公开(公告)号：US4829189A

公开(公告)日：1989-05-09

申请号：US71889

申请日：1987-07-10

申请人： Tokuju Goto ,  Itsuo Tanaka ,  Masakatu Takahashi ,  Yoshikazu Sando ,  Hiroshi Ishidoshiro

发明人： Tokuju Goto ,  Itsuo Tanaka ,  Masakatu Takahashi ,  Yoshikazu Sando ,  Hiroshi Ishidoshiro

IPC分类号： B29C59/14 ,  C23C8/36 ,  C23C16/505 ,  C23C16/54 ,  H01J37/18

CPC分类号： C23C8/36 ,  B29C59/14 ,  C23C16/505 ,  C23C16/545 ,  H01J37/185

摘要： An apparatus for low-temperature plasma treatment of a sheet material, comprising a plurality of reaction zones through which the sheet material is transported in an enclosed reaction chamber whose inner pressure can be reduced, in which the reaction zones are provided respectively with an electrode communicating to a high frequency generating device and a plurality of jet nozzles for supplying a gas thereto for generating low-temperature plasma gas, and the reaction chamber and the reaction zones are earthed. Another apparatus for the same purpose is to provide a liquid medium passage passing through the guide rolls for transporting a sheet material to be treated and through the electrodes under reduced pressure for heating or cooling the sheet material under treatment to a prescribed temperature. Further an electric energy feeding device for the electrodes comprising a shielded wire jointer having a cooling mechanism for connecting a shielded wire coming out of a high frequency generating device to the electrodes for generating low-temperature plasma.

摘要翻译： 一种用于片材的低温等离子体处理的装置，包括多个反应区，通过该多个反应区，片材在其内部压力可以减小的封闭反应室中输送，其中反应区分别设置有电极连通 涉及一种高频发生装置和多个用于向其供应气体以产生低温等离子体气体的喷嘴，反应室和反应区域接地。 用于相同目的的另一种装置是提供一种通过导辊的液体介质通道，用于输送待处理的片材和减压的电极，以将处理的片材加热或冷却至规定温度。 此外，电极用电力馈送装置包括屏蔽线接合器，其具有用于将从高频产生装置出来的屏蔽线连接到用于产生低温等离子体的电极的冷却机构。