公开(公告)号：US20100328670A1

公开(公告)日：2010-12-30

申请号：US12494734

申请日：2009-06-30

Applicant: Lawrence D. Rotter ,  David Y. Wang ,  Derrick Shaughnessy ,  Mark Senko

Inventor： Lawrence D. Rotter ,  David Y. Wang ,  Derrick Shaughnessy ,  Mark Senko

IPC: G01N21/55

CPC classification number: G01N21/1717 ,  G01N2021/1731 ,  G01N2021/1761

Abstract: A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.

Abstract translation: 公开了一种用于进行样品的光热测量和松弛补偿的装置和方法。 该装置可以包括探针束源，泵浦束源，样本和检测器阵列。 方法可以包括调整强度调制的泵浦光束功率，调整探测光束功率以增加响应测量位置温度并增加经调制的光反射信号，将强度调制的泵浦光束和探测光束沿测量路径引导到响应测量 定位在样品上以周期性地激发样品上的区域，检测探测光束的反射部分，以及计算植入剂量。

公开(公告)号：US08111399B2

公开(公告)日：2012-02-07

申请号：US12494734

申请日：2009-06-30

Applicant: Lawrence D. Rotter ,  David Y. Wang ,  Derrick Shaughnessy ,  Mark Senko

Inventor： Lawrence D. Rotter ,  David Y. Wang ,  Derrick Shaughnessy ,  Mark Senko

IPC: G01N21/55

CPC classification number: G01N21/1717 ,  G01N2021/1731 ,  G01N2021/1761

Abstract: A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.

Abstract translation: 公开了一种用于进行样品的光热测量和松弛补偿的装置和方法。 该装置可以包括探针束源，泵浦束源，样本和检测器阵列。 方法可以包括调整强度调制的泵浦光束功率，调整探测光束功率以增加响应测量位置温度并增加经调制的光反射信号，将强度调制的泵浦光束和探测光束沿测量路径引导到响应测量 定位在样品上以周期性地激发样品上的区域，检测探测光束的反射部分，以及计算植入剂量。