公开(公告)号：US20030230727A1

公开(公告)日：2003-12-18

申请号：US10405500

申请日：2003-04-03

Applicant: LEICA MICROSYSTEMS LITHOGRAPHY LTD.

Inventor： John Tingay ,  Brian Raferty ,  Nigel Crosland

IPC: H01J037/141

CPC classification number: H01J37/141 ,  H01F5/02 ,  H01F7/202 ,  H01F27/22 ,  H01J37/147

Abstract: A device for influencing an electron beam, especially a deflector unit for an electron beam lithography machine, comprises a plurality of coil formers (12b) each with a bore (16) defining a passage for the beam and each carrying coils (18, 19) operable to generate magnetic fields for deflecting the path of the beam when passing through the passage. Each former is made of a high-strength ceramic material having a high thermal conductivity and low coefficient of thermal expansion so that, with respect to a given output of heat by the associated coils during quasi-continuous operation for repeated beam deflection during pattern writing, the heat is dissipated at such a rate as to preclude thermal expansion of the coils and thus avoid distortion of the magnetic fields generated by the coils.

Abstract translation: 用于影响电子束的装置，特别是用于电子束光刻机的偏转器单元，包括多个线圈形成器（12b），每个线圈形成器具有限定用于梁的通道的孔（16）和每个承载线圈（18,19） 可操作地产生用于在穿过通道时偏转梁的路径的磁场。 每个前者由具有高热导率和低热膨胀系数的高强度陶瓷材料制成，使得相对于相关线圈的给定输出的热量在用于模式写入期间的重复光束偏转的准连续操作期间， 热量以这样的速度消散，以防止线圈的热膨胀，从而避免由线圈产生的磁场的变形。

公开(公告)号：US20040144931A1

公开(公告)日：2004-07-29

申请号：US10760843

申请日：2004-01-20

Applicant: Leica Microsystems Lithography Ltd.

Inventor： Paul George Harris

IPC: H01J037/04

CPC classification number: H01J37/147 ,  H01J2237/002 ,  H01J2237/15

Abstract: A device for influencing an electron beam, in particular a beam deflector (10), comprises a cylindrical support body (11) with an axial passage (12) through which the beam can propagate and axially spaced sets of coils (14) supported by the body and operable by electrical energy to produce electromagnetic fields for deflection of the beam. The device includes a cooling system for counteracting temperature rise in the body (11) due to operation of the coils (14). The system comprises a pipe (15) of compliant material extending helically around and thermally conductively coupled, preferably adhesively bonded, to the support body (11) and serving to conduct liquid coolant for heat exchange with the body (11) over substantially all the external circumferential surface thereof. The cooling system further includes a pump (16) for conveying the coolant through the pipe (15) in a generally laminar flow so that, in conjunction with the flow path and pipe material, generation of vibrations is largely avoided and any vibrations that are generated are absorbed by the pipe (15) rather than transmitted to the body (11).

Abstract translation: 用于影响电子束，特别是光束偏转器（10）的装置包括具有轴向通道（12）的圆柱形支撑体（11），梁可以通过该轴向通道传播并且轴向间隔开的一组线圈（14）由 身体并且通过电能可操作以产生用于束的偏转的电磁场。 该装置包括用于抵消由于线圈（14）的操作而导致主体（11）中的温度上升的冷却系统。 该系统包括柔性材料管（15），该管道（15）螺旋地延伸并且热传导耦合，优选地粘结到支撑体（11）上，并且用于在基本上所有的外部部分上引导液体冷却剂与主体（11）进行热交换 圆周表面。 冷却系统还包括用于以大致层流的方式通过管道（15）输送冷却剂的泵（16），使得与流动路径和管道材料一起，大大地避免产生振动并产生任何振动 被管道（15）吸收，而不是被传送到主体（11）。