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1.发明申请METHOD OF FORMING MICROPATTERN, DIE FORMED BY THIS METHOD OF FORMING MICROPATTERN, TRANSFER METHOD AND MICROPATTERN FORMING METHOD USING THIS DIE 有权通过这种形成微孔蛋白的方法形成微孔蛋白的方法，使用该DIE的转移方法和微阵列形成方法公开(公告)号：US20120286450A1
公开(公告)日：2012-11-15
申请号：US13555728
申请日：2012-07-23
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A micropattern is joined to a substrate (W1) by: a first group of covering step and micropattern forming step by etching in a transfer step; and a second group of covering step and micropattern forming step by etching in the transfer step.
摘要翻译： 通过以下步骤将微图案连接到基板（W1）：通过在转印步骤中蚀刻的第一组覆盖步骤和微图案形成步骤; 以及在转印步骤中通过蚀刻的第二组覆盖步骤和微图案形成步骤。
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2.发明申请Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus 失效具有万向架机构的传送装置和使用该传送装置的传送方法公开(公告)号：US20060243761A1
公开(公告)日：2006-11-02
申请号：US11403984
申请日：2006-04-14
IPC分类号： B22D37/00
CPC分类号： G11B7/265 , H01L21/682
摘要： A transfer apparatus includes a table on which a molding material is placed, a mold holding body that fixes and holds a mold disposed such as to be opposed to a surface of the table, a gimbal member which holds the mold holding body and which forms a convex spherical surface portion, a gimbal member formed with a concave spherical surface portion which is opposed and in contact with the convex spherical surface portion, a movable body that holds the gimbal member and which can advance and retreat in the vertical direction with respect to the table surface, and an attitude adjusting/holding unit that adjusts and holds attitude of the gimbal member.
摘要翻译： 转印装置包括：放置有成型材料的工作台;固定并保持设置成与工作台的表面相对的模具的模具保持体;保持模具保持体的万向架构件， 凸形球面部分，形成有与球形球面相对并接触的凹球面部分的万向节构件，可移动体，其保持万向架构件，并且能够相对于垂直方向在垂直方向前进和后退 台面和姿态调节/保持单元，其调节和保持万向节构件的姿态。
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3.发明授权Method of forming micropattern, die formed by this method of forming micropattern, transfer method and micropattern forming method using this die 有权形成微图案的方法，通过这种形成微图案的方法形成的模具，使用该模具的转印方法和微图案形成方法公开(公告)号：US08703618B2
公开(公告)日：2014-04-22
申请号：US13555728
申请日：2012-07-23
IPC分类号： H01L21/311
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A micropattern is joined to a substrate (W1) by: a first group of covering step and micropattern forming step by etching in a transfer step; and a second group of covering step and micropattern forming step by etching in the transfer step.
摘要翻译： 通过以下步骤将微图案连接到基板（W1）：通过在转印步骤中蚀刻的第一组覆盖步骤和微图案形成步骤; 以及在转印步骤中通过蚀刻的第二组覆盖步骤和微图案形成步骤。
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4.发明授权Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus 有权具有万向架机构的传送装置和使用该传送装置的传送方法公开(公告)号：US08318074B2
公开(公告)日：2012-11-27
申请号：US12633183
申请日：2009-12-08
IPC分类号： B28B3/00
CPC分类号： G11B7/265 , H01L21/682
摘要： A transfer apparatus includes a table on which a molding material is placed, a mold holding body that fixes and holds a mold disposed such as to be opposed to a surface of the table, a gimbal member which holds the mold holding body and which forms a convex spherical surface portion, a gimbal member formed with a concave spherical surface portion which is opposed and in contact with the convex spherical surface portion, a movable body that holds the gimbal member and which can advance and retreat in the vertical direction with respect to the table surface, and an attitude adjusting/holding unit that adjusts and holds attitude of the gimbal member.
摘要翻译： 转印装置包括：放置有成型材料的工作台;固定并保持设置成与工作台的表面相对的模具的模具保持体;保持模具保持体的万向架构件， 凸形球面部分，形成有与球形球面相对并接触的凹球面部分的万向节构件，可移动体，其保持万向架构件，并且能够相对于垂直方向在垂直方向前进和后退 台面和姿态调节/保持单元，其调节和保持万向节构件的姿态。
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公开(公告)号：US20120285928A1
公开(公告)日：2012-11-15
申请号：US13555781
申请日：2012-07-23
IPC分类号： H01L21/302 , B28B11/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A micropattern is joined to a substrate (W1) by: a first group of covering step and micropattern forming step by etching in a transfer step; and a second group of covering step and micropattern forming step by etching in the transfer step.
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公开(公告)号：US20120285927A1
公开(公告)日：2012-11-15
申请号：US13555768
申请日：2012-07-23
IPC分类号： H01L21/302 , B28B11/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A micropattern is joined to a substrate (W1) by: a first group of covering step and micropattern forming step by etching in a transfer step; and a second group of covering step and micropattern forming step by etching in the transfer step.
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公开(公告)号：US20060269645A1
公开(公告)日：2006-11-30
申请号：US11439291
申请日：2006-05-24
IPC分类号： B28B11/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F9/00
摘要： A transcript apparatus having a table 11 having a placement surface on which a forming material 13 is placed; a die holder 205, disposed in opposition to the table, to fixedly hold a transcription die 41; a first gimbal member 201 having one side to hold the die holder body and the other side formed with a convex spherical surface, a second gimbal member 203 formed with a concave spherical surface facing the convex spherical surface, the gimbal mechanism guiding ultraviolet rays therein; a movable body 19, holding the second gimbal member, that is movable in a vertical direction to the placement surface; attitude adjustment and holder means to adjust and hold an attitude of the first gimbal member; and an ultraviolet ray path to guide ultraviolet rays emitted from an ultraviolet ray generator 42 onto the forming material through the transcription die.
摘要翻译： 具有具有放置表面的工作台11的成像装置，放置有成形材料13; 设置成与桌子相对设置的模具座205，以固定地保持转录模具41; 第一万向架构件201，其一侧保持模具座本体，另一侧形成有凸球面;第二万向架构件203，其形成有面向凸球面的凹球面;万向架机构，其引导紫外线; 可移动体19，其保持第二万向架构件，其可在垂直方向上移动到放置表面; 态度调整和持有者意味着调整和保持第一个万向节成员的态度; 以及将从紫外线发生器42发射的紫外线通过转录模头引导到成形材料上的紫外线路径。
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公开(公告)号：US08716140B2
公开(公告)日：2014-05-06
申请号：US13555781
申请日：2012-07-23
IPC分类号： H01L21/311
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A micropattern is joined to a substrate (W1) by: a first group of covering step and micropattern forming step by etching in a transfer step; and a second group of covering step and micropattern forming step by etching in the transfer step.
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公开(公告)号：US08685862B2
公开(公告)日：2014-04-01
申请号：US13555768
申请日：2012-07-23
IPC分类号： H01L21/311 , H01L21/302 , H01L21/461
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A micropattern is joined to a substrate (W1) by: a first group of covering step and micropattern forming step by etching in a transfer step; and a second group of covering step and micropattern forming step by etching in the transfer step.
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10.发明授权Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus 失效具有万向架机构的传送装置和使用该传送装置的传送方法公开(公告)号：US07648354B2
公开(公告)日：2010-01-19
申请号：US11403984
申请日：2006-04-14
IPC分类号： B32B37/02
CPC分类号： G11B7/265 , H01L21/682
摘要： A transfer apparatus includes a table on which a molding material is placed, a mold holding body that fixes and holds a mold disposed such as to be opposed to a surface of the table, a gimbal member which holds the mold holding body and which forms a convex spherical surface portion, a gimbal member formed with a concave spherical surface portion which is opposed and in contact with the convex spherical surface portion, a movable body that holds the gimbal member and which can advance and retreat in the vertical direction with respect to the table surface, and an attitude adjusting/holding unit that adjusts and holds attitude of the gimbal member.
摘要翻译： 转印装置包括：放置有成型材料的工作台;固定并保持设置成与工作台的表面相对的模具的模具保持体;保持模具保持体的万向架构件， 凸形球面部分，形成有与球形球面相对并接触的凹球面部分的万向节构件，可移动体，其保持万向架构件，并且能够相对于垂直方向在垂直方向前进和后退 台面和姿态调节/保持单元，其调节和保持万向节构件的姿态。
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