公开(公告)号：US20130128273A1

公开(公告)日：2013-05-23

申请号：US13704508

申请日：2011-02-25

申请人： Asami Inoue ,  Kazuya Hirata ,  Daisuke Ito ,  Koshi Haraguchi ,  Shigeru Sakamoto

发明人： Asami Inoue ,  Kazuya Hirata ,  Daisuke Ito ,  Koshi Haraguchi ,  Shigeru Sakamoto

IPC分类号： G02B27/14 ,  G01B9/02

CPC分类号： G02B27/145 ,  G01B9/02 ,  G01B9/02051 ,  G01B9/02056 ,  G01B2290/70 ,  G02B5/04 ,  G02B27/283

摘要： An optical element (20) is formed by bonding the faces of first to fourth triangular prisms (21, 22, 23, 24) that form the apex angle, wherein bonding faces (21a, 22b) of the first and second triangular prisms, bonding faces (22a, 23b) of the second and third triangular prisms, bonding faces (23a, 24b) of the third and fourth triangular prisms, and bonding faces (24a, 21b) of the fourth and first triangular prisms are respectively bonded through an optical thin film. Each optical thin film allows the incident light to pass through, or reflects the incident light, depending on the polarization state. The optical element (20) splits an optical path at a first position of the optical thin film, and combines optical paths at a second position of the optical thin film.

摘要翻译： 光学元件（20）通过将形成顶角的第一至第三三角棱镜（21,22,23,24）的表面接合而形成，其中第一和第二三角棱镜的接合面（21a，22b） 第三和第三三角棱镜的面（22a，23b），第三和第四三角棱镜的接合面（23a，24b）和第四和第三三角形棱镜的接合面（24a，21b）分别通过光学 薄膜。 每个光学薄膜允许入射光通过，或者根据偏振状态反射入射光。 光学元件（20）在光学薄膜的第一位置处分割光路，并且在光学薄膜的第二位置处组合光路。

公开(公告)号：US5355252A

公开(公告)日：1994-10-11

申请号：US009286

申请日：1993-01-26

申请人： Koshi Haraguchi

发明人： Koshi Haraguchi

IPC分类号： G02B21/00 ,  G02B21/36

CPC分类号： G02B21/002

摘要： A scanning laser microscope capable of detecting a fine structure producing low contrast and easily measuring the length, the volume, and so forth of an object. A laser beam is focused onto the object. The beam is scanned at regular intervals, or in a digital fashion, in two dimensions. Light scattered from the object is detected by a detector to observe an image of the object. The output signal from the detector is digitized into a given number of gray levels in synchronism with the digital scans. The object image can be stored in a memory and processed while correlating the scanned position with the intensity of the scattered light at this position.

摘要翻译： 一种能够检测产生低对比度且容易测量物体的长度，体积等的精细结构的扫描激光显微镜。 激光束聚焦在物体上。 光束以两维的规则间隔或数字方式进行扫描。 从物体散射的光由检测器检测，观察物体的图像。 来自检测器的输出信号与数字扫描同步地数字化为给定数量的灰度级。 对象图像可以存储在存储器中并在将扫描位置与该位置处的散射光的强度相关联的同时进行处理。

公开(公告)号：US06714289B2

公开(公告)日：2004-03-30

申请号：US10227241

申请日：2002-08-26

申请人： Koshi Haraguchi

发明人： Koshi Haraguchi

IPC分类号： G01N2188

CPC分类号： H01J37/28 ,  H01J2237/206 ,  H01J2237/2067

摘要： A semiconductor device inspecting apparatus includes a chamber, a stage situated in the chamber for placing a semiconductor device thereon, a femtosecond laser apparatus, and an electron microscope. The femtosecond laser apparatus includes a laser generating section for generating laser beams disposed outside the chamber, and a laser optical system for introducing the laser beams generated at the laser generating section into the chamber. The laser generating section generates femtosecond width pulse and a strength so that the semiconductor device on the stage is cut by the laser beams introduced inside the chamber. The electron microscope is disposed inside the chamber for observing the semiconductor device cut by the laser beams.

摘要翻译： 半导体器件检查装置包括室，位于室中的用于将半导体器件放置在其上的台，飞秒激光装置和电子显微镜。 飞秒激光装置包括用于产生设置在室外的激光束的激光产生部分和用于将在激光产生部分处产生的激光束引入腔室的激光光学系统。 激光产生部产生飞秒宽度脉冲和强度，使得通过在室内引入的激光束来切割台上的半导体器件。 电子显微镜设置在室内，用于观察由激光束切割的半导体器件。