公开(公告)号：US20080216872A1

公开(公告)日：2008-09-11

申请号：US10546508

申请日：2004-02-18

申请人： Hisayoshi Yamoto ,  Ryoichi Sakai ,  Masafumi Shoji ,  Kazuya Akuto ,  Ken Nagaoka ,  Hiroshi Watanuki

发明人： Hisayoshi Yamoto ,  Ryoichi Sakai ,  Masafumi Shoji ,  Kazuya Akuto ,  Ken Nagaoka ,  Hiroshi Watanuki

IPC分类号： C23C16/448 ,  B08B3/08 ,  B08B5/00 ,  B05B15/02

CPC分类号： C23C16/4486

摘要： There is obtained an MOCVD oriented vaporizer which eliminates a phenomenon that thin-film materials are adhered to a portion of the vaporizer near and around a spout thereof. A carrier gas/small amount oxidizing gas supply part supplies a carrier gas, which is supplied through an internally formed gas passage and which contains a material solution, to a vaporization part; a bubble prevention/material solution supply part supplies a material for preventing generation of bubbles of the carrier gas containing the material solution, and the material solution, into the carrier gas; a solvent vaporization restricting/cooling system restricts vaporization of a solvent; and a swirl flow preventing gas supply part supplies a gas for preventing occurrence of swirl flows near a gas outlet of the vaporization part. An atomizing part causes the carrier gas, which contains the material solution and which is ejected from the vaporizer, to be formed into a finely atomized state; and a complete vaporization oriented high performance vaporization tube completely vaporizes the carrier gas ejected from the vaporizer and containing the material solution. This enables long-term usage without clogging and the like, and enables a stable material supply to a reaction part.

摘要翻译： 获得了一种MOCVD取向的蒸发器，其消除了薄膜材料附着在蒸发器附近和其周围的一部分附近的现象。 载气/少量氧化气体供给部将通过内部形成的气体流路供给并含有原料溶液的载气供给到汽化部; 气泡防止/物质溶液供给部件提供用于防止将含有材料溶液和材料溶液的载气的气泡产生到载气中的材料; 溶剂蒸发限制/冷却系统限制溶剂的蒸发; 并且防止涡流阻止气体供应部分供应用于防止在汽化部分的气体出口附近发生涡流的气体。 雾化部分使包含材料溶液并从蒸发器喷出的载气形成微细的状态; 并且完全蒸发取向的高性能蒸发管将从蒸发器喷出的载气完全蒸发并包含材料溶液。 这使得能够长期使用而不堵塞等，并且能够稳定地供给反应部件。

公开(公告)号：US20070166457A1

公开(公告)日：2007-07-19

申请号：US10548202

申请日：2004-03-08

申请人： Hisayoshi Yamoto ,  Kazuya Akuto ,  Ken Nagaoka ,  Hitoshi Kobayashi ,  Masafumi Shoji ,  Mitsuru Fukugawa

发明人： Hisayoshi Yamoto ,  Kazuya Akuto ,  Ken Nagaoka ,  Hitoshi Kobayashi ,  Masafumi Shoji ,  Mitsuru Fukugawa

IPC分类号： C23C16/00

CPC分类号： C23C16/448

摘要： It is aimed at providing a vaporization apparatus and a vaporization method capable of keeping track of a progressive condition of clogging of the apparatus. It is also aimed at providing a vaporization apparatus and a vaporization method capable of eliminating clogging prior to occurrence of complete clogging, without disassembling the apparatus. It provides a vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of the gas passage, and means for detecting a pressure within the gas passage is provided. The vaporization apparatus is characterized in that the same is provided with means for introducing a chemical solution capable of dissolving therein matters deposited or sticked to the inside of the gas passage, into the gas passage.

摘要翻译： 其目的在于提供能够跟踪装置堵塞的进行状态的蒸发装置和蒸发方法。 还旨在提供一种能够在没有完全堵塞的情况下消除堵塞而不拆卸设备的蒸发装置和蒸发方法。 它提供了一种用于从气体通道的一端引入载气并用于将包括材料溶液的载气从气体通道的另一端引入蒸发部分从而汽化该材料溶液的蒸发装置，其特征在于， 在气体通道的一端设置质量流量控制器（MFC），并且提供用于检测气体通道内的压力的装置。 蒸发装置的特征在于，其具有用于将能够溶解在气体通道内部的物质中的化学溶液引入气体通道的装置。