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    Vacuum Film Forming Apparatus
    1.
    发明申请
    Vacuum Film Forming Apparatus 审中-公开
    真空成膜装置

    公开(公告)号：US20080289957A1

    公开(公告)日：2008-11-27

    申请号：US11662563

    申请日：2005-09-05

    申请人： Shirou Takigawa ,  Keiji Katou ,  Nobuo Yoneyama

    发明人： Shirou Takigawa ,  Keiji Katou ,  Nobuo Yoneyama

    IPC分类号： C23C14/34 ,  C23C14/35

    CPC分类号： C23C14/352 ,  B05D1/62 ,  C23C14/205 ,  H01J37/3405 ,  H01J37/3447

    摘要： A vacuum film forming apparatus is provided that is intended to use a portion of its cylindrical member as a target and moreover have an additional function of plasma polymerization using the cylindrical member.A vacuum film forming apparatus (100) is provided with an electrically conductive vacuum chamber (13) having an interior space, a frame member (15) having a plurality of curved members (31, 32) each curved in a sector shape and arranged in the interior space (10) so as to form a substantially cylindrical shape, and a magnetic field forming device (33) disposed in an interior surrounded by the frame member (15) and configured to form a magnetic field along the circumference of the frame member (15). At least one of the curved members (15, 16) is a target used for sputtering, and a region of the frame member (15) other than the target is used for plasma polymerization.

    摘要翻译： 提供一种真空成膜装置，其旨在使用其圆柱形构件的一部分作为靶，并且还具有使用该圆柱形构件的等离子体聚合的附加功能。 真空成膜装置（100）设置有具有内部空间的导电真空室（13），具有多个弯曲构件（31,32）的框架构件（15），每个弯曲构件（31,32）以扇形形状弯曲并布置在 所述内部空间（10）形成为大致圆筒形状;以及磁场形成装置（33），其设置在由所述框架构件（15）围绕的内部，并被构造成沿着所述框架构件的周缘形成磁场 （15）。 弯曲构件（15,16）中的至少一个是用于溅射的靶，并且除了靶之外的框架构件（15）的区域用于等离子体聚合。

    Clean robot
    3.
    发明授权
    Clean robot 失效
    清洁机器人

    公开(公告)号：US5913722A

    公开(公告)日：1999-06-22

    申请号：US045592

    申请日：1998-03-23

    申请人： Keiji Katou ,  Masazumi Fukushima

    发明人： Keiji Katou ,  Masazumi Fukushima

    IPC分类号： B25J19/00 ,  B25J9/04 ,  B25J11/00

    CPC分类号： B25J9/042 ,  Y10S414/14

    摘要： To allow an elevating body (17) in a clean robot (RB) installed in a clean room (R) to be located outside frames (4) without protruding from a swivel base (2) in order to enable the elevating body to be assembled and maintained easily and to ensure a wide elevating stroke. Two hollow frames (4, 4) extend vertically from the right and left sides of the rear of a swivel base (2) so as to be approximately symmetrical, a cover (9) is mounted between the frames (4, 4) and an elevating body (17) having a robot body (20) at its tip is accommodated in an elevating space (13) in the cover (9) and supported by rails (15) in the frames (4) so as to travel upward and downward. A blower (39) for air suction is located on the swivel base (2) and in front of each frame (4) to suck and exhaust the air in the elevating space (13) in the cover 9 via a suction port (36) allowing the elevating space (13) and the space in each frame (4) to communicate mutually and an exhaust port (40) to be opened in the front surface of the lower end of each frame (4).

    摘要翻译： 为了允许安装在洁净室（R）中的清洁机器人（RB）中的升降体（17）位于框架（4）外部而不从旋转基座（2）突出，以便能够组装升降体 并保持容易，并确保大幅度升高中风。 两个中空框架（4,4）从旋转底座（2）的后部的左右两侧垂直延伸，大致对称，在框架（4,4）和 在其顶端具有机器人主体（20）的升降体（17）容纳在盖（9）的升降空间（13）中，并由框架（4）中的轨道（15）支撑，以便上下移动 。 用于吸气的鼓风机（39）位于旋转基座（2）上并且位于每个框架（4）的前面，以通过吸入口（36）吸入和排出盖9中的升降空间（13）中的空气， 允许每个框架（4）中的升降空间（13）和空间相互连通以及在每个框架（4）的下端的前表面中打开的排气口（40）。