SUPER-RESOLUTION THERMOREFLECTANCE THERMAL MEASUREMENT SYSTEM

    公开(公告)号:US20240125692A1

    公开(公告)日:2024-04-18

    申请号:US17964519

    申请日:2022-10-12

    IPC分类号: G01N21/17 G01N21/55

    摘要: A system and method for performing nanoscale thermal property characterization of materials. The system combines the operating principles of thermoreflectance-based techniques and scanning probe microscopy techniques into a hybrid solution capable of deriving thermophysical properties of a sample. A pump laser beam heats a distal end of a cantilever, and a probe laser beam is reflected off of a specular surface at the distal end of the cantilever carrying with it thermoreflectance data that can be used to extract thermophysical properties of the sample region adjacent to a tip suspended at the distal end of the cantilever.

    HIGH-THROUGHPUT FLUORESCENCE IMAGING SYSTEM AND DEVICE WITH SAMPLE HEATING CAPABILITY, AND ASSOCIATED METHODS
    3.
    发明申请
    HIGH-THROUGHPUT FLUORESCENCE IMAGING SYSTEM AND DEVICE WITH SAMPLE HEATING CAPABILITY, AND ASSOCIATED METHODS 有权
    高通量荧光成像系统及具有样品加热能力的装置及相关方法

    公开(公告)号:US20160103068A1

    公开(公告)日:2016-04-14

    申请号:US14513985

    申请日:2014-10-14

    发明人: Bowei Zhang

    IPC分类号: G01N21/64 G01N21/03

    摘要: A high-throughput fluorescence imaging system with sample heating capability includes an image sensor wafer with a plurality of image sensors for fluorescence imaging a plurality of samples disposed in a respective plurality of fluidic channels on the image sensor wafer. The high-throughput fluorescence imaging system further includes a heating module, thermally coupled with the image sensor wafer, for heating the samples. A method for high-throughput assay processing includes modulating temperature of a plurality of samples disposed in a respective plurality of fluidic channels on an image sensor wafer by heating the image sensor wafer, using a heating module thermally coupled with the image sensor wafer, to control reaction dynamics in the samples; and capturing a plurality of fluorescence images of the samples, using a respective plurality of image sensors of the image sensor wafer, to detect one or more components of the plurality of samples.

    摘要翻译: 具有样品加热能力的高通量荧光成像系统包括具有多个图像传感器的图像传感器晶片,用于荧光成像用于设置在图像传感器晶片上的相应多个流体通道中的多个样品。 高通量荧光成像系统还包括与图像传感器晶片热耦合的用于加热样品的加热模块。 用于高通量测定处理的方法包括通过使用与图像传感器晶片热耦合的加热模块加热图像传感器晶片来调制设置在图像传感器晶片上的相应多个流体通道中的多个样品的温度,以控制 样品中的反应动力学; 以及使用所述图像传感器晶片的相应多个图像传感器捕获所述样本的多个荧光图像,以检测所述多个样本中的一个或多个分量。

    METHOD OF SPATIAL HIGH RESOLUTION IMAGING OF A STRUCTURE OF A SAMPLE, THE STRUCTURE COMPRISING A LUMINOPHORE
    4.
    发明申请
    METHOD OF SPATIAL HIGH RESOLUTION IMAGING OF A STRUCTURE OF A SAMPLE, THE STRUCTURE COMPRISING A LUMINOPHORE 有权
    样品结构的空间高分辨率成像方法,包含荧光体的结构

    公开(公告)号:US20150308954A1

    公开(公告)日:2015-10-29

    申请号:US14791919

    申请日:2015-07-06

    发明人: Stefan W. Hell

    IPC分类号: G01N21/64 G01N21/65

    摘要: For spatial high resolution imaging of a structure of a sample, the structure comprising a luminophore, the sample, in a measurement area, is subjected to an intensity distribution of luminescence inhibiting light comprising a local minimum. Then, the sample, in the measurement area, is subjected to luminescence excitation light which excites the luminophore out of an electronic ground state into a luminescent state, and luminescence light emitted out of the measurement area is registered. This registered luminescence light is assigned to the position of the local minimum within the sample. The luminescence inhibiting light disturbs the electronic ground state of the luminophore such that the luminophore, in the disturbed electronic ground state, has an absorption cross-section for the luminescence excitation light which is reduced by at least 50% as compared to the undisturbed electronic ground state.

    摘要翻译: 对于样品结构的空间高分辨率成像,包含发光体的结构,在测量区域中的样品经受包括局部最小值的抑制抑光的强度分布。 然后,在测量区域中的样品经受将发光体从电子基态激发到发光状态的发光激发光,并且记录从测量区域发射的发光。 该注册的发光灯被分配给样品内局部最小值的位置。 发光抑制光干扰发光体的电子基态,使得处于受干扰的电子基态中的发光体具有用于发光激发光的吸收截面,与未受干扰的电子地相比减少了至少50% 州。

    METHOD FOR DETERMINING THE DOPING PROFILE OF A PARTIALLY ACTIVATED DOPED SEMICONDUCTOR REGION
    6.
    发明申请
    METHOD FOR DETERMINING THE DOPING PROFILE OF A PARTIALLY ACTIVATED DOPED SEMICONDUCTOR REGION 有权
    用于确定部分激活的掺杂半导体区域的掺杂分布的方法

    公开(公告)号:US20130335744A1

    公开(公告)日:2013-12-19

    申请号:US13689540

    申请日:2012-11-29

    IPC分类号: G01N21/55

    摘要: A method is disclosed for determining the inactive doping concentration of a semiconductor region using a PMOR method. In one aspect, the method includes providing two semiconductor regions having substantially the same known as-implanted concentration but known varying junction depths. The method includes determining on one of these semiconductor regions the as-implanted concentration. The semiconductor regions are then partially activated. PMOR measures are then performed on the partially activated semiconductor regions to measure (a) the signed amplitude of the reflected probe signal as function of junction depth and (b) the DC probe reflectivity as function of junction depth. The method includes extracting from these measurements the active doping concentration and then calculating the inactive doping concentration using the determined total as-implanted concentration and active doping concentration. The method may also include extracting thermal diffusivity, refraction index, absorption coefficient, and/or SRHF lifetime from these measurements.

    摘要翻译: 公开了一种使用PMOR方法确定半导体区域的非活性掺杂浓度的方法。 在一个方面,该方法包括提供具有基本相同的已知植入浓度但是已知的变化的结深度的两个半导体区域。 该方法包括在这些半导体区域中的一个上确定注入的浓度。 然后半导体区域被部分激活。 然后对部分激活的半导体区域执行PMOR测量,以测量(a)反射探测信号的符号振幅作为结深度的函数,以及(b)DC探针反射率作为结深度的函数。 该方法包括从这些测量中提取有源掺杂浓度,然后使用确定的总注入浓度和有源掺杂浓度来计算非活性掺杂浓度。 该方法还可以包括从这些测量中提取热扩散率,折射率,吸收系数和/或SRHF寿命。

    Method and apparatus for characterizing a multilayered structure
    7.
    发明授权
    Method and apparatus for characterizing a multilayered structure 有权
    用于表征多层结构的方法和装置

    公开(公告)号:US08144315B2

    公开(公告)日:2012-03-27

    申请号:US12757075

    申请日:2010-04-09

    IPC分类号: G01N21/00

    摘要: An apparatus and method for characterizing the complex coupling coefficient of a multilayered periodic structure either during or after inscription is described. This apparatus is capable of continuously measuring the complex reflectivity at single or multiple wavelengths to a resolution limited by Rayleigh scattering in the waveguide section where the structure is inscribed. The apparatus is also capable of rejecting undesired signals associated with stray reflections in the system and unwanted environmentally induced change in optical path lengths during the inscription procedure. The complex coupling coefficient of the multilayered periodic structure can be derived from the measured complex reflectivity and can reveal errors present in the structure. The complex coupling coefficient can also be used to derive an error signal to enable implementation of a closed loop inscription system capable of inscribing error free multilayer structures.

    摘要翻译: 描述了在刻录期间或之后表征多层周期结构的复合耦合系数的装置和方法。 该装置能够将单个或多个波长处的复反射率连续地测量到在结构被刻录的波导部分中由瑞利散射限制的分辨率。 该装置还能够拒绝与系统中的杂散反射相关联的不期望的信号以及在刻录过程期间不期望的环境引起的光程长度的变化。 多层周期结构的复耦合系数可以从测量的复反射率导出,并且可以揭示结构中存在的误差。 复耦合系数也可用于导出误差信号,以实现能够刻写无错误多层结构的闭环铭文系统。

    Method and system for optical detection of nano-objects in a light refracting medium
    9.
    发明授权
    Method and system for optical detection of nano-objects in a light refracting medium 有权
    光折射介质中纳米物体的光学检测方法和系统

    公开(公告)号:US07889343B2

    公开(公告)日:2011-02-15

    申请号:US11631621

    申请日:2005-07-01

    IPC分类号: G01J4/00 G01N21/41 G30G5/16

    摘要: Method and system for optical detection of nano-objects in a refracting medium. A nano-object (n_oi) and the refractive medium are illuminated (A) with a periodically amplitude modulated coherent electromagnetic heating wave (HB(Ω)), to generate a specified temperature and refractive index profile in the vicinity of the nano-object, and with a coherent electromagnetic probe wave (PB) to generate an emerging probe wave (EPB(Ω)) having at least one intensity component amplitude modulated by a beat at the modulation frequency of the coherent heating wave. The intensity component amplitude modulated by a beat is detected (C) in the emerging wave (EPB(Ω)), to distinguish and represent this nano-object in the refractive medium. The invention is useful in the detection of nano-objects in an industrial, physiological or intracellular medium.

    摘要翻译: 折射介质中纳米物体的光学检测方法和系统。 纳米物体(n_oi)和折射介质用周期性调幅相干电磁加热波(HB(&OHgr))照射(A),以在纳米物体附近产生规定的温度和折射率分布 并且具有相干的电磁探测波(PB)以产生具有在相干加热波的调制频率处由节拍调制的至少一个强度分量振幅的新兴探测波(EPB(&OHgr)))。 在出现的波(EPB(&OHgr))中检测到由拍子调制的强度分量幅度(C),以在折射介质中区分并表示该纳米物体。 本发明可用于检测工业,生理或细胞内介质中的纳米物体。

    MOLECULAR ANALYSIS
    10.
    发明申请
    MOLECULAR ANALYSIS 审中-公开
    分子分析

    公开(公告)号:US20100321691A1

    公开(公告)日:2010-12-23

    申请号:US12918100

    申请日:2008-02-18

    申请人: David Gregson

    发明人: David Gregson

    IPC分类号: G01J3/447 G01J3/28 G01N21/19

    摘要: A spectrometer for analysing material comprises a light source, a monochromator for selecting a range of wave-lengths from the light source and emitting them as monochromatic light, a chamber for locating a sample, a focusing means for focusing the monochromatic light onto a sample in the chamber, a detector for measuring the monochromatic light after it has interacted with the sample. An independently variable parameter is varied between two values vi and v2, while the detector measures the monochromatic light across a range of is wavelengths, the independent variable having a value or values between v1 and v1+Δv, and Δv being much smaller than the interval between v1 and v2.

    摘要翻译: 用于分析材料的光谱仪包括光源,用于从光源中选择波长范围并将其作为单色光发射的单色仪,用于定位样品的室,用于将单色光聚焦到样品上的聚焦装置 该室是用于在与样品相互作用后测量单色光的检测器。 独立变量参数在两个值vi和v2之间变化,而检测器测量波长范围内的单色光,该独立变量具有v1或v1 +&Dgr; v和/ 小于v1和v2之间的间隔。