OPTICAL EMISSION SYSTEM INCLUDING DICHROIC BEAM COMBINER

    公开(公告)号:US20130286390A1

    公开(公告)日:2013-10-31

    申请号:US13460308

    申请日:2012-04-30

    IPC分类号: G01J3/28

    摘要: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.

    Optical emission system including dichroic beam combiner
    2.
    发明授权
    Optical emission system including dichroic beam combiner 有权
    光发射系统包括二向色光束组合器

    公开(公告)号:US09279722B2

    公开(公告)日:2016-03-08

    申请号:US13460308

    申请日:2012-04-30

    摘要: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.

    摘要翻译: 光发射光谱仪系统包括光源和二向色光束组合器。 光源沿第一方向发射第一光,而在与第一方向不同的第二方向上发射第二光。 二向色光束组合器经由第一光路接收第一光,经由第二光路接收第二光,将第一光的一部分反射到光检测和测量装置的入射孔中,并将第二光的一部分透射 入口孔径,同时能够分析和测量第一和第二光特性。 反射到入口孔中的第一光的部分主要具有波长在第一波长范围内的波长,并且透射入入口的第二光的部分主要具有不同于第一波长范围的第二波长范围的波长。