的支撑结构，包括光学单元和驱动装置，用于在垂直于第一方向的第一方向和第二方向组成的至少两个方向上驱动光学单元，包括固定结构装置，可移动的结构装置 相对于固定结构装置的预定位置的两个方向，光学单元可移动地与可移动结构装置一起移动，并且至少两个弹簧元件各自由弹性或粘弹性材料的环形带构成，每个弹性元件 弹簧元件插入固定和可移动结构装置之间，并且具有垂直于第一和第二方向两者的第三方向的中心轴线，每个弹簧元件在压缩之间变形成在固定和可移动结构之间的大致椭圆形构造 手段。