公开(公告)号：US4910549A

公开(公告)日：1990-03-20

申请号：US236848

申请日：1988-08-26

申请人： Mamoru Sugita

发明人： Mamoru Sugita

IPC分类号： G03F7/20

CPC分类号： G03F7/2022

摘要： In an exposure method of the present invention, exposure light is radiated onto a peripheral portion of a substrate to be processed while the substrate is rotated, and the rotational speed of the substrate is selectively decreased when a specific peripheral portion reaches an exposure area, thereby performing predetermined exposure of the substrate. An exposure apparatus of the present invention includes a mounting table on which the substrate is mounted, a rotating mechanism for rotating the mounting table at a predetermined rotational speed, a light radiating element arranged to oppose a mounting surface of the mounting table, light amount control means for controlling the amount of light radiated from the light radiating element onto the substrate, and rotational speed control means for controlling the rotational speed of the mounting table in accordance with the radiation amount of light from the light radiating element.

摘要翻译： 在本发明的曝光方法中，当基板旋转时，曝光光被照射到待处理的基板的周边部分上，并且当特定的周边部分到达曝光区域时，基板的旋转速度被选择性地降低，从而 执行基板的预定曝光。 本发明的曝光装置包括安装基板的安装台，以预定旋转速度旋转安装台的旋转机构，与安装台的安装面相对设置的光辐射元件，光量控制 用于控制从光辐射元件辐射到基板上的光量的装置;以及转速控制装置，用于根据来自光辐射元件的光的辐射量来控制安装台的转速。

公开(公告)号：US4246543A

公开(公告)日：1981-01-20

申请号：US32755

申请日：1979-04-24

申请人： Masaru Noda ,  Toshio Murakami ,  Mamoru Sugita

发明人： Masaru Noda ,  Toshio Murakami ,  Mamoru Sugita

IPC分类号： H03G3/20 ,  H03G3/30 ,  H04N5/52

CPC分类号： H04N5/52 ,  H03G3/3068

摘要： A delayed AGC circuit in which an AGC detection output is divided into two portions, one of them is applied through buffer means to an IF amplification stage to thereby control the gain thereof, and the other portion is applied to a tuner through a threshold circuit to thereby control the gain thereof. A variable resistor or potentiometer for AGC delay adjustment and a high-frequency bypass device are connected at a point in the AGC signal path from the output of the buffer means to the IF amplification stage.

摘要翻译： AGC检测输出被分为两部分的延迟AGC电路，其中一个通过缓冲器施加到IF放大级，从而控制其增益，另一部分通过阈值电路施加到调谐器 从而控制其增益。 用于AGC延迟调整的可变电阻器或电位器和高频旁路装置连接在AGC信号路径中从缓冲器装置的输出到IF放大级的点处。