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公开(公告)号：US20100202861A1
公开(公告)日：2010-08-12
申请号：US12703739
申请日：2010-02-10
CPC分类号： H01L21/67724 , H01L21/67733 , H01L21/67736 , H01L21/67775
摘要： A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle.
摘要翻译： 传送系统包括：第一搁板，设置成阻止从传送位置传送传送路径的原始传送路径，传送车辆将传送的物体传送到端口并且可以与运送车辆传送被传送物体; 放置运送物体的第二个搁架; 位移装置可以使运送物体相对于第一搁架和端口沿着第一方向往复运动，朝向和远离处理装置，并且可以在第一方向位置使第一方向位置往复运动，该第一方向位置在第一方向位置 所述运送物体从所述第一搁架和所述端口沿与所述第一方向交叉的第二方向; 以及通信装置，其接收可以向所述运送车辆发送转让许可的来自所述运输车辆的转移请求。
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公开(公告)号：US20100204826A1
公开(公告)日：2010-08-12
申请号：US12705545
申请日：2010-02-12
IPC分类号： H01L21/677
CPC分类号： H01L21/67766 , H01L21/67769
摘要： A transfer system includes: a first shelf blocking an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and which transfers the transported object with the transporting vehicle; a second shelf that puts the transported object; a displacing device which reciprocates the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and reciprocates the transported object at a first direction position, away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device receiving a first system signal indicating a transfer request from the transporting vehicle, which transmits a second system signal indicating a transfer permission to the transporting vehicle, which transmits the first system signal to the processing apparatus.
摘要翻译： 传送系统包括：第一搁架，其从运送车辆将运送物体传送到该端口的转移位置阻挡原始传送路径，并且与运送车辆传送被传送物体; 放置运送物体的第二个货架; 移动装置，其使所输送的物体相对于第一搁架和端口朝第一方向往复移动并且远离处理装置，并且使运送物体沿第一方向位置在第一方向上沿着第一方向往复运动， 从第一搁架和端口沿与第一方向交叉的第二方向; 以及通信装置，其向所述处理装置发送指示来自所述运输车辆的转移请求的第一系统信号，所述第一系统信号向所述运送车辆发送指示转运许可的第二系统信号。
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3.发明授权Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer 失效半导体晶片转印方法及用于半导体晶片热处理的装置和船
公开(公告)号：US5030057A
公开(公告)日：1991-07-09
申请号：US266651
申请日：1988-11-03
申请人： Hironobu Nishi , Kenichi Yamaga , Takanobu Asano , Kazutoshi Sawado , Masashi Fumoto , Shozo Ito , Yoshinori Mochizuki
发明人： Hironobu Nishi , Kenichi Yamaga , Takanobu Asano , Kazutoshi Sawado , Masashi Fumoto , Shozo Ito , Yoshinori Mochizuki
IPC分类号： H01L21/00 , H01L21/205 , H01L21/22 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67313 , H01L21/67294 , H01L21/67326 , H01L21/67781 , Y10S414/136 , Y10S414/138 , Y10S414/14
摘要： A wafer transferring method for transferring wafers between a cassette and a boat having grooves to hold the wafers, comprises the steps of providing an identification mechanism for positional alignment on the boat in advance, detecting the identification mechanism, and aligning the boat to a predetermined position based on a detection result and transferring the wafers from the cassette to the boat. A wafer transferring apparatus comprises a loading device for extracting wafers from a cassette and transferring the wafers onto a boat, a detection device for detecting an identification section provided on the boat in order to identify a wafer transferring position on the boat, and a control device for acquiring the wafer transferring position on the boat based on a detection result attained from the detection device and controlling a mutual position between the boat and the cassette to come to a predetermined position.
摘要翻译： 一种晶片转印方法，用于在具有用于保持晶片的槽的盒和舟皿之间转移晶片，包括以下步骤：提供用于在船上进行位置对准的识别机构，检测识别机构，以及将船对准到预定位置 基于检测结果并将晶片从盒转移到船。 晶片转印装置包括用于从盒中提取晶片并将晶片转移到船上的装载装置，用于检测设置在船上的识别部分以识别船上的晶片转移位置的检测装置，以及控制装置 用于基于从检测装置获得的检测结果获取船上的晶片转移位置，并控制船和盒之间的相互位置到达预定位置。
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公开(公告)号：US08287222B2
公开(公告)日：2012-10-16
申请号：US12703739
申请日：2010-02-10
IPC分类号： B65G1/00
CPC分类号： H01L21/67724 , H01L21/67733 , H01L21/67736 , H01L21/67775
摘要： A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle.
摘要翻译： 传送系统包括：第一搁板，设置成阻止从传送位置传送传送路径的原始传送路径，传送车辆将传送的物体传送到端口并且可以与运送车辆传送被传送物体; 放置运送物体的第二个搁架; 位移装置可以使运送物体相对于第一搁架和端口沿着第一方向往复运动，朝向和远离处理装置，并且可以在第一方向位置使第一方向位置往复运动，该第一方向位置在第一方向位置 所述运送物体从所述第一搁架和所述端口沿与所述第一方向交叉的第二方向; 以及通信装置，其接收可以向所述运送车辆发送转让许可的来自所述运输车辆的转移请求。
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