公开(公告)号：US4622464A

公开(公告)日：1986-11-11

申请号：US672091

申请日：1984-11-15

申请人： Kunio Sukigara ,  Harutaka Taniguchi

发明人： Kunio Sukigara ,  Harutaka Taniguchi

IPC分类号： G01N21/03 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/37 ,  G01J1/00

CPC分类号： G01N21/37 ,  G01N21/61

摘要： In the infrared gas analyzers described in the specification, infrared radiation is transmitted through a measuring cell to an infrared detector. The measuring cell has an external case and a tubular filter to remove particulate material from the gas being analyzed immediately before it is intercepted by the infrared radiation.

摘要翻译： 在本说明书中描述的红外线气体分析仪中，红外辐射通过测量池传输到红外检测器。 测量池具有外部壳体和管状过滤器，用于在被红外辐射拦截之前立即从被分析的气体中除去颗粒物质。

公开(公告)号：US4460673A

公开(公告)日：1984-07-17

申请号：US382475

申请日：1982-05-27

申请人： Kunio Sukigara ,  Toyoki Kazama

发明人： Kunio Sukigara ,  Toyoki Kazama

IPC分类号： C01B3/50 ,  C23C16/24 ,  C23C16/448 ,  G03G5/082 ,  B05D3/06

CPC分类号： C23C16/4488 ,  C01B3/503 ,  C23C16/24 ,  G03G5/08278 ,  C01B2203/0405 ,  C01B2203/041 ,  C01B2203/0465

摘要： Disclosed are method and apparatus for producing amorphous silicon layers for solar cells or electrophotography by plasma-enhanced chemical vapor deposition (CVD) through glow-discharge decomposition of a reaction gas containing monosilane or a higher order silicon hydride in a reaction chamber. Deposition rate and efficiency of reaction gas usage are improved by the selective removal of hydrogen gas reaction product from the reaction chamber. In one embodiment, a filter which is more permeable to hydrogen gas than to the reaction gas is placed in the vacuum pumping port of the reaction chamber. The filter comprises either a palladium film or a bundle of small diameter tubes made from a polyimide system polymer. In another embodiment of the invention, a porous sintered material containing La-Ni alloy is used to selectively adsorb hydrogen gas in the reaction chamber. In still another embodiment of the invention, a trap which collects reaction gas but passes hydrogen gas is used in the vacuum pump line connected to the chamber. The trap comprises a cell cooled to liquid nitrogen temperature for condensing the reaction gas but not the hydrogen. The collected reaction gas is recycled through the reaction chamber. The removal rate of hydrogen gas is controlled to maintain a desired hydrogen density in the reaction chamber, the hydrogen density being monitored by observing the intensity of hydrogen spectral lines in the glow discharge in the reaction chamber.

摘要翻译： 公开了通过在反应室中通过含有甲硅烷或高级氢化硅的反应气体的辉光放电分解，通过等离子体增强化学气相沉积（CVD）制造用于太阳能电池或电子照相的非晶硅层的方法和装置。 通过从反应室中选择性除去氢气反应产物，提高了反应气体使用的沉积速率和效率。 在一个实施例中，将比氢气更可渗透的过滤器置于反应室的真空泵送口中。 过滤器包括钯膜或由聚酰亚胺系聚合物制成的小直径管束。 在本发明的另一实施例中，使用含有La-Ni合金的多孔烧结材料来选择性地吸附反应室中的氢气。 在本发明的另一个实施例中，在连接到腔室的真空泵管线中使用收集反应气体但通过氢气的阱。 捕集器包括冷却至液氮温度的电池，用于冷凝反应气体而不是氢气。 收集的反应气体通过反应室再循环。 控制氢气的去除速率以保持反应室中所需的氢密度，通过观察反应室中的辉光放电中的氢谱线的强度来监测氢密度。