公开(公告)号：US10286426B2

公开(公告)日：2019-05-14

申请号：US15260691

申请日：2016-09-09

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  LITHO TECH JAPAN CORPORATION ,  ORIENTAL MOTOR CO., LTD.

Inventor： Shuuji Okuda ,  Sommawan Khumpuang ,  Shiro Hara ,  Sho Takeuchi ,  Yoshihisa Sensu ,  Takahiro Ito

IPC: B08B5/02 ,  B08B15/00 ,  H01L21/67

Abstract: A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.

公开(公告)号：US20170072438A1

公开(公告)日：2017-03-16

申请号：US15260691

申请日：2016-09-09

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  LITHO TECH JAPAN CORPORATION ,  ORIENTAL MOTOR CO., LTD.

Inventor： Shuuji OKUDA ,  Sommawan KHUMPUANG ,  Shiro HARA ,  Sho TAKEUCHI ,  Yoshihisa SENSU ,  Takahiro ITO

IPC: B08B5/02 ,  H01L21/02

CPC classification number: B08B5/02 ,  B08B15/00 ,  H01L21/67017 ,  H01L21/6715

Abstract: A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.

Abstract translation: 柱状层流产生装置包括：放置部件，用于放置处理目标; 具有开口的气体吹出部; 和气体吸入路径; 其中所述放置部分位于通过使所述开口的内壁沿垂直于所述开口的方向延伸而构成外周表面的空间中; 所述开口在其内壁中具有气体吹出口，通过所述气体吹出口沿垂直于所述开口的一个方向吹出气体; 并且气体吸入路径形成为使得气体沿与气体吹出的方向相反的方向吸入气体。 柱状层流发生装置能够产生柱状层流。