公开(公告)号：US4939762A

公开(公告)日：1990-07-03

申请号：US275534

申请日：1988-11-15

申请人： Noboru Baba ,  Yusaku Nakagawa ,  Masatake Fukushima ,  Masateru Suwa ,  Ichiro Inamura

发明人： Noboru Baba ,  Yusaku Nakagawa ,  Masatake Fukushima ,  Masateru Suwa ,  Ichiro Inamura

IPC分类号： H01J9/14 ,  H01J35/10

CPC分类号： H01J35/108 ,  H01J2235/084

摘要： An X-ray target having a graphite body and an X-ray generating metal coating layer, in that a metal interlayer which is non-reactive with graphite and which has a coefficient of thermal expansion substantially equal to those of the graphite and the X-ray generating metal coating layer is formed at the boundary between the graphite body and the X-ray generating metal coating layer, and that the interlayer is caused to percolate into the graphite body. Desirably, the interlayer includes a part percolating into the graphite body over a depth of at least 10 .mu.m. The X-ray target can be manufactured in such a way that the surface of the graphite body is coated with the metal interlayer by subjecting the surface to chemical vapor deposition under a normal pressure or under a pressure near the normal pressure, and that the metal interlayer is thereafter coated with an X-ray generating metal by an expedient such as chemical vapor deposition, sputtering or thermal spraying. Owing to the percolation of the metal interlayer into the graphite body, the contact area of the two increases conspicuously, and heat having developed in the X-ray generating metal coating layer is quickly transmitted to the graphite body.

摘要翻译： PCT No.PCT / JP88 / 00289 Sec。 371日期：1988年11月15日 102（e）1988年11月15日日期PCT提交1988年3月18日PCT公布。 出版物WO88 / 07260 PCT 日期：1988年9月22日。具有石墨体和X射线产生金属被覆层的X射线靶，其特征在于，与石墨不反应的金属中间层，其热膨胀系数基本上等于 的石墨和X射线产生金属涂层形成在石墨体和X射线产生金属涂层之间的边界处，并且使中间层渗入到石墨体中。 理想地，中间层包括在至少10μm的深度渗透到石墨体中的部分。 X射线靶可以通过在常压或常压附近的表面进行化学气相沉积，以使得石墨体的表面被金属中间层涂覆的方式制造，并且金属 然后通过诸如化学气相沉积，溅射或热喷涂的方法用X射线产生金属涂覆中间层。 由于金属中间层渗透到石墨体中，两者的接触面积明显增加，并且在X射线产生金属涂层中产生的热迅速传递到石墨体。