公开(公告)号：US20070053044A1

公开(公告)日：2007-03-08

申请号：US11594900

申请日：2006-11-09

申请人： Yoshifumi Kawakami ,  Kyoji Shimoda

发明人： Yoshifumi Kawakami ,  Kyoji Shimoda

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： An object of the present invention is to provide an MEMS mirror scanner capable of achieving a scanning operation at a speed equivalent to or higher than a polygon mirror scanner and including a supporting structure for a flexible mirror, which can be driven even by drive force having a small electrostatic force. A scanning mirror is formed between a pair of suspension beams formed in a rod-like manner and arranged on the same straight line on a substrate and is oscillatably supported by using the straight line as an oscillation axis, and further, an electrostatic capacity drive unit is disposed along either side or both sides of the suspension beam. A maximum distance in an direction perpendicular to oscillation axis, that is, a direction of a width of the suspension beam from a center of an oscillation axis of the electrostatic capacity drive unit is, for example, 60% or less, more preferably, 40% or less of a maximum distance in an direction perpendicular to oscillation axis, that is, a direction of a length of the mirror from a center of an oscillation axis, that is, a rotational center of the mirror, thereby increasing a resonance frequency of the large scanning mirror.

摘要翻译： 本发明的目的是提供一种能够以等于或高于多面镜扫描器的速度实现扫描操作的MEMS反射镜扫描器，并且包括用于柔性反射镜的支撑结构，即使通过具有 静电力小。 扫描反射镜形成在以杆状形成的一对悬臂梁之间，并配置在基板的同一条直线上，并以直线作为摆动轴摆动地支撑，此外，静电电容驱动单元 沿悬挂梁的两侧或两侧设置。 垂直于振动轴的方向上的最大距离，即，来自静电电容驱动单元的振荡轴的中心的悬架梁的宽度方向例如为60％以下，更优选为40％ 在垂直于振动轴的方向上的最大距离的百分之几或更小，即，来自振荡轴的中心的反射镜的长度方向，即反射镜的旋转中心，从而增加了反射镜的共振频率 大扫描镜。

公开(公告)号：US06284203B1

公开(公告)日：2001-09-04

申请号：US09187828

申请日：1998-11-09

申请人： Shigekazu Tokutake ,  Kyoji Shimoda

发明人： Shigekazu Tokutake ,  Kyoji Shimoda

IPC分类号： B01J1908

CPC分类号： C01B13/11 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/32 ,  C01B2201/34 ,  C01B2201/76

摘要： A plate-type-ozonizer discharge cell including a pair of planar electrodes separated by a dielectric to ozonize a material gas circulating through a discharge space formed between one of the planar electrodes and the dielectric by way of discharge. In addition, the dielectric includes at least one ceramic block having a plurality of ceramic layers integrally superimposed on each other in a layer thickness direction. Also included is a method of manufacturing an ozonizer discharge cell, which includes providing a plurality of ceramic sheets to be baked, and superimposing the ceramic sheets in a layer thickness direction. Then the plurality of ceramic layers are baked so as to form a ceramic block.

摘要翻译： 一种板式臭氧发生器放电单元，包括由电介质隔开的一对平面电极，以使通过放电空间循环的材料气体通过放电形成在一个平面电极和电介质之间进行臭氧化。 此外，电介质包括至少一个陶瓷块，其具有沿层厚度方向彼此一体地叠加的多个陶瓷层。 还包括制造臭氧化物放电单元的方法，该方法包括提供多个待烘焙的陶瓷片，并且在层厚度方向上重叠陶瓷片。 然后将多个陶瓷层烘烤以形成陶瓷块。

公开(公告)号：US07469191B2

公开(公告)日：2008-12-23

申请号：US11195466

申请日：2005-08-01

申请人： Kyoji Shimoda ,  Koichi Saito

发明人： Kyoji Shimoda ,  Koichi Saito

IPC分类号： G01R29/26

CPC分类号： G02B5/09 ,  G01R29/26 ,  G02B26/0816

摘要： The present invention measures jitter in a galvano scanner that scans a light beam on a surface to be scanned by periodically turning a reflection mirror in a reciprocating manner. Two detectors for detecting and receiving the light beam are mounted near both ends of the scan region of the light beam, a first detection signal of each of the two detectors is extracted whenever the reflection mirror is activated for one scanning, a required time for one scanning is computed from the extracted detection signals, and a variation in the required time for each scanning is measured based on the computed required time.

摘要翻译： 本发明测量电动扫描仪中的抖动，其通过以往复方式周期性地转动反射镜来扫描要扫描的表面上的光束。 用于检测和接收光束的两个检测器安装在光束的扫描区域的两端附近，每当反射镜被激活用于一次扫描时，两个检测器中的每一个的第一检测信号被提取，一个所需的时间 根据所提取的检测信号计算扫描，并且基于所计算的所需时间来测量每次扫描的所需时间的变化。

公开(公告)号：US20060031033A1

公开(公告)日：2006-02-09

申请号：US11195466

申请日：2005-08-01

申请人： Kyoji Shimoda ,  Koichi Saito

发明人： Kyoji Shimoda ,  Koichi Saito

IPC分类号： G01R29/26

CPC分类号： G02B5/09 ,  G01R29/26 ,  G02B26/0816

摘要： The present invention measures jitter in a galvano scanner that scans a light beam on a surface to be scanned by periodically turning a reflection mirror in a reciprocating manner. Two detectors for detecting and receiving the light beam are mounted near both ends of the scan region of the light beam, a first detection signal of each of the two detectors is extracted whenever the reflection mirror is activated for one scanning, a required time for one scanning is computed from the extracted detection signals, and a variation in the required time for each scanning is measured based on the computed required time.

摘要翻译： 本发明测量电动扫描仪中的抖动，其通过以往复方式周期性地转动反射镜来扫描要扫描的表面上的光束。 用于检测和接收光束的两个检测器安装在光束的扫描区域的两端附近，每当反射镜被激活用于一次扫描时，两个检测器中的每一个的第一检测信号被提取，一个所需的时间 根据所提取的检测信号计算扫描，并且基于所计算的所需时间来测量每次扫描的所需时间的变化。

公开(公告)号：US5251194A

公开(公告)日：1993-10-05

申请号：US513079

申请日：1990-04-12

申请人： Kyosuke Yoshimoto ,  Osamu Ito ,  Kimiyuki Koyanagi ,  Yoshiki Nakajima ,  Shuitsu Takeda ,  Kyoji Shimoda

发明人： Kyosuke Yoshimoto ,  Osamu Ito ,  Kimiyuki Koyanagi ,  Yoshiki Nakajima ,  Shuitsu Takeda ,  Kyoji Shimoda

IPC分类号： G11B7/09 ,  G11B7/095

CPC分类号： G11B7/0945 ,  G11B7/094 ,  G11B7/0941 ,  G11B7/0901 ,  G11B7/0908 ,  G11B7/0946

摘要： An optical disk drive for recording and reproducing information on an optical disk medium includes a servo circuit for controlling tracking of a light beam on a predetermined track and a servo circuit for controlling focus of the light beam on the disk surface. The disk surface is divided into a plurality of regions, and calibration values for adjusting the servo circuits are determined in each region. The calibration values are stored in a memory and are used to adjust the servo circuits during tracking on a predetermined track. The calibration values include tracking offset values, focus offset values, servo deviation threshold values and sensor gain values. A number of techniques are disclosed for automatically determining the calibration values.

摘要翻译： 用于在光盘介质上记录和再现信息的光盘驱动器包括用于控制预定轨道上的光束的跟踪的伺服电路和用于控制光盘在盘表面上的聚焦的伺服电路。 磁盘表面被分成多个区域，并且在每个区域中确定用于调整伺服电路的校准值。 校准值存储在存储器中，并且用于在预定轨道上的跟踪期间调整伺服电路。 校准值包括跟踪偏移值，对焦偏移值，伺服偏差阈值和传感器增益值。 公开了用于自动确定校准值的许多技术。