公开(公告)号：US20050255233A1

公开(公告)日：2005-11-17

申请号：US11057389

申请日：2005-02-11

申请人： Marc Madou ,  Chunlei Wang ,  Guangyao Jia ,  Lili Taherabadi ,  Benjamin Park ,  Rabih Zaouk

发明人： Marc Madou ,  Chunlei Wang ,  Guangyao Jia ,  Lili Taherabadi ,  Benjamin Park ,  Rabih Zaouk

IPC分类号： B05D5/12 ,  H01M4/58 ,  H01M4/583 ,  H01M4/66

CPC分类号： H01M4/583 ,  H01M4/663

摘要： C-MEMS architecture having high aspect ratio carbon structures and improved systems and methods for producing high aspect ratio C-MEMS structures are provided. Specifically, high aspect ratio carbon structures are microfabricated by pyrolyzing a patterned carbon precursor polymer. Pyrolysing the polymer preferably comprises a multi-step process in an atmosphere of inert and forming gas at high temperatures that trail the glass transit temperature (Tg) for the polymer. Multi-layer C-MEMS carbon structures are formed from multiple layers of negative photoresist, wherein a first layer forms carbon interconnects and the second and successive layers form high aspect ratio carbon structures. High-conductivity interconnect traces to connect C-MEMS carbon structures are formed by depositing a metal layer on a substrate, patterning a polymer precursor on top of the metal layer and pyrolyzing the polymer to create the final structure. The interconnects of a device with high aspect ratio electrodes are insulated using a self aligning insulation method.

摘要翻译： 提供了具有高纵横比碳结构的C-MEMS架构和用于生产高纵横比C-MEMS结构的改进的系统和方法。 具体地说，通过热解图案化的碳前体聚合物，高纵横比的碳结构被微制成。 热解聚合物优选包括在高温气氛中的惰性和形成气体的气氛中的多步骤过程，以达到聚合物的玻璃化转变温度（Tg）。 多层C-MEMS碳结构由多层负性光致抗蚀剂形成，其中第一层形成碳互连，第二层和连续层形成高纵横比碳结构。 用于连接C-MEMS碳结构的高导电性互连迹线通过在衬底上沉积金属层，在金属层的顶部上构图聚合物前体并热解聚合物以形成最终结构而形成。 具有高纵横比电极的器件的互连使用自对准绝缘方法绝缘。

公开(公告)号：US07534470B2

公开(公告)日：2009-05-19

申请号：US11090918

申请日：2005-03-25

申请人： Marc J. Madou ,  Chunlei Wang ,  Lili Taherabadi ,  Benjamin Park ,  Rabih Zaouk

发明人： Marc J. Madou ,  Chunlei Wang ,  Lili Taherabadi ,  Benjamin Park ,  Rabih Zaouk

IPC分类号： C23C6/00

CPC分类号： B81C1/00547 ,  B81C1/00111 ,  B82Y30/00 ,  C23C16/04 ,  C23C16/26 ,  Y10S977/844 ,  Y10S977/947

摘要： C-MEMS architecture having carbon structures with high surface areas due to high aspect ratios and nanoscale surface enhancements, and improved systems and methods for producing such structures are provided. Specifically, high aspect ratio carbon structures are microfabricated by pyrolyzing a patterned carbon precursor polymer. Pyrolysing the polymer preferably comprises a multi-step process in an atmosphere of inert and forming gas at high temperatures that trail the glass transition temperature (Tg) for the polymer. The surface area of the carbon microstructures is increases by nanotexturing the surface through oxygen plasma exposure, and by integrating nanoscale structures with the carbon microstructures by exposing the carbon microstructures and a catalyst to hydrocarbon gas. In a preferred embodiment, the carbon microstructures are the source of carbon gas.

摘要翻译： 提供了由于高纵横比和纳米级表面增强而具有高表面积的碳结构的C-MEMS架构，以及用于生产这种结构的改进的系统和方法。 具体地说，通过热解图案化的碳前体聚合物，高纵横比的碳结构被微制成。 热解聚合物优选在惰性气氛中在高温下形成气体的多步法，该温度跟踪聚合物的玻璃化转变温度（Tg）。 碳微观结构的表面积通过使氧等离子体暴露的纳米表面增加，并且通过将碳微结构和催化剂暴露于烃气体中而将纳米尺度结构与碳微结构相结合而增加。 在优选的实施方案中，碳微结构是碳气体的来源。

公开(公告)号：US20060068107A1

公开(公告)日：2006-03-30

申请号：US11090918

申请日：2005-03-25

申请人： Marc Madou ,  Chunlei Wang ,  Lili Taherabadi ,  Benjamin Park ,  Rabih Zaouk

发明人： Marc Madou ,  Chunlei Wang ,  Lili Taherabadi ,  Benjamin Park ,  Rabih Zaouk

IPC分类号： C23C16/00

CPC分类号： B81C1/00547 ,  B81C1/00111 ,  B82Y30/00 ,  C23C16/04 ,  C23C16/26 ,  Y10S977/844 ,  Y10S977/947

摘要： C-MEMS architecture having carbon structures with high surface areas due to high aspect ratios and nanoscale surface enhancements, and improved systems and methods for producing such structures are provided. Specifically, high aspect ratio carbon structures are microfabricated by pyrolyzing a patterned carbon precursor polymer. Pyrolysing the polymer preferably comprises a multi-step process in an atmosphere of inert and forming gas at high temperatures that trail the glass transition temperature (Tg) for the polymer. The surface area of the carbon microstructures is increases by nanotexturing the surface through oxygen plasma exposure, and by integrating nanoscale structures with the carbon microstructures by exposing the carbon microstructures and a catalyst to hydrocarbon gas. In a preferred embodiment, the carbon microstructures are the source of carbon gas.