公开(公告)号：US20120121371A1

公开(公告)日：2012-05-17

申请号：US13266648

申请日：2010-05-26

申请人： Martin Aenis ,  Christof Klesen ,  Ulrich Oldendorf ,  Thomas Sebald

发明人： Martin Aenis ,  Christof Klesen ,  Ulrich Oldendorf ,  Thomas Sebald

IPC分类号： B65G47/74

CPC分类号： H01L21/67766 ,  H01L21/67742

摘要： A device for particle free handling of substrates of micro technology within mini environments under clean room conditions works friction free and thus particle free. One component of the device is movable relative to an other component in at least the x-, y-, z-axes and a Φ-direction and supported and driven along each of the axes and the direction contactless electromagnetically. Transmission of energy for bearing and driving the one component is effected contactless. The device includes at least one active component and at least one passive component. A movable active component may be guided on the fixed passive component by a magnet bearing, and a drive motor which rides with the active component may be coupled with an energy supply over an electromagnetic coupling.

摘要翻译： 在洁净室条件下，在微型环境中无微粒子处理微技术基板的装置无摩擦，因此无颗粒。 该装置的一个部件至少在x轴，y轴，z轴和Φ方向上相对于另一部件是可移动的，并且沿着每个轴和方向非电磁地被支撑和驱动。 用于轴承和驱动一个部件的能量传输是非接触式的。 该装置包括至少一个有源部件和至少一个无源部件。 可移动有源部件可以通过磁体轴承在固定的无源部件上引导，并且与有源部件相乘的驱动马达可以通过电磁耦合与能量供给装置联接。

公开(公告)号：US20130245826A1

公开(公告)日：2013-09-19

申请号：US13882657

申请日：2012-06-19

申请人： Ulrich Oldendorf

发明人： Ulrich Oldendorf

IPC分类号： B25J9/16

CPC分类号： B25J9/1653 ,  B25J9/1692 ,  G05B2219/45031 ,  G05B2219/45063 ,  G05B2219/49272 ,  H01L21/677 ,  H01L21/67766 ,  H01L21/68

摘要： Method for calibrating a robot mounted on active magnetic bearings and having a gripper vertically positionable along a z axis and which is displaceable in a first magnetic bearing along an x axis and in a second magnetic bearing along a y axis includes dividing the first and second magnetic bearings into four mounting points; defining the setpoint center coordinates for the X, Y, Z axes and also the setpoint values for the angular positions δ, ε and transformation of the setpoint values into setpoint values for the vertical setpoint positions of the mounting points; specifying the actuating forces for the electromagnets of the mounting points; determining the current vertical positions for the mounting points; measuring the current vertical position of the mounting points and conversion into actual center coordinates; comparing the actual center coordinates with the setpoint center coordinates, determining the deviation and repeating the preceding steps.

摘要翻译： 用于校准安装在主动磁轴承上的机器人，并且具有可沿着z轴垂直定位并且沿着x轴在第一磁轴承中可移动的夹具和沿着a轴的第二磁性轴承中的机器的方法包括将第一和第二磁性轴承分成 四个安装点; 定义X，Y，Z轴的设定点中心坐标，以及角位置的设定值delta，epsilon，并将设定值转换为安装点的垂直设定点位置的设定值; 指定安装点的电磁体的致动力; 确定安装点的当前垂直位置; 测量安装点的当前垂直位置并转换成实际的中心坐标; 将实际中心坐标与设定点中心坐标进行比较，确定偏差并重复前述步骤。