公开(公告)号：US08922112B2

公开(公告)日：2014-12-30

申请号：US12186320

申请日：2008-08-05

申请人： Hidekazu Kobayashi ,  Koji Yasukawa

发明人： Hidekazu Kobayashi ,  Koji Yasukawa

IPC分类号： H01L33/00 ,  H01L51/52 ,  H01L51/50 ,  H01J63/04 ,  H01L27/32

CPC分类号： H01L51/5265 ,  H01L27/3213 ,  H01L51/5036 ,  H01L51/5048 ,  H01L2251/558

摘要： A light emitting element includes a reflective layer disposed in a substrate, a first electrode disposed through the reflective layer, a second electrode having translucent reflectivity, a plurality of organic material layers including a light emitting layer disposed between the first electrode and the second electrode, and a light emitting region defined by the first electrode, the second electrode, and the light emitting layer. A first organic material layer of the plurality of organic material layers has a first layer thickness in a first sub region within the light emitting region and has a second layer thickness, which is different from the first layer thickness, in a second sub region within the light emitting region.

摘要翻译： 发光元件包括设置在基板中的反射层，穿过反射层设置的第一电极，具有半透明反射率的第二电极，包括设置在第一电极和第二电极之间的发光层的多个有机材料层， 以及由第一电极，第二电极和发光层限定的发光区域。 多个有机材料层的第一有机材料层在发光区域内的第一子区域中具有第一层厚度，并且在第二子区域内具有与第一层厚度不同的第二层厚度 发光区域。

公开(公告)号：US08159650B2

公开(公告)日：2012-04-17

申请号：US12205232

申请日：2008-09-05

申请人： Shinichi Okita ,  Koji Yasukawa

发明人： Shinichi Okita ,  Koji Yasukawa

IPC分类号： G03B27/42 ,  G03B27/32

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70616 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： In the case where measurement/inspection of a wafer is performed in a measurement/inspection instrument before and after exposure is performed in an exposure apparatus, various kinds of conditions of the exposure apparatus and the measurement/inspection instrument are made to be matched. In particular, in accordance with a processing state of the exposure apparatus and a coater developer, a measurement result of a film, and the like, exclusion of a mark for overlay error measurement, adjustment of the measurement condition and correction of the measurement result, adjustment of the environment, correction of the measurement result according to the environment, and adjustment of pattern defect inspection are performed. Further, in calibration processing, aberration of a projection optical system of an exposure apparatus that transfers a pattern on a wafer for calibration, and the like are also taken into consideration. Accordingly, the yield of device production can be improved.

摘要翻译： 在曝光装置中进行曝光前后的测量/检查仪器中对晶片进行测量/检查的情况下，使曝光装置和测量/检查装置的各种条件相匹配。 特别地，根据曝光装置和涂布机显影剂的处理状态，胶片的测量结果等，排除重叠误差测量的标记，测量条件的调整和测量结果的校正， 执行环境调整，根据环境校正测量结果以及模式缺陷检查的调整。 此外，在校准处理中，还考虑了将用于校准的晶片上的图案转印的曝光装置的投影光学系统的像差等。 因此，可以提高装置生产的产量。

公开(公告)号：US20100230688A1

公开(公告)日：2010-09-16

申请号：US12711588

申请日：2010-02-24

申请人： Masayuki MITSUYA ,  Koji YASUKAWA

发明人： Masayuki MITSUYA ,  Koji YASUKAWA

IPC分类号： H01L33/00

CPC分类号： H01L51/5036 ,  H01L27/322 ,  H01L51/0058

摘要： Provided is a light-emitting element including a cathode; an anode; a first light-emitting layer that is disposed between the cathode and the anode and emits in a first color; a second light-emitting layer that is disposed between the first light-emitting layer and the cathode and emits in a second color that is different from the first color; and an intermediate layer that is disposed between the first light-emitting layer and the second light-emitting layer so as to be in contact with these layers and has a function of controlling the migration of holes and electrons between the first light-emitting layer and the second light-emitting layer. The intermediate layer is constituted of a first layer that is in contact with the first light-emitting layer and is constituted of a hole-transporting material serving as a main material and a second layer that is in contact with the first layer and also with the second light-emitting layer and is constituted of a material mixture, serving as a main material, of a material having an acene skeleton and a hole-transporting material.

摘要翻译： 提供了包括阴极的发光元件; 阳极; 第一发光层，其设置在阴极和阳极之间并以第一颜色发射; 第二发光层，其设置在第一发光层和阴极之间，并以与第一颜色不同的第二颜色发射; 以及设置在第一发光层和第二发光层之间以与这些层接触的中间层，并且具有控制第一发光层和第二发光层之间的空穴和电子的迁移的功能 第二发光层。 中间层由与第一发光层接触的第一层构成，由作为主要材料的空穴传输材料和与第一层接触的第二层构成， 第二发光层，由作为主要材料的材料混合物构成，具有苊骨架和空穴传输材料。

公开(公告)号：US20090079335A1

公开(公告)日：2009-03-26

申请号：US12182623

申请日：2008-07-30

申请人： Masayuki MITSUYA ,  Koji YASUKAWA

发明人： Masayuki MITSUYA ,  Koji YASUKAWA

IPC分类号： H01J1/63

CPC分类号： H01L51/5036 ,  H01L27/322 ,  H01L27/3244 ,  H01L51/50 ,  H01L2251/308 ,  H01L2251/5315

摘要： A light-emitting device includes a cathode, an anode, a first light-emitting layer that is disposed between the cathode and the anode and that emits light of a first color, a second light-emitting layer that is disposed between the first light-emitting layer and the cathode and that emits light of a second color different from the first color, and an intermediate layer that is disposed between and in contact with the first light-emitting layer and the second light-emitting layer and that functions to prevent energy transfer of excitons between the first light-emitting layer and the second light-emitting layer. The intermediate layer contains an acene-based material and an amine-based material.

摘要翻译： 发光装置包括阴极，阳极，设置在阴极和阳极之间并且发射第一颜色的光的第一发光层，设置在第一发光层之间的第二发光层， 发光层和阴极，并且发射与第一颜色不同的第二颜色的光;以及中间层，其设置在第一发光层和第二发光层之间并与第二发光层接触并且用于防止能量 第一发光层与第二发光层之间的激子的转移。 中间层含有基于乙烯的材料和胺基材料。

公开(公告)号：US20070219664A1

公开(公告)日：2007-09-20

申请号：US11630970

申请日：2005-11-30

申请人： Koji Yasukawa ,  Hiroyuki Suzuki

发明人： Koji Yasukawa ,  Hiroyuki Suzuki

IPC分类号： H01L21/027 ,  H01L21/02 ,  H01L21/66 ,  G03F7/20

CPC分类号： G03F7/70525 ,  G03F7/70508

摘要： A support device that is provided in a device manufacturing plant collects data from a device processing apparatus and analyzes the operating state and the like of the device processing apparatus based on the collected data. This support device consists of a data collection condition setting portion (231) that sets collection conditions of data to be used by the device processing apparatus; a statistical processing condition setting portion (232) that sets the processing condition of statistical processing to be performed on the collected data; and a graph display condition setting portion (233) that sets display conditions for displaying the collected data or the processing result of the statistical processing.

摘要翻译： 设置在装置制造装置中的支撑装置从装置处理装置收集数据，并基于所收集的数据分析装置处理装置的运行状态等。 该支持装置由数据收集条件设定部（231）构成，该部分设定要由装置处理装置使用的数据的收集条件; 统计处理条件设定部（232），其对所收集的数据进行统计处理的处理条件的设定; 以及图形显示条件设置部分（233），其设置用于显示所收集的数据的显示条件或统计处理的处理结果。

公开(公告)号：US08314419B2

公开(公告)日：2012-11-20

申请号：US12711588

申请日：2010-02-24

申请人： Masayuki Mitsuya ,  Koji Yasukawa

发明人： Masayuki Mitsuya ,  Koji Yasukawa

IPC分类号： H01L35/24

CPC分类号： H01L51/5036 ,  H01L27/322 ,  H01L51/0058

摘要： Provided is a light-emitting element including a cathode; an anode; a first light-emitting layer that is disposed between the cathode and the anode and emits in a first color; a second light-emitting layer that is disposed between the first light-emitting layer and the cathode and emits in a second color that is different from the first color; and an intermediate layer that is disposed between the first light-emitting layer and the second light-emitting layer so as to be in contact with these layers and has a function of controlling the migration of holes and electrons between the first light-emitting layer and the second light-emitting layer. The intermediate layer is constituted of a first layer that is in contact with the first light-emitting layer and is constituted of a hole-transporting material serving as a main material and a second layer that is in contact with the first layer and also with the second light-emitting layer and is constituted of a material mixture, serving as a main material, of a material having an acene skeleton and a hole-transporting material.

摘要翻译： 提供了包括阴极的发光元件; 阳极; 第一发光层，其设置在阴极和阳极之间并以第一颜色发射; 第二发光层，其设置在第一发光层和阴极之间，并以与第一颜色不同的第二颜色发射; 以及设置在第一发光层和第二发光层之间以与这些层接触的中间层，并且具有控制第一发光层和第二发光层之间的空穴和电子的迁移的功能 第二发光层。 中间层由与第一发光层接触的第一层构成，由作为主要材料的空穴传输材料和与第一层接触的第二层构成， 第二发光层，由作为主要材料的材料混合物构成，具有苊骨架和空穴传输材料。

公开(公告)号：US07947992B2

公开(公告)日：2011-05-24

申请号：US12356697

申请日：2009-01-21

申请人： Koji Yasukawa ,  Masayuki Mitsuya

发明人： Koji Yasukawa ,  Masayuki Mitsuya

IPC分类号： H01L29/20

CPC分类号： H01L51/5096 ,  H01L51/5044 ,  H01L2251/552 ,  H05B33/10 ,  H05B33/14

摘要： A light-emitting element includes a cathode, an anode, a first light-emitting layer disposed between the cathode and the anode, a second light-emitting layer disposed between the first light-emitting layer and the cathode, a third light-emitting layer disposed between the second light-emitting layer and the cathode, a first interlayer disposed between the first and second light-emitting layers that has a function of preventing energy transfer of an exciton between the first and second light-emitting layers, and a second interlayer disposed between the second and third light-emitting layers that has a function of preventing energy transfer of an exciton between the second and third light-emitting layers, wherein the first interlayer has a hole-transporting property higher than that of the second interlayer, and the second interlayer has a electron-transporting property higher than that of the first interlayer.

摘要翻译： 发光元件包括阴极，阳极，设置在阴极和阳极之间的第一发光层，设置在第一发光层和阴极之间的第二发光层，第三发光层 设置在所述第二发光层和所述阴极之间的第一中间层，设置在所述第一发光层与所述第二发光层之间的第一中间层，其具有防止所述第一发光层与所述第二发光层之间的激子的能量传递的功能， 设置在具有防止第二发光层和第三发光层之间的激子的能量传递的功能的第二发光层和第三发光层之间，其中第一中间层的空穴传输性能高于第二中间层的空穴传输性，以及 第二夹层具有高于第一夹层的电子传输性。

公开(公告)号：US07863814B2

公开(公告)日：2011-01-04

申请号：US12106000

申请日：2008-04-18

申请人： Masayuki Mitsuya ,  Koji Yasukawa

发明人： Masayuki Mitsuya ,  Koji Yasukawa

IPC分类号： H01L51/00 ,  H01L51/50 ,  H01L51/52 ,  H01L51/54

CPC分类号： H01L27/3246

摘要： An organic electroluminescent device includes a substrate on which a pixel region is disposed, and a partition structure including a stack of an inorganic partition made of an inorganic material and an organic partition made of an organic material, and an inorganic protective layer made of an inorganic material covering the surfaces of the organic partition. The partition structure surrounds the pixel region. A pixel electrode is in contact with the partition structure. An organic luminescent layer is disposed over the pixel electrode and covered with a cathode.

摘要翻译： 一种有机电致发光器件包括其上设置有像素区域的衬底和包括由无机材料制成的无机隔板的叠层和由有机材料制成的有机隔离物的层叠体的分隔结构和由无机材料制成的无机保护层 覆盖有机分区表面的材料。 分隔结构包围像素区域。 像素电极与分隔结构接触。 有机发光层设置在像素电极上并被阴极覆盖。

公开(公告)号：US20090091250A1

公开(公告)日：2009-04-09

申请号：US12189926

申请日：2008-08-12

申请人： Koji YASUKAWA ,  Masayuki MITSUYA ,  Hidetoshi YAMAMOTO

发明人： Koji YASUKAWA ,  Masayuki MITSUYA ,  Hidetoshi YAMAMOTO

IPC分类号： H01J1/63

CPC分类号： H01L51/5036 ,  H01L2251/552 ,  Y10S428/917

摘要： A light-emitting device includes a cathode, an anode, a first light-emitting layer that is disposed between the cathode and the anode and that emits light of a first color, a second light-emitting layer that is disposed between the first light-emitting layer and the cathode and that emits light of a second color different from the first color, and an intermediate layer that is disposed between and in contact with the first light-emitting layer and the second light-emitting layer and that functions to prevent energy transfer of excitons between the first light-emitting layer and the second light-emitting layer. The intermediate layer includes a first intermediate layer disposed in contact with the first light-emitting layer and mainly containing a first intermediate material and a second intermediate layer disposed in contact with the second light-emitting layer and mainly containing a second intermediate material different from the first intermediate material.

摘要翻译： 发光装置包括阴极，阳极，设置在阴极和阳极之间并且发射第一颜色的光的第一发光层，设置在第一发光层之间的第二发光层， 发光层和阴极，并且发射与第一颜色不同的第二颜色的光;以及中间层，其设置在第一发光层和第二发光层之间并与第二发光层接触并且用于防止能量 第一发光层与第二发光层之间的激子的转移。 中间层包括与第一发光层接触并且主要包含第一中间材料的第一中间层和与第二发光层接触设置的第二中间层，并且主要包含不同于第二中间材料的第二中间材料 第一中间材料。

公开(公告)号：US20090009741A1

公开(公告)日：2009-01-08

申请号：US12205232

申请日：2008-09-05

申请人： Shinichi OKITA ,  Koji YASUKAWA

发明人： Shinichi OKITA ,  Koji YASUKAWA

IPC分类号： G03B27/42 ,  G03B27/32 ,  G01N37/00

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70616 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： In the case where measurement/inspection of a wafer is performed in a measurement/inspection instrument before and after exposure is performed in an exposure apparatus, various kinds of conditions of the exposure apparatus and the measurement/inspection instrument such as environment in the apparatus/instrument, a measurement condition of an alignment system a measurement condition of an AF measurement device, a wafer grid, and image distortion are made to be matched. In particular, in accordance with a processing state of the exposure apparatus and a coater developer, a measurement result of a film, and the like, exclusion of a mark for overlay error measurement, adjustment of the measurement condition and correction of the measurement result, adjustment of the environment, correction of the measurement result according to the environment, and adjustment of pattern defect inspection are performed. Further, in calibration processing, aberration of a projection optical system of an exposure apparatus that transfers a pattern on a wafer for calibration, and the like are also taken into consideration. Accordingly, the yield of device production can be improved.

摘要翻译： 在曝光装置中进行曝光前后的测量/检查仪器中进行晶片的测量/检查的情况下，曝光装置和测量/检查装置的各种条件，例如装置/ 仪器，对准系统的测量条件，AF测量装置的测量条件，晶片网格和图像失真被匹配。 特别地，根据曝光装置和涂布机显影剂的处理状态，胶片的测量结果等，排除重叠误差测量的标记，测量条件的调整和测量结果的校正， 执行环境调整，根据环境校正测量结果以及模式缺陷检查的调整。 此外，在校准处理中，还考虑了将用于校准的晶片上的图案转印的曝光装置的投影光学系统的像差等。 因此，可以提高装置生产的产量。