公开(公告)号：US08202034B2

公开(公告)日：2012-06-19

申请号：US12873518

申请日：2010-09-01

Applicant: Hiroshi Sone ,  Ryuji Higashisaka ,  Kazutoshi Yoshibayashi ,  Tatsunori Sato ,  Tatsuhiro Takahashi

Inventor： Hiroshi Sone ,  Ryuji Higashisaka ,  Kazutoshi Yoshibayashi ,  Tatsunori Sato ,  Tatsuhiro Takahashi

IPC: B65G49/07

CPC classification number: B25J9/042 ,  B25J15/0052 ,  H01L21/67173 ,  H01L21/67712 ,  H01L21/6776 ,  H01L21/67766 ,  Y10S414/141

Abstract: A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction.

Abstract translation: 根据本发明的机器人包括驱动机构，可旋转地连接到驱动机构的第一臂，可旋转地连接到第一臂的第二臂和可旋转地设置在第二臂的远端处的X形端部执行器。 在末端执行器的四个远端中，两个远端包括可在一个方向上保持基板的保持单元，而剩余的两个远端包括能够沿相反方向保持基板的保持单元。

公开(公告)号：US20110052349A1

公开(公告)日：2011-03-03

申请号：US12873518

申请日：2010-09-01

Applicant: Hiroshi SONE ,  Ryuji HIGASHISAKA ,  Kazutoshi YOSHIBAYASHI ,  Tatsunori SATO ,  Tatsuhiro TAKAHASHI

Inventor： Hiroshi SONE ,  Ryuji HIGASHISAKA ,  Kazutoshi YOSHIBAYASHI ,  Tatsunori SATO ,  Tatsuhiro TAKAHASHI

IPC: B25J21/00 ,  B25J15/00 ,  B25J18/00 ,  B25J11/00 ,  H01L21/677

CPC classification number: B25J9/042 ,  B25J15/0052 ,  H01L21/67173 ,  H01L21/67712 ,  H01L21/6776 ,  H01L21/67766 ,  Y10S414/141

Abstract: A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction.

Abstract translation: 根据本发明的机器人包括驱动机构，可旋转地连接到驱动机构的第一臂，可旋转地连接到第一臂的第二臂和可旋转地设置在第二臂的远端处的X形端部执行器。 在末端执行器的四个远端中，两个远端包括可在一个方向上保持基板的保持单元，而剩余的两个远端包括能够沿相反方向保持基板的保持单元。